Center of gravity Y Y X Z Flange mounting surface Z X Center of gravity X Y Z -0.1 -0.5 55.8 12 - 4.Product Specifications * For detailed specifications not included in this document, please refer to the our website (www.smcworld.com) or operation manual. 4-1.
Center of gravity Y Y X Z Flange mounting surface Z X Center of gravity X Y Z -0.1 -0.5 55.8 12 - 4.Product Specifications * For detailed specifications not included in this document, please refer to the our website (www.smcworld.com) or operation manual. 4-1.
X 2 N.O. X 2 N.C.N.O. 1 2 2 SY7000 4 3 4 3 N.C. X 2 N.O. X 2 N.C. N.O.
Z Y Y X Z Z X X Y Z -0.4 -0.8 48.4 12 - 4 (www.smcworld.com) 4-1. JMHZ2-16D mm 16 MPa 0.1~0.7 (oC) -10~60 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 mm 10 3 4M40.7 8 3.4 8 2 13 - 4-2.3 V114-5LU (oC) -1050( (ms) ON5 OFF4 Hz 20 / m/s2 150/30 V114-5LU L (L) (V) 24 -1010% (W) 0.4 [0.40.1] P .1367 LED 300 14 - 4-3.
XLD-63 XLD-80 XLD-25 XLD-40 XLD-50 XLD-100 XLD-160 0.08 Nm 0.3 Nm 6-3.S S S S 6-4.M M M S 6-5./ S M S M 12 XL-OMY0002 7.
width (mm) 32 x 222 46 x 236 50 x 336 Applicable wafer size Symbol 32 Note) Height 200 mm 46236 50336 300 mm Note) Neither cassette type Half MESK nor cassette type Full MESK are set.
n + L17 x 2 L8 x n + L16 x 2 L8 x n + L25 x 2 L8 L8 Note 1) Refer to page 3 for L8.
Connector, Check Valve: None, Fitting (V Port): 0 [w/o Fitting (M5 x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)]
) w/Connector (w/Connector Cover)], Check Valve: None, Fitting (V Port): 0 [w/o Fitting (M5 x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)], Bracket: N (w/o Bracket, Single Unit)
Wire: G [Lead Wire (2m) w/Connector (w/Connector Cover)], Check Valve: None, Fitting (V Port): 0 [w/o Fitting (M5 x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)]
) w/Connector (w/Connector Cover)], Check Valve: None, Fitting (V Port): 0 [w/o Fitting (M5 x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)]
) w/Connector (w/Connector Cover)], Check Valve: None, Fitting (V Port): 0 [w/o Fitting (M5 x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)]
Connector, Check Valve: None, Fitting (V Port): 0 [w/o Fitting (M5 x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)]
Included), Fitting (V Port): 0 [Without fitting (M5 x 0.8)], Fitting (P Port): 0 [Without fitting (M5 x 0.8)]
Wire: No Connector, Check Valve: None, Fitting (V Port): 0 [w/o Fitting (M5 x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)]
Switch Lead Wire: G [Lead Wire (2m) w/Connector (w/Connector Cover)], Check Valve: None, Fitting (V Port): 0 [w/o Fitting (M5 x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)]
Switch Lead Wire: G [Lead Wire (2m) w/Connector (w/Connector Cover)], Check Valve: None, Fitting (V Port): 0 [w/o Fitting (M5 x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)], Bracket: N (w/o Bracket, Single Unit)
Wire: G [Lead Wire (2m) w/Connector (w/Connector Cover)], Check Valve: None, Fitting (V Port): 0 [w/o Fitting (M5 x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)]
Wire: G [Lead Wire (2m) w/Connector (w/Connector Cover)], Check Valve: None, Fitting (V Port): 0 [w/o Fitting (M5 x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)]