Series AR-B 10- 21- Regulator Series ARK-B 10- Regulator with 21- Backflow Function

Regulator Series AR-B 1021Series ARK-B 1021Regulator with Backflow Function How to Order Clean series K F 10 AR B 30 03 BG 1N K F 21 AR B 30 03 BG 1N Copper, fluorine and silicone-free + Low particle generation q r t y w e Regulator Option/Semi-standard: Select one each for a to g.

5 Port Solenoid Valve Body Ported Series VQZ1000/2000/3000 Plug Lead Unit Single Unit [Option] Made to Order How to Order Valve (For details, refer to page 975.) SJ VQZ 1 1 2 5 M 1 C6 1 SY CE compliant IP65 compliant Series SV — — Nil Nil 1 VQZ1000 body w

SZ Type of actuation 2 position single 3 position pressure center Port size [4(A), 2(B) port] VP4 (A) 4 (B) 2 (A) 4 (B) 2 Note 1) 5 VQZ3000 VQZ2000 VQZ1000 Symbol Port size 1 C3 C4 C6 C8 C10 M5 02 3.2 one-touch fitting 4 one-touch fitting 6 one-touch fitting 8 one-touch fitting 10 one-touch fitting M5 thread Rc 1/4 1 (P) 3 (R2) 5 (R1) 5 (R1) 1 (P) 3 (R2) S0700 2 position double 3 port for

IDX-OM-M051

Replacement method Standard replacement period Refrigerating compressor 1 B 20,000 hours (6 years) Plate type heat exchanger 1 B 20,000 hours (6 years) Water regulating valve 1 B 20,000 hours (6 years) High pressure switch 1 B 20,000 hours (6 years) Low pressure switch 1 A 20,000 hours (6 years) Magnetic contactor 1 A 20,000 hours (6 years) Programmable controllers 1 A 20,000 hours (6 years

Process Pump

Actuating chamber A Actuating chamber A Actuating chamber B Actuating chamber B Discharge Discharge port port Pump chamber B Pump chamber B Pump chamber A Pump chamber A Suction port Suction port Diaphragm Fig. 1 Fig. 2 Fluid flow Air flow 13 11. Sensor mounting (leakage sensor) Series PAF can have a sensor for detecting diaphragm breakage.

DOC1013639

Description Material Note 1 Pilot body PBT 16 Guide Brass Electroless nickel plating 2 Piston A Brass Electroless nickel plating 17 Stud Brass Electroless nickel plating 3 Piston B Brass Electroless nickel plating 18 Spacer POM or PBT 4 End cover A Brass Electroless nickel plating 19 Seal NBR 5 End cover B Brass Electroless nickel plating 20 Cassette 6 Piston rod Brass Electroless nickel

VFR2000 Series

Lead wires from solenoid Lead wire at both of solenoid A and B sides in manifold is valve are connected with the terminals on upper side of connected to connector terminal as COM specification. terminal block. (On the terminal block, lead wire is connected with both A and B sides of solenoid valve in accordance with the corresponding markings A and B on the block .)

ZQ

B S Manifold Pilot exhaust port location Number of stations Note) 01 02 1 station 2 station B Both sides ZX ... ... 08 8 station Note) Number of stations varies according to nozzle nominal size during simultaneous operation.

IDX-OM-Z004

20,000 (6 ) 1 B 20,000 (6 ) 1 B 20,000 (6 ) 1 B 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 12 /JEMA 300 A B IDF100F150F-W 6 8 IDX-OM-Z004 7 7 7.1 / 7-1 IDF100150F-W 7 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

Pin description A B Output specification 1 DC(+) Output for display unit only 42 62 2 NC/Analog output 3 DC() Output for display unit + Analog output 52 72 4 OUT Flow direction 22 Series PF2W Dimensions: Remote Type Sensor Unit for Water PF2W511-(N)B 148 32 80 70 58 46 45 36 2-Port size 45 2 4-5.5 (44.2) A (mm) A B Output specification Output for display unit only 63 77 Output for display

Compact Vacuum Ejector Series ZQ

B S Manifold Pilot exhaust port location Number of stations Note) 01 02 1 station 2 station B Both sides ... ... 08 8 station Note) Number of stations varies according to nozzle nominal size during simultaneous operation.

V100

M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Plug connector Large flow capacity Standard V14:13(27) V14A:16(30) V14:12(26) V14A:15(29) Large flow capacity V124A Note 1) 1 2 Flow characteristics 2 3 V100 Valve model C[dm3/(sbar)] 0.037 0.076 0.054 0.099 C[dm3/(sbar)] 0.054 0.099 0.037 0.076 b 0.11 0.070 0.35 0.23 b 0.35 0.23 0.11 0.070 Cv 0.0080 0.016 0.015 0.024

How to Order 90-SV Series Single Valve/Sub-plate Type IP67 Compliant

/N.C. 5 6 24 VDC 12 VDC (B) 2 (A) 4 A SOL.b SOL.a 3 (EB) 5 (EA) 1 (P) Pilot type Nil R Internal pilot External pilot 4 position dual 3 port valve: N.O./N.O. (B) 2 (A) 4 *External pilot specifications is not available for 4 position dual 3 port valves. B SOL.b SOL.a 3 (EB) 5 (EA) 1 (P) 4 position dual 3 port valve: N.C./N.O.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

4.68 (0.26) A/BR 4.68 (0.26) C8: PA/B 12.6 (0.7) A/BR 12.6 (0.7) A, B port piping specifications SY3000 SY5000 SY3000 Operating pressure range External pilot operating pressure range MPa 2 position single Pilot pressure range 2 position double 0.25 to 0.7 Port size 3 position A/B ports Ambient and fluid temperature C Maximum 50 10 3 5 3 SY5000 2 position single, double 3 position Max. operating

LZ-OM004xx

B C D E Model no. E [Tightening torque] L[]ZC[]5[] 16 20 15.5 52.5 L[]ZC[]3[] 12 20 8 37 Model no. A B C D L[]ZC[]5[] M10 x 1.25 x 12 deep [24.5Nm] L[]ZC[]3[] M6 x 1.0 x 8 deep [5.2Nm] Model no.

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

Standard M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 10-V14: 13(27) 10-V14A: 16(30) 10-V14: 12(26) 10-V14A: 15(29) Large flow capacity Standard 10-V124A Note 1) Large flow capacity Valve model 12 [32 Note 3)] Flow characteristics 23 [21 Note 3)] b b Cv Cv C[dm3/(sbar)] 0.054 0.099 0.037 0.076 C[dm3/(sbar)] 0.037 0.076 0.054 0.099 10-V114 10-V114A 10-V124 Note 1) 0.008 0.016 0.015 0.024 0.015 0.024

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

0.2 0.1 0.2 C and b values are for controlled flow with the needle fully open and free flow with the needle fully closed.

5 Port Air Operated Valve Series VPA450/470 How to Order 10 VPA4 1 5 0 VP 5 port Thread type Air operated valve Nil Rc Function F VPA4270-14 G N NPT 2 position single pilot 1 T NPTF 2 position double pilot VPA4150-04 2 3 position closed center Port siz

Symbol 0 P Side 1 E Side Side Bottom (1) Side Other A, B Side Base specifications 9 2 1 Individual exhaust Common exhaust Note 1) Size of A, B port bottom ported: 3/8, 1/2 Option Stations 02 2 stations 10 10 stations How to Assemble Manifold To order valves and blanking plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.

Dedicated Controller

(B contact) 3 wire GXL-N12FTB Switch specifications (SUNX Corporation) GXL-N12FT(B) Part no.

AMPSeries

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi