HRX-OM-R028

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig 3.3-2 RS-232C connector connection 3.3 Connected explanation HRSH Series 3-2 HRX-OM-R028 Chapter 4 MODBUS communication function Chapter 4 MODBUS communication function MODBUS protocol is a communication protocol developed by Modicon.

DOC1003077

K Operation start D status setting Sets operation start status. Select with [] or [] keys pump/fan operation disabled) 2: Start up in the RUN mode after the power is turned on.

HEC-OM-Y008

Corporation All Rights Reserved D Air filter (air inlet) J Circulating fluid OUT (Rc1/4) E Filter cover K Circulating fluid IN/Drain (Rc1/4) F Screws for filter maintenance L PE connector(M4) M Power supply cable (Accessory, with Ferrite core)

Fieldbus system PROFIBUS DP compatible SI unit

End plate: Connected at EX600 Manifolds D side, incorporating the power supply connection. Solenoid valve manifold: An assembly of solenoid valves.

lPSMt

Supp Output Flow Rate 8.8 SCFM (250 Nl/min)at 70 psi (5 kgf/cm'?)

lPSMt

Supp Output Flow Rate 8.8 SCFM (250 Nl/min)at 70 psi (5 kgf/cm'?)

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

D ZS-24-A ZS-24-D ZS-35-A ZS-35-C ZS-35-B ZS-35-F ZS-35-E Rear ported Rear ported Bottom ported Rear ported Bottom ported Rear ported Bottom ported Bracket ZS-35-F Panel mount Bottom ported Rear ported Panel mount + Front protection cover Note) Rear ported only 732 Series ZSE80/ISE80 2-Color Display Digital Pressure Switch For General Fluids Specifications ZSE80 (Vacuum pressure) ZSE80F (

C76

5 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Series C76 32, 40 How to Order CJ1 C Double acting Single rod K R2 76 J D E C A 32 100 CJP CJ2 C Double acting Double rod W 76 D E 32 100 C JJ B CM2 Auto switch mounting type CG1 Rail mounting Band mounting A B Built-in magnet MB None Built-in magnet Nil D Applicable auto switches and bands are shown on pages 6-10-45

HRX-OM-M091

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

HRX-OM-Q033

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

HRX-OM-S010

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

HRX-OM-S004

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

HRX-OM-X071

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

XL-OMV0002

C E E (KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100

HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

XLG Series

66 2 11 55 41 63 36 10 XL*-OMI0010-E 4-2Size 50,63,80,100,160 C E D C E E (KF Flange) (K Flange) Fn Fd J K H B A G A Unit: mm Model A B C D E Fn Fd G H J K XLG-50-1 70 183 80 31 10.5 75 52 77 29 10.5 XLG-63-1 88 209 100 39 11 87 95 70 76.5 36 9 XLG-80-1 90 250 117 45.5 11 114 110 83 105 44 9 XLG-100-1 108 270.5 154 55 11 134 130 102 92 58 9 XLG-160-1 138 339 200 65 11 190 180 153 124 62

Clean Exhaust Filter

Hold the end of the tubing and insert it all the way in. 840 Clean Exhaust Filter SFE Series Dimensions SFE11 Gasket M5 9 4 25 SFE42/52/53/73 Dimensions (mm) C A Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 D B SFE3A 4 13.5 59 SFE4B/5C/7D AN A C Dimensions (mm) AMC Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 B AMV AMP SFE

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQS ø 12, ø 16, ø 20, ø 25

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQS 12, 16, 20, 25 How to Order B D 30 20 CQS M9BW B D 20 30 CDQS With auto switch Made to Order Refer to page 552 for details.

Miniature Guide Rod Cylinder Series MGJ

D-X Individual -X 261

3

Output specifications Symbol OUT1 OUT2 A NPN NPN B PNP PNP C NPN Analog (1 to 5 V) D NPN Analog (4 to 20 mA) E Note 2) PNP Analog (1 to 5 V) F Note 2) PNP Analog (4 to 20 mA) G Note 2) NPN External input Note 3) Unit specifications Nil Unit selection function Note 5) M SI unit only Note 6) Note 5) Since the unit for Japan is fixed to SI due to new measurement law, this option is for overseas