XG_-OMV0028

ASSY O 0.70.9mm 4-3. 4-4. 4-5. 4-6. 4KPa (1) (2) 9 - (3) (4) (5) 4-7.O ASSYO 5 O O O 4-8. ,, 10 - 5.

High Vacuum Slit Valve

Specifications Opening angle 50mm336mm Working pressure Pa Atmospheric pressure to 10-6 Operating pressure MPa 0.45 to 0.6 Internal leakage amount O-ring material : FKM 6.510-10 Pam3/sec O-ring material : Kalrez 6.510-9 Pam3/sec C O-ring material : FKM 6.510-8 Pam3/sec Internal leakage amount (At negative pressure 0.1MPa or less) O-ring material : Kalrez 6.510-7 Pam3/sec C External leakage

CG5-S

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 NBA088S NBA106S BGS1 -032S BAF -04S BAF -05S BAF -06S BAF -08S BAF -10S D-G5BA Includes stainless steel mounting screws.

ZSE5/ISE5

,JAPAN Tel:03-3502-2740 Fax:03-52517240 l si printing January 1995.0-036,P-46(M) Augusl 1996, 49(RP) Specifications are subject 10 change without prior notice Printed In Smgapore and any obligation on the part of the manufacture,

Model: 10S (Side Ported), SI Unit: ZE (EtherNet/IPâ„¢, Negative Common), Input Block Stations: 8 Stations, Input Block Type: F (M8, 4 Inputs, NPN Input, Negative Common), Valve Stations: 10 Stations, P,E Port, SUP/EXH Assembly: F (D Side, 2 to 10 Stations, Internal Pilot, Built-in Silencer), A,B Port Size: C12 (ø12 One-touch Fitting)

Model: 10S (Side Ported), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Ouput Polarity: N (Negative Common, PNP), Valve Stations: 10 Stations, P,E Port Entry: D (D Side, 2 to 10 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: N9 (ø5/16" One-touch Fitting, Straight, Inch), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 0 (w/o DIN

Series: 1 (JSY1000), Type: 10S (Side-Ported, Serial Interface, EX250), SI Unit: ZE (EtherNet/IPâ„¢, Negative Common), Input Block Stations: 6 Stations, Input Block Type: B (PNP Sensor Input, M12, 4 Inputs), Valve Stations: 10 Stations, P,E Port, SUP/EXH Assembly: D (Internal Pilot, D Side, 2 to 10 Stations), A,B Port Size: C6 (ø6 One-touch Fitting)

Series: 5 (JSY5000), Type: 10S (Side-Ported, Serial Interface, EX250), SI Unit: ZE (EtherNet/IPâ„¢, Negative Common), Input Block Stations: 2 Stations, Input Block Type: B (PNP Sensor Input, M12, 4 Inputs), Valve Stations: 10 Stations, P,E Port, SUP/EXH Assembly: C (Internal Pilot, Built-in Silencer; U Side, 2 to 10 Stations), A,B Port Size: C10 (ø10 One-touch Fitting)

Series: 1 (JSY1000), Type: 10S (Side-Ported, Serial Interface, EX250), SI Unit: ZE (EtherNet/IPâ„¢, Negative Common), Input Block Stations: None, Input Block Type: w/o Input Block, Valve Stations: 10 Stations, P,E Port, SUP/EXH Assembly: D (Internal Pilot, D Side, 2 to 10 Stations), A,B Port Size: C6 (ø6 One-touch Fitting)

Series: 1 (JSY1000), Type: 10S (Side-Ported, Serial Interface, EX260), SI Unit: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP, Negative Common), Valve Stations: 10 Stations, P,E Port Location: U (U Side, 2 to 10 Stations), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting)

Series: 1 (JSY1000), Type: 10S (Side-Ported, Serial Interface, EX260), SI Unit: GA (Ethernet POWERLINK - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP, Negative Common), Valve Stations: 10 Stations, P,E Port Location: U (U Side, 2 to 10 Stations), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting)

Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX260), SI Unit: DA (EtherCAT - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP, Negative Common), Valve Stations: 10 Stations, P,E Port Location: D (D Side, 2 to 10 Stations), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C8 (ø8 One-touch Fitting)

Series: 1 (JSY1000), Type: 10S (Side-Ported, Serial Interface, EX260), SI Unit: FA (PROFINET - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP, Negative Common), Valve Stations: 10 Stations, P,E Port Location: U (U Side, 2 to 10 Stations), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C4 (ø4 One-touch Fitting)

Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX260), SI Unit: KA (IO-Link - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP, Negative Common), Valve Stations: 10 Stations, P,E Port Location: U (U Side, 2 to 10 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C8 (ø8 One-touch Fitting)

Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX260), SI Unit: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP, Negative Common), Valve Stations: 10 Stations, P,E Port Location: U (U Side, 2 to 10 Stations), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C6 (ø6 One-touch Fitting)

Series: 1 (JSY1000), Type: 10S (Side-Ported, Serial Interface, EX260), SI Unit: QA (DeviceNetâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP, Negative Common), Valve Stations: 10 Stations, P,E Port Location: U (U Side, 2 to 10 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting)

Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX260), SI Unit: KA (IO-Link - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP, Negative Common), Valve Stations: 10 Stations, P,E Port Location: D (D Side, 2 to 10 Stations), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C6 (ø6 One-touch Fitting)

Series: 1 (JSY1000), Type: 10S (Side-Ported, Serial Interface, EX260), SI Unit: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP, Negative Common), Valve Stations: 10 Stations, P,E Port Location: U (U Side, 2 to 10 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C6 (ø6 One-touch Fitting)

Series: 5 (JSY5000), Type: 10S (Side-Ported, Serial Interface, EX260), SI Unit: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP, Negative Common), Valve Stations: 10 Stations, P,E Port Location: U (U Side, 2 to 10 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C10 (ø10 One-touch Fitting)

Series: 1 (JSY1000), Type: 10S (Side-Ported, Serial Interface, EX260), SI Unit: FA (PROFINET - 32 Outputs - Connector M12), SI Unit Output Polarity: NPN, Positive Common, Valve Stations: 10 Stations, P,E Port Location: U (U Side, 2 to 10 Stations), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C4 (ø4 One-touch Fitting)