SV

1 P V 5 V 1 P 3 E (Station n) (Station 1) Light/Surge voltage suppressor Individual SUP spacer MAX.21 (DIN rail dimension) SV2000-00Interface regulator SV2000-M1Interface regulator Individual EXH spacer 71.5 7.5 68.2 56.5 19.7 Block separation lever B B B B 145.6 127.6 A A A A B A B A B A B A L Dimension n: Stations L n 2 148 137.5 122.5 13 3 173 162.5 138.5 17.5 4 185.5 175 154.5 15.5 5

KJ

P. 64 15-2-61 3 Series H/DL/L/LL Male Connector: H H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

Hydraulic

C X L + Stroke 47 32 to 100 2-P (port size) Approx.

Series VQ Metal Seal/Rubber Seal Body Ported

L Series VQ1000 Plug lead Cassette Plug-in P.1.10-12 P.1.10-14 Series VQ0 P.1.10-44 P.1.10-36 P.1.10-40 Series VQ1000 P.1.10-36 P.1.10-40 P.1.10-44 C Series VQ2000 P.1.10-40 P.1.10-44 P.1.10-36 Series VQ1000 P.1.10-74 P.1.10-76 P.1.10-78 1.10-4 Manifold Variations C S L Port size SUP EXH port Cylinder port kit kit SY Lead wire Direct electrical entry style Serial transmission unit P, R A,

0.4

L kit (Lead wire) P.578 VQC1000/2000 M kit (Circular connector) P.580 VQC1000/2000 Construction VQC1000/2000 Exploded View of Manifold VQC1000/2000 Manifold Optional Parts VQC1000/2000 Specific Product Precautions P.582 P.584 P.588 P.595 543 Base Mounted Plug-in Unit How to Order Manifold VQC1000 Series VV5QC 1 1 08 FD1 C6 kit F P M L T VV5QC 1 1 08 SDQ C6 S kit Base mounted plug-in

AC

Bracket/ Interface with L Bracket AWD ITV VBA VE VY G AL Interface with L bracket L bracket L bracket Interface with L bracket A B C D E F G R L Applicable model L bracket, Interface with L bracket Model 20 12 4.5 B110L 3 Y10L 25 5 8 2.25 27 AC1000 to AC1020 Interface with L bracket File 24 15 5.5 B210L 3 Y20L 30 6 10 2.75 33 AC2000 to AC2040 L bracket AC2500 to AC2540 Y10L SAC1000, #13 B110L

Table of Contents

Dedicated Controller/LC1 P.73 Controller setup software P.80 Dedicated teaching box P.82 Options P.85 Dedicated Regenerative Absorption Unit/LC7R P.86 Non-standard Motor Compatible Drivers P.89 73 2 Series LC1 Controller Single Axis Type Built-in AC Servo Driver Series LTF: Standard Motor Compatible How to Order 2V LC1 F 1 H 1 L 3 Number of axes Mounting bracket 1 3 5 1 axis M3

Stability of suction position,

Formula examples with beams (Reference) L a b L a b L L L/2 L/2 L/2 L/2 Load/Shape conditions P P P P A C RA RB B A C RA RB B C A E D B RA RB RC RA=Pb/L RB=Pa/L W=P Formula (Reactive force: R, Total load: W) RA=RC=5Pb/16 RB=11P/8 RA=RB=P/2 W=P Mounting Position The basic mounting method is a horizontal lift.

Vacuum Unit

, Description (Pressure Switch for Vacuum) p. 22 Pressure Switch for Vacuum with Energy Saving Function Specifications, Internal Circuit and Wiring Example p. 23 Port Layout Standard Products p. 24 Option -D p. 26 Option -L p. 29 Construction p. 31 Replacement Parts for Single Unit / How to Order p. 32 Exploded View of Manifold p. 33 Dimensions p. 35 Electrical Wiring Specifications

5

141 P. 155 P. 172 P. 198 P. 212 P. 183 P. 225 P. 233 P. 251 P. 265 P. 285 P. 294 P. 309 -X 137 Smooth/Low Speed Cylinders CQlY/CQlX Series Added compact foot brackets.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

7.5 M5 x 0.8 (P, R port) 17.5 23 L plug connector (L): 10-SYJ34M-L-M5 M plug connector (M): 10-SYJ34M-M-M5 M8 connector (WO): 10-SYJ34M-WO-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to page 646 for dimensions

Aluminum High Vacuum Angle Valve

A cm 2 7 Ultimate Pressure Cylinder conductance With length L (cm) and diameter D (cm) where L>>D, from the formula C=(2RT/M)0.5D3/6L, the conductance C=12.1 D3/L (L/sec) at an air temperature of 20C. Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s).

Intrinsically Safe Valve

53-SY5000/7000 Dimensions: 53-SY5000 L-type plug connector (L) 53-SS5Y5-20Stations L1 71 (E-type) 59.5 10 L2 Manual override {1/8"} 16.5 11.5 4 x 4.5 (Mounting hole) 32.7 45.3 EA EB P EA EB P A B A B A B B A 32.7 76.8 32.3 30 L 166.2 21 21 153.6 60 16.2 20 6 x 1/4" {P(1), EA(5), EB(3) port} (Pitch) P = 16 1/8" {A(4), B(2) port} 22 (Lead wire length) Stations n 2 1 67 41.7 36.2 26.5 L-type

Proposals for Energy Saving

Note) Table 1 Table 2 Output type ON YES Hysteresis mode For air OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l Higher flow rate "P" H H H (fixed hysteresis) = 3 digits CFM x 10ft x 10ON CFM = ft/min Window comparator mode NO OFF P-1 P-2 For water Higher flow rate OUT1 Output mode Accumulated flow l Display Real-time flow rate l/min ON YES The same for OUT2.

CY1

No Determination of load's kinetic energy (E) E>Es EEs Bore size determination Tentative determination of L type Note 2) E>Es Determination of pressure (P) when making intermediate stop P>Ps Review of order made products based on operating conditions PPs Tentative determination of L type (Refer to p. 64 to 71.) (Refer to p. 27 for intermediate stops.)

Modular Design with Uniform Body Style

Series Body size Details 20 30 40 50 60 AF p. 61 AFM AFD p. 71 AR(K) p. 79 AW(K) p. 98 AL p. 89 2 A Modular F.R.L.

LEC-OM02704CN

S P L S P O N O N O F F L O F F L S N S N 1 S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F O F F L L S N S N 2 S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L S N O F F L S N 3 S S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N L S N O F F L S N O F F 6 39 6 6.4.4 (PC31PC34) PD20 PD20 0 1 2 3 0() 1() 2() 3() PD20 0 S S S

Secondary Batteries

/Fixed Mounting Height Heavy Duty Stopper Cylinder Floating Joint /Standard Type /For Compact Cylinders /Stainless Steel Type Shock Absorber Rotary Table/Rack & Pinion Style P.33 P.34 Auto Switches D-M9BW(V)SDPC-900 D-M9BW(V)L-900 D-Y7BW(V)L-900 D-A90L-900 D-Z80L-900 P.62 P.63 P.64 P.65 P.65 P.66 Solid State Auto Switch Direct Mounting Style 90-JA 90-JB 90-JS 90-RB/RBC 92-MSQ P.35 P.35 P.35

Air Fittings & Tubing

Gasket To seal M5 thread Material: Nylon 66 GF 30% Material: PVC M-5G1 M-5GH Ml P.2.3-24 P.2.3-24 Hl Dl MS Tl 2.3-22 Series MS Barb fitting for soft nylon: MS-5AU-3, -4, -6 Effective area (mm2) Weight (g) D L Part No.

VFR

ARBF2000-00-P JIS Symbol Inlet pressure 0.7 MPa Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) B port regulation A port regulation P port regulation Flow rate (l/min (ANR)) ARBF5050-00-P ARBF3050-00-P ARBF4050-00-P 0.6 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0.5 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.3 0.2 0.1