Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The total length of B direction is the length when the filter regulator knob is unlocked.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

specifications Model P1 P2 A B Note 1) C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K)

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The total length of B direction is the length when the filter regulator knob is unlocked.

Vacuum Pad: Ball Joint Type

Dimensions H B Ball joint type: 10 to 32 (mm) D Model B d H Y ZPNA-M10 M10 x 1 3 14 E ZPNA-M14 M14 x 1 5 19 ZPNA-M8 M8 x 1 3 12 C A B Ball joint type: 40, 50 ZP3 D ZP3E ZP2 E Y ZP2V C A ZP B ZPT ZPR ZPT ZPR (mm) Model B A C D E Y XT661 ZP10F 10 12 6.5 1.5 ZP13F 13 15 3 8.2 7 2 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 25 28 4 10.2 3 ZP32F 32 35 9 ZP40F 40 43 10 13 5 26 ZP50F 50 53 8 14 6 725 ZPT/

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

1 IO-Link master Number of ports and connector Symbol Number of ports Connector Port specifications B 4 ports M12 connector Symbol Content A Port Class A B Port Class B Summary of Product parts EX600-L#B1 No.

Pneumatic Transfer System Series MF

G A 90 B 90 B G A D Note 1) 90 G A H X X X D Note 1) D Note 1) B B B F E F F E A H A G G RG RT RS B 296 305 C R310 R445 D 93 129 E 60 87 F 10 15 G 6 7 B 296 309 C R390 R495 D 93 129 E 60 87 F 10 15 G 6 7 B 299 307 C R350 R440 D 93 129 F 10 15 G 6 7 H 610 700 A 600 743 A 680 797 A 643 740 15 32 15 32 15 32 Y Note 2) Y Note 2) Y Note 2) X 558 to 573 685 to 708 X 518 to 533 558 to 581 X 541

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

VS7-6

A B A B A B A B AXT511 -3 (V) AXT511 -4 (V) 24V DC 12V DC AXT511 -1 (V) AXT511 -2 (V) 100V AC 50/60 Hz 200V AC 50/60 Hz 0.049/0.043 0.024/0.021 0.031/0.020 0.015/0.01 VQ Rated voltage (V) Inrush current (A) Holding current (A) Allowable voltage (V) 0.075 0.15 VQ4 85 to 110% of rated voltage Insulation Class B (130 oC) or equivalent VQ5 A: With 2-M4 X 46 bolts for 2 position valve, B: With

LEF-OM002xx

300 400 500 600 V(mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 Vertical Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg) H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500

Fieldbus system EtherNet/IP compatible SI Unit

(Unit 1) Byte 3 Diagnostic data byte3 Byte 3 Output 16 to 23 Byte 4 Byte 4 Output 24 to 31 Byte 5 Byte 5 Padding data Total 4 bytes Total 6 bytes -82No.EX-OMZ0024 Unit 0 Unit 1 Unit 2 Unit 3 Unit 4 Unit 5 AXA DY#B DY#B DX#B DX#D SEN7 Analogue input Digital output Digital output Digita input Digital input SI unit End plate Valve 4 byte 1 byte 2 byte Input Input Input 1 byte 1

Fieldbus system EtherCAT compatible SI Unit

DX#B DY#B DM#E AXA AYA LBB1 SEC3 System Valve 32 Diag. Unit 0 Unit 1 Unit 2 Unit 3 Unit 4 Unit 5 Unit 6 Diag.

CEx-OMB0060

Input waveform requirements [A/B quadrature input] Two count channel input (A and B) in quadrature (90nominal phase relationship).

Rotary Table Series MSU

Adjustment: Max. 8.2 6 B port A port 0.5 +0.025 0 3-3H9 long groove depth 2.5 ( A , B , C ) 5g6 0.004 0.012 12h9 0 0.043 4-M4 x 0.7 depth 8 34 0 0.062 42h9 Top ports/MSUA3-SE 36 10 A port B port 2-M3 x 0.5 11 5 Rotary Table High Precision Type Series MSUA These drawings indicate the condition when the B port is pressurized.

Escapements Series MIW/MIS

C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-M9W D-M9V D-M9WV D-M9 D-M9W D-M9V D-M9WV D-M9 D-M9W D-M9V D-M9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 16.5 25 4.5 18.5 49 6.5 7.5 38 21 MIW8-8D MIS12

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

DICOM 1 Failure Note 3) 9 ALM RA1 N OPC 2 12 MBR RA2 Electromagnetic brake interlock 13 DOCOM S/S Y000 PP 23 COM1 Y010 NP 25 10 m or less COM3 15 LA A phase pulse detector (Differential line driver) Y004 CR 5 16 LAR COM2 17 LB B phase pulse detector (Differential line driver) 18 LBR X INP 10 19 LZ Z phase pulse detector (Differential line driver) 20 LZR X Control common RD 11 14 LG X OP 21

RLQ

Hs A B A B Proper Auto Switch Mounting Position (mm) D-A7H, A80H, A73C, A80C D-F7, F7V, F79F, J79 D-J79C, F7W, F7WV D-J79W, F7BAL, F7BAVL D-A7 D-A80 D-F7NTL D-A79W Bore size (mm) B B A A B A B A 32 3 11 51 43 6 46 5.5 45.5 40 5.5 13.5 49.5 57.5 8.5 52.5 8 52 50 19 11 53.5 61.5 14 56.5 13.5 56 63 22 14 59 67 17 62 16.5 61.5 Auto Switch Mounting Height (mm) D-A7H, A80H D-F7, J79, F7W D-J79W

CRBB-OM00004

block (B) 1 Cross recessed round head screw 1 M38L 2 Holding block (A) 1 2 Holding block (A) 1 2 1 Switch block (A) 1 1 Switch block (B) 1 1 Holding block (A) 1 No.

Series MLGP

locking) Section B-B Section B-B Section A-A *Above figure show the unlocked state.

Series VS

Series VS R8b S RUBBER SEAL/METAL SEAL SERIES VSR8/VSS8 2-position Single solenoid (FG-S) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Double solenoid (FG-D) (Metal) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Double solenoid (FG-D) (Rubber) (A)(B) 4 2 5 1 3 (EA)(P)(EB) 3-position Closed center (FHG-D) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Exhaust center (FJG-D) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Pressure center (FIG-D) (A)(B) 4 2 5