(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in8R 3/8-03-08AS3211FG-03-08-03-08-03-08

VZM500

Panel mounting hole Toggle lever VZM550-01-08 T.T.

Series: 2 (VQ20), Stations: 8 Stations, Option: D (DIN Rail Mounting)

Series: VQ20, Stations: 8 Stations, Option: DIN Rail Mounting, Thread: -

Return Filter

Symbol Differential pressure indication Symbol Nominal filtration 0 None 4 Differential pressure indicator standard 074 74m 5 Differential pressure indication switch 105 105m 003 3m Table1-1 Port size (Rc) 005 5m Non-standard 010 10m Port size Threaded connection 020 20m Symbol 040 40m 149 149m 06 3/4 270 270m 08 1 10 1 1/4 12 1 1/2 16 2 20 2 1/2 24 3 10 / 17 FGX-OM-F001-A 2.

Compact Vacuum Ejector Series ZA

ZR 08 8 stations ZM ZMA Left common air pressure supply (P) port (viewed from the vacuum (V) port side) ZQ Maximum Simultaneous Opreating Stations Symbol 0 2 3 5 6 P Applicable tubing O.D. Part no.

ZSP1

Filter case Pin Slot Housing Filter element (ZX1-FE) Filter gasket Gasket groove Connector Socket Lead wire Hook 16-7-3 4 Series ZSP1 Dimensions Grommet type: ZSP10X Adjusting needle Pressure sensor Vacuum supply port ADJ 20 Adsorption nozzle port 08 7 48.3 Lead wire length 600 (3000) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650)

AS-FPQ/FPG

Note) Metric sizes 04 06 08 10 12 4 6 8 10 12 Elbow Control type 0 1 Meter-out Meter-in Note) For applicable tubing O.D. selection, refer to the Model on page 711.

Ionizer IZS40/41/42 Series

One-touch fitting 06 08 10 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting Power supply cable Refer to the table below for selection of One-touch fittings.

ASD

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 Flow

AS-FPQ/FPG

Note) Metric sizes 04 06 08 10 12 4 6 8 10 12 Elbow Control type 0 1 Meter-out Meter-in Note) For applicable tubing O.D. selection, refer to the Model on page 711.

Ionizer Series IZS40/41/42

One-touch fitting 06 08 10 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting Power supply cable Refer to the table below for selection of One-touch fittings.

2 Shock Absorber Series RB Specifications Model RB0805 RB0806 RB1006 RB1007 RB1411 RB1412 RB2015 RB2725 Basic type

/Cap (Resin part only) RBC C 08 Applicable model 08 10 14 20 27 RBC2015 RBC2725 RBC0805, 0806 RBC1006, 1007 RBC1411, 1412 Cap Cap cannot be mounted for basic type. Please place an order with cap type from the beginning.

Unit Manifold Valve Compact Direct Operated 3 Port Solenoid Valve Series VV061

Unit Manifold Valve Compact Direct Operated 3 Port Solenoid Valve Series VV061 How to Order VV061 08 40 5 H Valve stations Bracket Symbol 04 08 Stations Nil: Without bracket (2 mounting screws M2 x 27 are included.) 4 stations F: With bracket 8 stations 1/2/3 port size Symbol Port size Barb fitting (Applicable tubing 4/2.5) 40 Connector cable Nil: Without connector cable 2 one-touch fitting

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

ZCUK How to Order AMJ Metric size Applicable tubing size Metric size (Release button: Light gray) AMV Symbol Bore size Applicable model AEP B ZFC 0 02 05 Metric size ZFC05 ZFC10 ZFC20 02 23 04 06 08 2 3.2 4 6 8 HEP Made to Order B Inch size ZFC 1 05 01 X17 Metal case Related Equipment Refer to page 1115 for details.

Type: 3 (3 Port Valve), 2 Port Valve Mountable Number: 00 (No 2 Port Valves Used), 3 Port Valve Mountable Number: 08 (08 pcs., colors), Pilot Port Fitting Size: C4 (ø4 One-touch Fitting, Antistatic)

Compact Pad

Symbol) Pad type U (Flat) UM (Flat with groove) B (Bellows) 015 # 02 # 035 # 04 06 08 10 13 16 # # # # # # # # # # # # Sales unit 1.5 to 8 : 10 pcs. 10 to 16 : 5 pcs.

Series AP3500

No code ISC ISO 00 08 Material 2) Indication of closed status. 3) Indication of opened status.

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

ZSP1

10.2 8 10 17.8 11 5.5 2-3.3 Mounting hole Connector type: ZSP10X C Adjusting needle ADJ Pressure sensor Vacuum supply port 20 08 Adsorption nozzle port 7 48.3 Lead wire length 600 (3000) Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 59.5 50 PV 6.5 10.2 8 5.5 17.8 11 10 2-3.3 Mounting hole 16-7-4