Body Size: 20, Thread: Rc, Port: 02 (1/4), Option: G (Round Pressure Gauge w/Limit Indicator), Attachment: T (T Spacer), Semi-Standard 1: Standard, Semi-Standard 2: R (Flow Direction: Right->Left)
Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: T (Power Saver), Voltage: 5 (24VDC), Electrical Entry: MO (M Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: N11 (3/8" One touch Fitting), Thread: T (NPTF)
Body Size: 20, Thread: N (NPT), Port: 02 (1/4), Option: G (Round Pressure Gauge w/Limit Indicator), Attachment: T (T-spacer), Semi-Standard 1: Standard, Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F)
Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: T (Power Saver), Voltage: 5 (24VDC), Electrical Entry: MO (M Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: 01 (Body Ported 1/8), Thread: T (NPTF)
Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: T (Power Saver), Voltage: 6 (12VDC), Electrical Entry: M (M Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: N11 (3/8" One-touch Fitting), Thread: T (NPTF)
Function: 3 (3 Position Closed Center), Body Option: 20 (Body Ported/Individual Pilot EXH), Pilot: Internal Pilot, Voltage: 5 (24VDC), Lead Wire: T (Conduit Terminal), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: 02 (Base Mounted w/Sub-plate 1/4, Body Ported 1/4), Thread: T (NPTF)
Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: T (Power Saver), Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style), A, B Port Size: N7 (1/4" One-touch Fitting
Precision Clean Regulator 40 60 80 100 120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate L/min (ANR) Flow rate L/min (ANR) SRP1101-01 Conditions/Inlet pressure: 0.5 MPa SRP1-01 Conditions/Inlet pressure: 0.7 MPa 0.25 0.50 0.20 0.40 Outlet pressure MPa Outlet pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate L/min (ANR) Flow rate L/min (
Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance. An angled supply port facilitates the supply of circulating fluid, even when units are stacked. A large digital display provides a clear view of the current and set values. The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter
Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.? An angled supply port facilitates the supply of circulating fluid, even when units are?stacked.? A?large digital display provides a clear view of the current and set values.? The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS?filter
Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance. An angled supply port facilitates the supply of circulating fluid, even when units are stacked. A large digital display provides a clear view of the current and set values. The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter
Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance. An angled supply port facilitates the supply of circulating fluid, even when units are stacked. A large digital display provides a clear view of the current and set values. The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter
The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
7No.PF-OMO0004CN-E * () () CE 050 -8No.PF-OMO0004CN-E * 10 /23% 3 * OUT * 23 -9No.PF-OMO0004CN-E PFMB 7 A*8 201 2~200L/min 8 2 (11) S () C8 8(5/16") *6 02*1 Rc1/4 M SI*7 N02*1 NPT1/4 6 F02*1 G1/4*2 SI 1 2ISO1179-1 7:L/min :L 1 (11) L*3 3 OUT1 OU2 A NPN NPN B PNP PNP C NPN (1~5V) D NPN (4~20mA) E*4 PNP (1~5V) F*4 PNP (4~20mA) G*4 NPN *5 H*4 PNP *5 4 5 -10No.PF-OMO0004CN-E 1 W
used STX ETX ACK NAK ASCII code 30H 31H 32H 33H 34H 35H 36H 37H 38H 39H Number used 0 1 2 3 4 5 6 7 8 9 ASCII code 2DH 20H Number used SP Space Minus ASCII code 41H 42H 43H 44H 45H 46H 47H 48H 49H 4AH Character used A B C D E F G H I J ASCII code 4BH 4CH 4DH 4EH 4FH 50H 51H 52H 53H 54H Character used K L M N O P Q R S T ASCII code 55H 56H 57H 58H 59H 5AH Character used U V W X Y Z HEF002
58H 59H 5AH Character used U V W X Y Z INR-244-831 3-9 Troubleshooting 4 Troubleshooting The table below shows the solutions for the problems.
Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalLEFB25A300, 500, 600, 700, 800, 9001000, 1200, 1500, 1800, 2000248 to 20003,000o0.14850/20BeltLinear guide5 to 4090 or less (No condensation);4236Servo motor (24
Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalLEFB25A300, 500, 600, 700, 800, 9001000, 1200, 1500, 1800, 2000248 to 20003,000o0.14850/20BeltLinear guide5 to 4090 or less (No condensation);4236Servo motor (24