This series is available in four body sizes with piping from M5 to 3/4 in Rc, NPT or G thread types.Modular type filter regulator , Rated filtration ( m): 2, 10, 20, 40 , 70 or 100 , Optional embedded pressure gauge , Available with built-in backflow mechanism , Rc, G(PF) or NPT threads "FILTER/REGULATOR. Y.

This series is available in four body sizes with piping from M5 to 3/4 in Rc, NPT or G thread types.Modular type filter regulator , Rated filtration ( m): 2, 10, 20, 40 , 70 or 100 , Optional embedded pressure gauge , Available with built-in backflow mechanism , Rc, G(PF) or NPT threads "FILTER/REGULATOR. Y.

Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: D (Panel Mount Adapter + Front Protection Cover), Operation Manual: Y (w/o Operation

Rated Pressure Range: H (-0.1 to 2 MPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A3 (Bracket C)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: w/o Lead Wire, Bracket: A3 (Bracket C)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Slit Valve

0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Body Size: 20, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 01 (1/8), Option: BM (B + M), Semi-Standard: Y (Knob, Upward)

This series is available in four body sizes with piping from M5 to 3/4 in Rc, NPT or G thread types.Modular type filter regulator , Rated filtration ( m): 2, 10, 20, 40 , 70 or 100 , Optional embedded pressure gauge , Available with built-in backflow mechanism , Rc, G(PF) or NPT threads "FILTER/REGULATOR. Y.

Piping: R1/8 w/M5 Female Thread, Output Specification: PNP Open Collector, 1 Output, Unit Specification: M [Fixed to SI Unit (kPa, MPa)], Option 1: None, Option 2: Y

Piping: R1/8 w/M5 Female Thread, Output Specification: PNP Open Collector, 1 Output, Unit Specification: M [Fixed to SI Unit (kPa, MPa)], Option 1: None, Option 2: Y

Speed Controller with

Safety Instructions Be sure to read Handling Precautions for SMC Products (M-E03-3) before using.

This series is available in four body sizes with piping from M5 to 3/4 in Rc, NPT or G thread types.Modular type filter regulator , Rated filtration ( m): 2, 10, 20, 40 , 70 or 100 , Optional embedded pressure gauge , Available with built-in backflow mechanism , Rc, G(PF) or NPT threads "FILTER/REGULATOR. Y.

Silencers NAN, NAMC Series Compact Mufflers, Exhaust Cleaners

2 M4f.7 optr-8 1.57 (40) 276 o0) 0.13 (x2l 0.79 (m) 0.79 \20) 6.95 076.5) 'Remove drain cock to obtain 1/4 pipe lhread (220 only) Typical Applications r t l -i-E-:I I I ; | | | ' \t/ H

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter), Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: F02 [G1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: F02 [G1/4, (M5, Female Threaded)]

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: None

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: F