MXH Series Compact Slide

22 7 4 11 MXH16, 20 (16, 20) 20 6 21 17 2 1 19 5 18 18 8 10 4 7 22 23 13 24 3 12 11 Parts list Parts list Description Material Note Description Material No.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

to 131) Ambient temperature C (F) 5 to 50 (23 to 122) 5 to 55 (23 to 131) 5 to 50 (23 to 122) Outlet air atmospheric pressure dew point C (F) Standard performance 20 (-4) Inlet air flow rate l/min (ANR) (SCFM) Note 2) 625 (22.0) 62 (2.19) 125 (4.41) 250 (8.82) 375 (13.24) Outlet air flow rate l/min (ANR) (SCFM) 50 (1.8) 100 (3.5) 200 (7.1) 300 (10.6) 500 (1.77) Purge air flow rate l/min

HRX-OM-W004

Table 3.9-1 Function codes NO Code Name Function 1 04(04h) read holding registers Reading multiple registers 2 06(06h) preset single register Writing registers1 3 16(10h) preset multiple registers Writing multiple registers 4 23(17h) read/write 4x registers Reading/writing multiple registers 1Broadcast is not supported.

1

Auto Switch Proper Mounting Position [mm] Auto Switch Mounting Height [mm] Auto switch model Auto switch model D-M9m(V) D-M9mW(V) D-M9mA(V) D-M9m D-M9mW D-M9mA D-M9mV D-M9mWV D-M9mAV Bore size Bore size A B 20 4 8.5 25 4.5 9 32 4.5 9.5 40 7 12 Hs1 Hs2 Hs1, Hs2 Hs1 Hs2 20 16.5 17 17 23 17 25 19 19.5 19.5 25.5 19.5 32 22.5 23 23 29 23 40 26.5 27 27 32.5 27 * Adjust the auto switch after confirming

Thermo-chiller/Rack Mount Type

p. 17 Specifications VCooling Capacity Calculation Air-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 18 Required Cooling Capacity Calculation pp. 39, 40 Water-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 19 Precautions on Cooling Capacity Calculation p. 40 Circulating Fluid Typical Physical Property Values p. 40 Cooling Capacity pp. 20, 21 Heating Capacity pp. 22, 23

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Type 60P Flat Ribbon Cable Type (26 pins) Without Power Supply Terminal With Power Supply Terminal Positive common Negative common Common 26 26 26 Positive pin (Common) Positive pin 25 25 25 Station 12 SOL.b 24 24 24 Negative pin Negative pin (Common) SOL.a 23 23 23 Station 11 SOL.b 22 22 22 Unused terminal Unused terminal SOL.a 21 Station 20 21 Station 20 21 20 20 6 6 SOL.b Station 5 SOL.b

Speed Controller with

Metric Size Applicable tubing 23 04 06 08 10 12 3.2 4 6 8 10 12 AS1002Fm TMH-23J TMH-04J TMH-06J AS2002Fm AS2052Fm TMH-06 TMH-08 AS3002Fm TMH-07 TMH-10 TMH-12 AS4002Fm TMH-13 Tubing size Applicable model The applicable TMH for the AS1002Fm-02 is not available.

Basic Type/Direct Mount Type

CY36 Consult with SMC in case a bracket with weight exceeding the above value is to be mounted. 28 27 26 25 24 23 22 21 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1000 2000 3000 4000 5000 6000 CY315 Note 1) According to the dead weight deflection in the figure on the right, provide clearance so that the cylinder does not touch the mounting surface or the load, etc., and is able

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Holder mounting Metric Size Applicable tubing 23 04 06 08 10 12 3.2 4 6 8 10 12 AS1002FS TMH-23J TMH-04J TMH-06J AS2002FS AS2052FS TMH-06 TMH-08 AS3002FS TMH-07 TMH-10 TMH-12 AS4002FS TMH-13 Tubing size Applicable model The applicable TMH for the AS1002FS-02 is not available.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Port size AS-D U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 AS-T ASP Needle Valve/Flow Rate Characteristics ASN AS2201FSl-U02, AS2211FSl-U02 AS2201FSl-U01, AS2211FSl-U01 300 600 AQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 500 ASV 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 03, 04 06, 07 200 400 AK 01, 23 300 VCHC 03, 04 100 200 ASR ASQ 01, 23

C76

Series C76: 32, 40 Operating pressure Mounting style Maximum stroke that can be used according to buckling strength 100.0 Nominal symbol C76 Mounting bracket diagram 32 40 (MPa) Lateral load applied to the rod end fR (N) Foot: L Rod side flange: F Head side flange: G 0.3 58 54 10.0 L C7640 44 0.5 40 W W W F 36 0.7 33 C7632 24 0.3 23 G 17 0.5 16 1.0 13 0.7 13 Clevis: C, D Rod side trunnion

Brake mechanism added

64 24 20 28.5 13.5 40 10 15 17 26 67 18 11 M10 x 1.25 9 48.5 174 14 25 to 750 25 to 600 40 70 37 32 23 78 25 15.5 52 14 17 21 30 72 23 13 M12 x 1.75 11 117.5 102 55 26.5 36 189 17 25 to 750 25 to 600 40 80 37 131.5 41 116 56.5 25 92 35.5 30 36 15.5 52 14 19 21 31 76 25 16 M12 x 1.75 11 198 17 Without rod boot With rod boot Bore size (mm) MM N NN P S W l H ZZ e f h ZZ 40 50 63 80 100 M14

Vacuum Pad

A B D ZPB2J10-B5 34 47 23 ZPB2J20-B5 72 85 51 Part no. A B D ZPB2K10-B5 34 47 23 ZPB2K20-B5 72 85 51 Applicable pad with adapter part no. ZP3P-T20PTSF-B5 ZP3P-T25PTSF-B5 Applicable pad with adapter part no.

Made to Order Specifications:

Refer to How to Order for standard specifications on pages 14-20-3, 16, 23, and 31.

MK

65 46 22 77 88 18 22 8 8.2 M10 x 1.5 40 11.5 52.5 23 65 46 22 76.5 88 18 22 8 8.2 RB J Mounting arms for width across flats D-X 20Data When installing the arm for the parllel section at the rod end, the strength of the piston rod might be insufficient depending on the direction in which the arm is installed.

C76

2 6-10-22 23 Series C76 Air Cylinder: Standard/Non-rotating Type Single Acting, Spring Return/Extended Construction [First angle projection] Single acting, Single rod C7632/40-T Spring extended !9 r i y !7 u @0 q !4 !8 !3 !6 !1 e o !0 !5 @1 !

CUJ

Bore size (mm) 4, 6, 8, 10 Port size M3 x 0.5 6 8 or more Stroke (mm) AS121F-M3-23 AS121F-M3-04 AS131F-M3-23 AS131F-M3-04 Only applicable to the mounting position shown in Fig. (1) below.

Auto Switch Guide

Connector D-H7A1/H7A2/H7B D-G59/G5P/K59 D-H7C D-G39/K39 D-G39A/K39A D-F79/F7P/J79 D-F7NV/F7PV/F7BV D-J79C D-F59/F5P/J59/J51 D-G39C/K39C D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-F9G/F9H D-F8N/F8P/F8B D-Y59A/Y59B/Y7P* D-Y69A/Y69B/Y7PV* D-Y7G/Y7H D-M5N/M5P/M5B D-S991/S992/S99V1/S99V2 D-S9P1/S9P2/S9PV1/S9PV2 D-T991/T992/T99V1/T99V2 D-S791/S792 D-T791/T792 D-S7P1/S7P2 D-T791C/T792C 8-30-22 Grommet 8-30-23

MLGP

6 Slide bearing Ball bushing Spacer Pivot Chromated Heat treated/Electroless nickel plated Chromium molybdenum steel Nickel plated Chromium molybdenum steel 9-11-23 23 Series MLGP Construction: 40 to 100 Series MLGPM Series MLGPL !2!1#4 u @1 $0w #6 #1 #2y $0 #7 @2 q !0!4 r@4 #8 $1 e @1 @3t #3 !5 @8 B' @9 @0 A' A A' A B !6 !

Auto Switch Guide

Connector D-H7A1/H7A2/H7B D-G59/G5P/K59 D-H7C D-G39/K39 D-G39A/K39A D-F79/F7P/J79 D-F7NV/F7PV/F7BV D-J79C D-F59/F5P/J59/J51 D-G39C/K39C D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-F9G/F9H D-F8N/F8P/F8B D-Y59A/Y59B/Y7P* D-Y69A/Y69B/Y7PV* D-Y7G/Y7H D-M5N/M5P/M5B D-S991/S992/S99V1/S99V2 D-S9P1/S9P2/S9PV1/S9PV2 D-T991/T992/T99V1/T99V2 D-S791/S792 D-T791/T792 D-S7P1/S7P2 D-T791C/T792C 8-30-22 Grommet 8-30-23