Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

JIS symbol Minimum Operating Pressure Unit: MPa Bore size (mm) Minimum operating pressure 20 25 32 40 50 63 80 100 0.02 0.01 Standard Stroke Table Replacement Parts: Seal Kits Bore size (mm) Bore size (mm) 20 25, 32, 40, 50, 63, 80, 100 Standard stroke (mm) Note 1) Contents Kit No. 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 20 25 32 40 50 63 80 100 CG1Y20-PS CG1Y25

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

A variety of electrical connection options Manifold Single valve SMC VQ110 -*L SMC VQ110 -*M JAPAN SMC VQ110 -*G JAPAN E E JAPAN P E P Plug-in unit manifold Plug lead unit manifold L type plug connector P 5 M type plug connector Grommet Series VQ100 Standard Specifications Standard Specifications Specifications Item specifications specifications 1watt 0.5 watt Type 3 port direct operated

HRX-OM-X010

[-100 to 100 deg C:-10 to 10V] [-100 to 100 deg C:-10 to 10V] 24 ANALOG COM 13 Output EMO signal EMO signal 13 25 Output EMO CIRCUIT 25 *1: The recovery signal can be input only when the circulating fluid automatic collection function (optional) is used, and it does not serve as the DIO REMOTE signal. *2 :Valid if Analog Communication (optional) is provided. *3 :Valid if DI Control Kit (optional

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

VQ20/30

Blue (100 VAC) 2 (, +) 2 Red (200 VAC) Indicator light Indicator light With indicator light With indicator light Red (+) DC Blue (100 VAC) Series VC (Class H coil) Red (100 VAC) Grommet, Conduit, Conduit terminal AC circuit For energy-saving circuit, there is the polarity. 1 DIN terminal Since internal connections are as shown below for the DIN terminal, make connections to the power supply

Digital Gap Checker

0.15 mm 0.3 mm 0.03 mm 0.30 0.03 0.15 0.20 0.02 0.10 0.01 mm 0.10 0.01 0.05 0.05 mm 0.02 mm 0 0 0 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 Piping length: 5 m Piping length: 5 m Piping length: 5 m Reference pressure 0.06 Reference pressure 0.30 Reference pressure 0.60 The distance of

ZSE30A(F)/ISE30A

ZSE20 ISE20 100 kPa 0 100 kPa 500 kPa 1 MPa Pressure range ZSE30 ISE30 ZSE30 ISE30 Switch ZSE40 ISE40 For vacuum pressure 101 kPa 0 ZSE30A 10 kPa 105 kPa ZSE10 ISE10 For compound pressure 100 kPa 100 kPa ISE70 ZSE30AF 105 kPa 105 kPa ZSE80 ISE80 For positive pressure 100 kPa 1 MPa ISE30A 105 kPa (0.105 MPa) 1.05 MPa PS Rated pressure range of switch Set pressure range of switch ISA3 ISA2

CQM

Lateral load Operating pressure: 0.5 MPa 100.0 Eccentric distance Stroke 50 100 10.0 Load weight (kg) 40 32 Plate allowable lateral load (N) 50 25 1.0 40 20 16 32 20, 25 10 12 12, 16 0.1 10 100 1000 Maximum speed (mm/s) 1 0 10 20 30 40 50 60 70 80 90 100 Stroke + Eccentric distance (mm) 7-5-4 5 Series CQM Compact Cylinder: Guide Rod Type Double Acting, Single Rod Construction 12 to 25 With

ISG

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 2 Series

Vacuum Module: Ejector System Series ZX

Vacuum switch unit Filter unit Release flow rate adjusting needle Manual operation Vacuum switch Electrical entry Ejector exhaust Electrical entry PV/V port size Pilot valve Components Vacuum switch unit Valve unit N.C. type Ejector unit ZX1 1 10 5 L Z E C K1 L Vacuum switch unit Ejector unit 1 10 L Z E C K3 5 ZX1 Valve unit N.O. type Vacuum switch unit ZX1 1 10 E C Ejector unit CE compliant

Series VS

Wiring & Light / Surge Voltage Suppressor How to calculate Flow (At an air temperature 20C) AC AND 100 VDC AC AND 100 VDC WITH LIGHT WITH LIGHT TERMINAL no.1 (+) TERMINAL no.1 (+) Subsonic flow: P1+0.1013<1.89(P2+0.1013) SINGLE SINGLE Q=226S P(P2+0.1013) Sonic flow: P1+0.1013>1.89(P2+0.1013) ZNR ZNR Q=113S(P1+0.1013) Q: Flow rate under standard conditions [l/min(ANR)] S: Effective area (mm2

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

(MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 700 800 900 Flow rate (l/min (ANR)) Inlet pressure (MPa) 7 Direct Operated Precision Regulator/Modular Style Series ARP20/30/40 Construction ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e C SM 2 OUT A A IN OUT t A-A BLEED w y Note Component

Clean Rodless Cylinder Series CYP

f g Nil Reed switch L R Solid state switch S h Nil L R S Operating direction Left Right a b h g d c f e Note) Lead wire length symbols 0.5m .

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solen100 vAc ,2 2OO VAC 5 24 VDC s 'r io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

IC

0 q CONTROLLER PRESSURE OUT w Position Detection Switch Flow Sensor Pressure Control Pressure Sensor e w r RUN 4 3 2 1 CH kPa 4 3 2 1 SW t e y D-IN RUN UP SET P-ON DOWN STOP READ r u i o t y u i o !

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

0 o e AS-FM !4 u Meter-in type Meter-out type AS-D e Seal method: Face seal For G thread AS-T Meter-in type Meter-out type ASP !1 ASN r !2 AQ q w ASV y t AK i VCHC o ASR ASQ !0 u !5 e Meter-out type Meter-in type Component Parts No.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

1 e !3 !4 o !0 !1 !2 e !3 !4 !5 !2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv VP517Y G3/8 8.8 0.14 2 8.2 0.15 1.8 VP717Y G1/2 13.8 0.11 2.9 12.9 0.18 2.9 2 VP500/700 Series Spacer Center of F.R.L. body D C B Model A B C D Y300-A 4.2 43.4 21.7 57.9 Y400-A 5.2 53 26.5 68.5 A (Spacer width) Seal Y400-A Spacer with Bracket D K Center of F.R.L. body J H F G E E C B Seal A (Spacer width) Y400T-A Model A B C D E F G H J K Y300T-A 4.2

Digital Flow Switches

PF2W504--1 PF2W520--1 PF2W540--1 PF2W511--1 PF2W504--2 PF2W520--2 PF2W540--2 PF2W511--2 4 0.5 4 0.5 16 2 16 2 40 5 40 5 100 10 100 10 19 Series PF2W For Water Digital Flow Switch to are terminal numbers.

Multi-channel Digital Sensor Monitor ( compatible)

(Additional range) Relation between the sensor input and pressure display Pressure range Set value A B Fine differential pressure 0.002 0 kPa 2 kPa Vacuum pressure -0.1 0 kPa -101 kPa Compound pressure F0.1 -100 kPa 100 kPa Low pressure 0.1 0 kPa 100 kPa 0.5 0 kPa 500 kPa Positive pressure 1.0 0 MPa 1 MPa 1.6 0 MPa 1.6 MPa 2.0 0 MPa 2 MPa 5.0 0 MPa 5 MPa High pressure 10.0 0 MPa 10 MPa 20.0