SMC Corporation of America
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regulator ITV2050-212S-X26 SMC REGULATOR SMC REGULATOR VBA UNLOCK LOCK RESET SET VE VY G 1 2 3 Stations AL Manifold base (3 stations) IITV20-02-3 (1) 1set (3 station manifold base part no.) 1set (Electro-pneumatic regulator part no.) (2) IITV20-02-3 ITV2030-312S-X26 P398020-13 ITV2050-212S-X26 1set (Blanking plate assembly part no.) 1set (Electro-pneumatic regulator part no.) (2) The

11 B 6.5 9 12 15 A 9.5 13.5 11.5 14 B 6 8.5 11.5 14.5 A 9 13 11 13.5 32 40 50 63 2.7-6

South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R P 27 30 (2) 7 12.7 VR A 9.2 VH 2 15 (Bracket) 10 VHS 11 Base mounted: SYJA34-M5 14 5 10 Manual override (Non-locking) 2-3.2 (External pilot port) (For mounting) 17 3 (For solenoid valve) 2.5 M3 x 0.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Breathing hole) 13

A) 2 1 (A P) (1) Port size Weight (kg) Series Model C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] b Cv b Cv b Cv b Cv VPA342 (Body ported) 3.3 4.0 0.83 0.92 0.83/0.83 0.86/0.88 1.7 2.2 1.9/1.8 2.1/2.0 3.1 3.7 3.2/3.2 3.6/3.7 0.93 1.1 0.89/0.89 1.0/0.95 2.0 2.5 1.9/1.8 2.2/2.2 3.4 4.0 3.3/3.5 3.8/3.6 0.31 0.26 0.86 0.99 3.5 4.4 3.5/3.5 4.1/3.9 7.5 9.3 7.4/7.3 9.2/9.1 13

Single Double Closed center 2 position 1.0 4.1 0.41 1.1 4.1 0.29 SYA740-02 1 8 1 4 1.1 [0.49] 0.72 0.42 0.43 0.71 0.80 4.7 [1.7] 2.6 0.35 [0.48] 0.41 3.0 3 position 2.6 5.3 [2.3] Exhaust center Pressure center 294 (165) 0.63 0.39 [0.49] 1.3 [0.65] 2.2 0.49 240 (111) 286 (157) Single Double Closed center 2 position 0.29 1.1 4.9 1.2 4.5 0.27 SYA740-03 1 8 3 8 2.8 [0.95] 0.73 0.34 0.40 1.7 0.80 13

Series SV2000 for EX120 Dedicated Output Serial Wiring. 6 7 8 10 10 10 10 10 10 10 11 11 11 11 11 11 12 12 13 13 13 15 16 16 17 19 20 21 21 23 23 24 24 24 24 24 25 26 27 27 30 30 31 32 33 34 35 36 37 37 39 40 40 41 42 44 45 45 50 50 51 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

For Deionized Water and Chemicals Digital Flow Switch Series PF2D How to Order Remote Type Sensor Unit C PF2D5 13 20 1 Option (Refer to page 55.) Flow rate range None e-con connector x 1 pc. Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

M L1 L2 1 4 8 6 DEF06-02 48 20 11 16 16 50.5 46.5 17 15 13 11 19 17 14 12 14 12 6max. 4max. 3 8 DEF08-03 66 3 8 3 8 DEF10-03 10 12 53.5 89 DEF12-03 54.5 34 51 17 17 17 17 15 17 19 19 104 17 19 17 19 7max. 7max. 105 Series H, DL, L, LL Self-align Fittings Plug: DP Applicable tube O.D. Weight (g) Part No.

Foot PP Variations Model Body Diaphragm Option Discharge Assembly flow rate (l/min) material material environment PA3310 PAP3310 PA3313 PAP3313 Standard Foot Silencer Automotive operation 1 to 13* Clean room New PFA PTFE Standard Air pilot actuation 0.1 to 9 Foot Clean room * With 3/8" inlet/outlet tube: 1 to 12 1 A for main wetted parts, stance is achieved!

1 q t i Series PF2D For Deionized Water and Chemicals Digital Flow Switch Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuits and wiring examples 60 70 176 z to , are terminal numbers.

Note) At rated voltage A X A X P R P R 13 Series SYJ500 3 Port Solenoid Valve Valve Specifications External Pilot Type SYJ500R Pilot valve pressure is supplied separately from the main valve pressure through the use of a separate supply port. This model is suitable for low pressure and vacuum applications.

For details, refer to LECYM Operation Manual,section 3.3.2. 13 - 2.3.2 Sequence Input Circuit (1) Photocoupler Input Circuit CN1 connector terminals 6 to 13 are explained below. The sequence input circuit interface is connected through a relay or open-collector transistor circuit. When connecting through a relay, use a low-current relay.

For details, refer to LECYU Operation Manual,section 3.3.2. 13 - 2.3.2 Sequence Input Circuit (1) Photocoupler Input Circuit CN1 connector terminals 6 to 13 are explained below. The sequence input circuit interface is connected through a relay or open-collector transistor circuit. When connecting through a relay, use a low-current relay.

)(43) [UnL] 5 [000] / 1 / ( ) 1 (/30 ) -42NO.ZK2-OM00801-B B /ON/OFF H_3 P_1 H_3 100 H_3 P.25F 2OUT2 P_1-60kPaH_3 45 P_1H_3-60-45-105 P_1H_3 -105 H_3 P_1 H_3 ,P_1 H_3 100 -43NO.ZK2-OM00801-B , (1015 ) -44NO.ZK2-OM00801-B ZK2-ZSV-A () No.1 ON ON OFF Yes No.2 No OFF ON No.1 OFF No.3 No.4 No.5 No.6 -45NO.ZK2-OM00801-B No.7 Yes No No.8 No.8 No.9 No.10 No.11 No.12 No.13

The buttons cannot be operated. 13 Product failure Replace the product. Rework the piping. If the tightening torque is exceeded, the mounting screws, brackets and the pressure switch may be damaged. Air or liquid leakage Check if air or liquid are leaking from the piping. 14 The product is noisy. Product failure Replace the product. -52NO.TQ1050188-OM002 Error No.

The buttons cannot be operated. 13 Product failure Replace the product. Rework the piping. If the tightening torque is exceeded, the mounting screws, brackets and the pressure switch may be damaged. Air or liquid leakage Check if air or liquid are leaking from the piping. 14 The product is noisy. Product failure Replace the product. -51NO.ZL3-OM00701-A Error No.

The buttons cannot be operated. 13 Product failure Replace the product. Rework the piping. If the tightening torque is exceeded, the mounting screws, brackets and the pressure switch may be damaged. Air or liquid leakage Check if air or liquid are leaking from the piping. 14 The product is noisy. Product failure Replace the product.

Product Specifications .13 4-1. Magnet gripper .13 4-2. 3-port solenoid valve .14 4-3. Auto switch .15 5.Operating method or operation .16 5-1Precautions for Design .16 5-2. Installation .17 5-3. CRX Plug-in software .20 5-4. Air supply .27 5-5. Piping .27 5-6. Operating environment .28 5-7. Lubrication .28 6. Maintenance or inspection .28 6-1. Maintenance or inspection .28 6-2.

Center of gravity .12 4.Product Specifications .13 4-1.Magnet Gripper .13 4-2. 3-port solenoid valve .14 4-3. Auto switch .15 5.Operating method or operation .16 5-1Precautions for Design .16 5-2. Installation .17 5-3. Air supply .22 5-4. Piping .22 5-5. Operating environment .23 5-6. Lubrication .23 6. Maintenance or inspection .23 6-1. Maintenance or inspection .23 6-2.

Center of gravity .12 4.Product Specifications .13 4-1. Magnet gripper .13 4-2. 3-port solenoid valve .14 4-3. Auto switch .15 5.Operating method or operation .16 5-1Precautions for Design .16 5-2. Installation .17 5-3.TMComponent .20 5-4. Air supply .24 5-5. Piping .24 5-6. Operating environment .25 5-7. Lubrication .25 6. Maintenance or inspection .25 6-1.