Process Pump Series PA3000/5000/PAX1000 Series PB1000

conditions Inlet air pressure MPa (psi) 0.3 to 0.85 (43 to 123) 0.3 to 1.0 (43 to 145) Inlet air temperature C (F) Note 1) 5 to 55 (23 to 131) Ambient temperature C (F) 5 to 50 (23 to 122) 5 to 55 (23 to 131) 5 to 50 (23 to 122) Outlet air atmospheric pressure dew point C (F) Standard performance 20 (-4) Inlet air flow rate l/min (ANR) (SCFM) Note 2) 625 (22.0) 62 (2.19) 125 (4.41) 250 (8.82) 375

5 Port Solenoid Valve

200 212.5 225 225 237.5 250 250 262.5 275 148 160.5 160.5 173 185.5 185.5 198 210.5 210.5 223 235.5 235.5 248 260.5 260.5 273 285.5 L n 21 22 23 24 25 26 27 28 29 30 31 32 19 20 L1 L2 L3 L4 216.5 225 233.5 242 250.5 259 267.5 276 284.5 293 301.5 310 199.5 208 272.2 280.7 289.2 297.7 306.2 314.7 323.2 331.7 340.2 348.7 357.2 365.7 255.2 263.7 300 312.5 312.5 325 337.5 337.5 350 362.5 362.5 375

0.4

16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 85 101 117 133 149 165 181 197 213 229 245 261 277 293 309 325 341 357 373 389 405 421 437 105 121 137 153 169 185 201 217 233 249 265 281 297 313 329 345 361 377 393 409 425 441 457 137.5 150 162.5 187.5 200 212.5 225 250 262.5 275 300 312.5 325 337.5 350 375

Slide Unit Series CX2/CXWM/CXWL

ZZ (mm) With adjusting bolt ZZ 153 203 253 303 353 403 453 503 With shock absorber ZZ 203 253 303 353 403 453 503 553 Z Model F L P Q S SS CX225-25 CX225-50 CX225-75 CX225-100 CX225-125 CX225-150 CX225-175 CX225-200 28.5 31 33.5 33.5 46 58.5 71 83.5 43 66 91 116 141 166 191 216 25 45 65 90 90 90 90 90 125 175 225 275 325 375 425 475 27 52 77 102 127 152 177 202 82 107 132 157 182 207 232

Slide Unit Series CX2/CXWM/CXWL

ZZ (mm) With adjusting bolt ZZ 153 203 253 303 353 403 453 503 With shock absorber ZZ 203 253 303 353 403 453 503 553 Z Model F L P Q S SS CX225-25 CX225-50 CX225-75 CX225-100 CX225-125 CX225-150 CX225-175 CX225-200 28.5 31 33.5 33.5 46 58.5 71 83.5 43 66 91 116 141 166 191 216 25 45 65 90 90 90 90 90 125 175 225 275 325 375 425 475 27 52 77 102 127 152 177 202 82 107 132 157 182 207 232

Electromagnetic Digital Flow Switch

Symbol 1 Piping connection parts: Stainless steel 304 -X8 Specifications Model LFE1-X8 LFE2-X8 LFE3-X8 Fluid contact materials PPS, FKM, Stainless steel 304 Weight (Body)*1 Integrated display type Approx. 380 g Approx. 430 g Approx. 620 g Approx. 800 g Remote type sensor unit Approx. 375 g Approx. 425 g Approx. 615 g Approx. 795 g *1 When options are used, add the weight of the optional parts

0.5

Emitter: Tungsten Impact resistance 100 m/s2 Applicable standard/directive CE (EMC directive: 2014/30/EU) *1: Based on ANSI/ESD-STM3.1-2006 standards Weights AC Adapter Specifications Input voltage 100 to 240 VAC, 50/60 Hz Output voltage 24 VDC Output current 1.9 A max Ambient temperature 0 to 40C, Stored: 20 to 65C Ambient humidity Operating, Stored: 5 to 95%RH (No condensation) Weight 375

Series AK1000

Construction Wetted Parts Material AK3652 Wetted Parts S Body 316 SS Diaphragm Ni-Co Alloy Seat PCTFE (Option: Polyimide) Diaphragm Seat Body 3 Diaphragm Valves for General Applications Manually Operated Type Series AK3652 & 4652 Specications Operating Parameters AK3652 AK4652 Gas Select compatible materials of construction for the gas Operating pressure Vacuum to 250 psig (1.7 MPa) Proof pressure 375

Table of Contents

D-P5DWL Rail Mounting Style. 327 327 327 328 328 329 329 330 331 333 334 334 335 336 338 339 339 340 341 343 344 348 349 351 354 354 354 355 356 357 357 358 359 360 361 362 362 363 364 364 365 366 367 368 369 370 371 372 372 373 374 375 376 376 377 377 378 379 380 380 381 381 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

> 130 (Double) <132> (Lead wire length) 101.5 (Single) <102.5> 1 P R1 R2 5 3 65 <66> 63.5 <68.5> 300 77 Cover diameter 1.5 Cross section 0.23mm2 Indicator light 1 P < >: AC R1 R2 5 3 Equation L1=19n+11 L2=19n+23 n: Station (Max. 20 stations) Dimensions L n 2 49 61 87.5 98 19 372 384 412.5 423 20 391 403 425 435.5 14 277 289 312.5 323 15 296 308 337.5 348 16 315 327 350 360.5 17 334 346 375

Process Pump

No power supply required Range of operating conditions Inlet air pressure (MPa) 0.3 to 0.85 0.3 to 1.0 5 to 50 5 to 55 Inlet air temperature (C) Note 1) 5 to 55 Ambient temperature (C) Outlet air atmospheric pressure dew point (C) 5 to 50 Standard performance 20 Inlet air flow rate (L/min (ANR)) Note 2) 625 62 125 250 375 Standard performance conditions Outlet air flow rate (L/min (ANR))

VQ20/30

rail mounting (-D) 1 2 3 4 5 6 7 8 9 10 Dimensions n: Station (Max. 20) L n 11 12 13 14 15 16 17 18 19 20 L1 L2 L3 L4 L5 759 749 775 785.5 747.8 722 712 737.5 748 710.8 685 675 700 710.5 673.8 648 638 662.5 673 636.8 611 601 625 635.5 599.8 574 564 587.5 598 562.8 537 527 562.5 573 525.8 500 490 525 535.5 488.8 463 453 487.5 498 451.8 426 416 450 460.5 414.8 389 379 412.5 423 377.8 352 342 375

AW

Note 7) : For thread type: NPT only AG AV AF800 AF900 375 Filter Regulator AW10 to AW60 Filter Regulator with Backflow Function AW20K to AW60K Made to Order Specifications: Please contact SMC for detailed dimensions, specifications, and lead times. e 0.4 MPa Setting r Long Bowl The maximum set pressure is 0.4 MPa.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 85 101 117 133 149 165 181 197 213 229 245 261 277 293 309 325 341 357 373 389 405 421 437 105 121 137 153 169 185 201 217 233 249 265 281 297 313 329 345 361 377 393 409 425 441 457 137.5 150 162.5 187.5 200 212.5 225 250 262.5 275 300 312.5 325 337.5 350 375

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 85 101 117 133 149 165 181 197 213 229 245 261 277 293 309 325 341 357 373 389 405 421 437 105 121 137 153 169 185 201 217 233 249 265 281 297 313 329 345 361 377 393 409 425 441 457 137.5 150 162.5 187.5 200 212.5 225 250 262.5 275 300 312.5 325 337.5 350 375

Base Mounted Metal Seal/Rubber Seal Series VQ

Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) L n 2 85 105 137.5 148 3 101 121 150 160.5 4 117 137 162.5 173 5 133 153 187.5 198 6 149 169 200 210.5 7 165 185 212.5 223 8 181 201 225 235.5 9 197 217 250 260.5 10 213 233 262.5 273 11 229 249 275 285.5 12 245 265 300 310.5 13 261 281 312.5 323 14 277 297 325 335.5 15 293 313 337.5 348 16 309 329 350 360.5 17 325 345 375

240

Model Allowable lateral load on the rod end [N] LEPY6 (Basic) 0.50 LEPY10 (Basic) 1.0 LEPY10L (Compact) 1.0 Based on the above calculation result, the LEPY10LK-50 is selected. 375 LEPY Series Step Motor (Servo/24 VDC) SpeedWork Load Graph (Guide) The following graph shows the values when moving force is 150%.

ZP3

Refer to page 375 for safety instructions. For vacuum equipment and vacuum pad precautions, refer to pages 376 to 379. Mounting How to Replace the Pad 1. Tighten the screw within the specified torque range when mounting the buffer. 1.

IDX-OM-X011

Connected A B C D E F G H I J IDF190D JIS10KFF 80A(3B) flange 750 1510 1320 375 480 600 700 800 355 427 IDF240D JIS10KFF 100A(4B) flange 770 1550 1640 385 703 730 700 800 355 467 Auto drain is included in the package.

Hydraulic

11 12 10 80 280 21 80 32 8 100 75 28 65 32 22 20 M12 x 1.75 26 19 29 M22 x 1.5 35 1/2 57 132 11 16 13 90 312 26 100 38 6.5 118 90 35.5 80 35 27 19 M12 x 1.75 27 21 34 M27 x 2 35 1/2 66 140 12 20 16 100 340 34 125 38 6.5 140 112 35.5 80 35 27 19 M14 x 2 27 24 34 M27 x 2 35 1/2 77 140 12 20 16 100 340 34 160 42 9 174 140 45 100 38 36 22 M16 x 2 28 27 38 M33 x 2 40 3/4 94 159 12 24 20 108 375