Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type Nil S n 2 pcs. 1 pc. n pcs.

7

U E OUT T OUT IN M 2 x P Port size J K L F I (D) (mm) Electrical entry M Model Flat terminal Conduit terminal Conduit C37, Stainless steel body Port size P A B C E F I J K L D Aluminum body T T 1/4, 3/8 1/2 88 (93.5) 22.5 30 U 49.5 (55) V U T 55.5 (61) U 22 27 24 30 50 20 4.5 5 11 13 37.5 42.5 25 25 49.5 (55) VXD2 3 A 99.5 68.5 47.5 23 ( ): Denotes the Normally Open (N.O.) dimensions.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

-01-B 8 ZPX80HB-01-B10 M8 x 1.25 M10 x 1.5 50 52 36 54 24 50.5 72.5 16.5 80 83 58 85 37 63.5 85.5 27.5 35.5 48.5 -B10 -B12 M10 x 1.5 M12 x 1.75 ZPX HB-B01-B (Female thread) 100 125 1/8 (Rc, NPT, NPTF) I Hexagon width across flats 21 11 70 Width across flats 60 4 x M5 x 0.8 11 H G F E Y 4 40 C A B D Dimensions (mm) A B C D E G H I Y F Model ZPX100HB-01-B10 M10 x 1.5 100 103 69 107 47.5 75.5

EXxx-OMO0027

Reload I/O Devices : The display above shows an example of the software configuration structure of the EX600 series. : Allocate the diagnostic data to Module 11 when its setting is other than the diagnostic mode 0.

EX600-DX_DY_DM_eng

4 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 2 1 3 5 4 7 6 9 8 11 10 13 12 2 1 3 5 4 7 6 9 8 11 10 13 12 7 6 5 7 6 5 Group Group Pin number Pin number Pin number 3 3 1 0 1 0 2 2 13 11 13 11 12 12 10 10 8 6 8 6 5 3 1 9 7 9 7 4 2 5 3 1 5 3 1 4 2 4 2 Pin number Pin number 4 3 2 1 4 3 2 1 4 3 2 1 4 3 2 1 4 3 2 1 4 3 2 1 4 3 2 4 3 2 1 EX600-DMPE EX600-DMPF EX600-DYPE EX600-DYPF 0 V (output) 24 V (output

Digital Flow Switch ( compatible)

If the minimum setting unit is 1 L/min, the flow can be displayed in 1 L/min units, i.e. 10, 11, 12. Minimum setting unit N Normal condition (NOR) Reference condition for volumetric flow: 101.3 kPa, 0 C The flow measurement which is converted at normal atmospheric pressure conditions at 0 C.

Digital Flow Switch ( compatible)

If the minimum setting unit is 1 L/min, the flow can be displayed in 1 L/min units, i.e. 10, 11, 12. Minimum setting unit N Normal condition (NOR) Reference condition for volumetric flow: 101.3 kPa, 0 C The flow measurement which is converted at normal atmospheric pressure conditions at 0 C.

XLA Series

55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 10 XL*-OMI0009-E 5.

XLA- ∗ -F7NJ ∗ - ∗ Series

55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 9 XL*-OML0013-B 5.

XG_-OMV0028

9 27 15 12 14 B 11 27 13 12 9 2A 2 2B 2 12 18 2 7 - 3-4 2B2C A 16 17 12 18 2 8 9 13 B 11 9 10 17 A 16 12 18 2 2 O 3 19 12 27 12 14 27 15 12 12 3-5 2C2B OPENCLOSE 9 B 11 10 A 16 18 2 2 12B 11 9 27 13 12 14 27 15 9 B 11 12 13 2 19 3-6 2B 2A 2 18 12 9 2 21 23 3-7 20 22 24 8 8 - 4. 4-1.

Rotary Table

Description Qty. 4 Seal 1 4 Seal 1 4 Seal 1 4 Seal 1 Parts included 11 Gasket 1 11 Gasket 1 11 Gasket 1 11 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 in seal kit 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 Please refer to P19 to 21 for the product construction.

MRQB-OM0002

No.MRQB-OM02 / / / / / / / / MRQ MRQ MRQ MRQ 1 1. 1. 1. 1. 11 1-1. 11 1-2. 11 1-3. 11 2. 2. 2. 2. 12 3. 3. 3. 3. 14 3-1. 14 3-2. 14 4. 4. 4. 4. 15 4-1. 15 4-2. 16 4-3. 17 4-4. 17 4-5. 18 4-6. 18 5. 5. 5. 5. 19 5-1. 19 5-2. 21 5-3. 22 6. 6. 6. 6. 24 6-1. 24 6-2. 24 6-3. 25 7. 7. 7. 7. 26 8. 8. 8. 8. 27 9. 9. 9. 9. 28 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power

LEC-T1_C

TB 1 TB ID 1 1 CN4 2 CRC 3 func 4 ID 5 6 7 8 ID 119 - 9 FLASH 10 FLASH 11 1 CN4 11 2 3 4 120 - Ver1.** Ver2.** TB Ver.511 1TB Ver1.** TB Ver.511 11 TBsetting Language 12 TBsetting Language12 11 SET MENU TEST MONITOR DATA ALARM JOG SETTING SET AX IS. Setting 1 MENU Recconect Start Disp Easy Item Speed 1 Disp AX IS.

SI unit ( device)

No.EX-OMW0016-A PRODUCT NAME SI unit ( device) MODEL / Series / Product Number EX260-SIL1 Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product elements 9 Summary of product function 10 Installation and Wiring 11 Installation 11 Wiring 12 LED Indication, Settings and State Monitoring 13 LED indication 13 Switch setting (Process data size / Data transmission

Soft Start-up Valve

Solenoid valve side pin wiring diagram -11- Grommet With light (GZ) DIN Terminal With light (DZ, YZ) * Surge voltage suppressor of varistor has residual voltage corresponding to the protective element and rated voltage; therefore, protect the controller side from the surge. The residual voltage of the diode is approximately 1 V.

CEx-OMP0016

Adjusting Method 35 Chapter 11: Stopping Operation 11-1. Over run 36 11-2. Dispersion of Stopping Position 36 Chapter 12: Manual Operating Procedure 37 Chapter 13: Installation / Wiring 13-1. Installation of Cylinder 3839 13-2. Electrical Wiring 40 13-3.

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Motor shaft should be round shape. *10 Please avoid loosen the screws for mounting of motor. *11 Do not allow collisions at either end of the table traveling distance. Additionally, when running the positioning operation, do not set within 7 mm of both ends.

EXxx-OMU0020EN

Regarding mounting, refer to the Section 3.1.2. -56No.EX##-OMU0020-A 11. Dimensions 11.1. I/O Modules Manifold Fig. 11-1 Dimensions of the Modules manifold The following table shows the length of the I/O Modules manifold.

CJP2-OM0002K

Part number of auto switchD-A9D-A9V Unitmm B A (When detecting retracted stroke end) H H 1 H 2 3 (When detecting extended stroke end) 5st 10st 15st 20st 25st 30st 35st 40st 4 6 1 6 11 16 21 26 13.0 10.0 20.0 10 1 6 11 16 21 26 31 36 41 16.0 9.5 19.0 16 1 6 11 16 21 26 31 36 41 18.0 12.0 24.0 Part number of auto switchD-M9D-M9VD-M9WD-M9WV Unitmm B A (When detecting retracted stroke end) H

SY3000/5000/7000/9000 Series (Pilot Valve:V100)

DIN rail VZ1000-11-1SY3000*-OMJ0003-A -24- Specific Product Precautions 18 Be sure to read before handing.