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Displays the diagnosis status of the unit. 10 to 57 Hz: constant amplitude 0.75 mm p-p 57 to 150 Hz: constant acceleration 49 m/s2 Minor communication error. Fatal communication error. The element in SI unit is broken. Connection is not established. Communication is normal. Double checking the node address. Communication error. The power supply for control and input is Off.

https://smccatalog.partbuilder.smcpneumatics.com/dl_catalogs/assets/manual/en-jp/files/EX600-SDNA_eng.pdf

SYA3000/5000/7000

Port size Applicable series C4 C6 C4 C6 C8 C8 C10 Nil Without bracket 5 16" One-touch fitting for One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 4 SYA7000 F1 With foot bracket (2 position single only) SYA3000 3 8" One-touch fitting for F2 With side bracket Series SYA5000 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10

https://www.smcpneumatics.com/pdfs/sya_5 pt.pdf

5 Port Air Operated Valve SYA3000/5000/7000 Series

Symbol Port size Applicable series C4 C6 C4 C6 C8 C8 C10 Nil Without bracket 5 16" One-touch fitting for One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 4 SYA7000 F1 With foot bracket (2 position single only) SYA3000 3 8" One-touch fitting for F2 With side bracket Series One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10

https://www.smcpneumatics.com/pdfs/sya_5pt.pdf

SMC PF2A750-01-27 digital flow sw, integ sensor, IF/PFA FLOW SWITCH

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

https://www.smcpneumatics.com/PF2A750-01-27.html

SMC PF2A750-01-27-M digital flow sw, integ sensor, IF/PFA FLOW SWITCH

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

https://www.smcpneumatics.com/PF2A750-01-27-M.html

SMC PF2A750-01-67-M digital flow sw, integ sensor, IF/PFA FLOW SWITCH

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

https://www.smcpneumatics.com/PF2A750-01-67-M.html

SMC PF2A750-02-27 digital flow sw, integ sensor, IF/PFA FLOW SWITCH

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

https://www.smcpneumatics.com/PF2A750-02-27.html

SMC PF2A750-02-27-M digital flow sw, integ sensor, IF/PFA FLOW SWITCH

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

https://www.smcpneumatics.com/PF2A750-02-27-M.html

SMC PF2A750-02-67 digital flow sw, integ sensor, IF/PFA FLOW SWITCH

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

https://www.smcpneumatics.com/PF2A750-02-67.html

SMC PF2A750-02-67-M digital flow sw, integ sensor, IF/PFA FLOW SWITCH

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

https://www.smcpneumatics.com/PF2A750-02-67-M.html

SMC PF2A750-02-67N digital flow sw, integ sensor, IF/PFA FLOW SWITCH

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

https://www.smcpneumatics.com/PF2A750-02-67N.html

SMC PF2A750-F02-67-M digital flow sw, integ sensor, IF/PFA FLOW SWITCH

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

https://www.smcpneumatics.com/PF2A750-F02-67-M.html

SMC PF2A750-F02-67N digital flow sw, integ sensor, IF/PFA FLOW SWITCH

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

https://www.smcpneumatics.com/PF2A750-F02-67N.html

SMC PF2A750-N01-27 digital flow sw, integ sensor, IF/PFA FLOW SWITCH

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

https://www.smcpneumatics.com/PF2A750-N01-27.html

SMC PF2A750-N01-27N-M digital flow sw, integ sensor, IF/PFA FLOW SWITCH

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

https://www.smcpneumatics.com/PF2A750-N01-27N-M.html

SMC PF2A750-N01-67 digital flow sw, integ sensor, IF/PFA FLOW SWITCH

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

https://www.smcpneumatics.com/PF2A750-N01-67.html

SMC PF2A750-N01-67N-M digital flow sw, integ sensor, IF/PFA FLOW SWITCH

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

https://www.smcpneumatics.com/PF2A750-N01-67N-M.html

SMC PF2A750-N02-27 digital flow sw, integ sensor, IF/PFA FLOW SWITCH

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

https://www.smcpneumatics.com/PF2A750-N02-27.html

SMC PF2A750-N02-27-M digital flow sw, integ sensor, IF/PFA FLOW SWITCH

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

https://www.smcpneumatics.com/PF2A750-N02-27-M.html

SMC PF2A750-N02-27N digital flow sw, integ sensor, IF/PFA FLOW SWITCH

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

https://www.smcpneumatics.com/PF2A750-N02-27N.html