Vacuum

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Body Size: 40, Thread: Rc, Port Size: 1/4, Handle/Bonnet Material: Aluminum, Options: Built-in Silencer, EXH Port, Semi-Standard: -, Made to Order: -

Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread Nominal: 1/4, Control Side Connecting Tube Diameter: -, Standard size: 3, Accessory: With Bracket, Fitting for purge air emission: None, Flow Direction: None, Dew Point Checker: With dew point indicator

Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread Nominal: 1/4, Control Side Connecting Tube Diameter: -, Standard size: 3, Accessory: With Bracket, Fitting for purge air emission: None, Flow Direction: None, Dew Point Checker: With dew point indicator

Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread Nominal: 1/4, Control Side Connecting Tube Diameter: -, Standard size: 5, Accessory: With Bracket, Fitting for purge air emission: None, Flow Direction: None, Dew Point Checker: With dew point indicator

Regulator Unit Combination: [Other FRL Combination Devices] Other FRL Combination Device, Port Size: Rc1/4, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: -, Size

Regulator Unit Combination: [Other FRL Combination Devices] Other FRL Combination Device, Port Size: Rc1/4, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge:

Body Size: 30, Thread: Rc, Port Size: 02 (1/4), Handle/Bonnet Material: B (Aluminum), Options: S (Built-in Silencer, EXH Port)

Size: 5, Standard Dew Point: H (-15°C), Type: Standard, Thread: Rc(PT), Port Size: 02 (1/4), Accessory: B (Bracket), Option: S (Dew Point Indicator)

Size: 3, Standard Dew Point: -20°C, Type: Standard, Thread: Rc(PT), Port Size: 02 (1/4), Accessory: B (Bracket), Option: S (Dew Point Indicator)

Size: 5, Standard Dew Point: -15°C, Type: Standard, Thread: Rc(PT), Port Size: 1/4, Accessory: Bracket, Option: Dew Point Indicator

Body Size: 40, Thread: Rc, Port Size: 02 (1/4), Handle/Bonnet Material: B (Aluminum), Options: S (Built-in Silencer, EXH Port)

Body Size: 20, Thread: Rc, Port Size: 02 (1/4), Handle/Bonnet Material: B (Aluminum), Options: S (Built-in Silencer, EXH Port)

Body Size: 3, Thread: Rc, Port Size: 02 (1/4), Handle/Bonnet Material: B (Aluminum), Options: S (Built-in Silencer, EXH Port)

Regulator Unit Combination: [Other FRL Combination Devices] Other FRL Combination Device, Port Size: Rc1/4, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: -, Size

Type: Instrumentation Auxiliary Device, Thread Type: Rc, Connection Port Size: 1/4, Specification: Copper-free, Accessory: With bracket

Size: 5, Standard Dew Point: -20°C, Type: Standard, Thread: Rc(PT), Port Size: 02 (1/4), Accessory: B (Bracket), Option: S (Dew Point Indicator)

Size: 3, Standard Dew Point: H (-15°C), Type: Standard, Thread: Rc(PT), Port Size: 02 (1/4), Accessory: B (Bracket), Option: S (Dew Point Indicator)

MY1

Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

Stability of suction position,

ZP3EA-P2 [Weight: 7.6 g] 10.3 27.4 10.3 20.3 R R 20 20 2.9 4.9 2.9 4.9 R R R R R R 23.5 19.5 31.6 26.5 Applicable pad part no. ZP3E-32UM ZP3E-40UM ZP3E-32BM ZP3E-40BM Applicable pad part no. ZP3E-50UM ZP3E-50BM Part no. ZP3EA-P3 [Weight: 17.7 g] Part no. ZP3EA-P4 [Weight: 31.1 g] 16.3 34.5 16.3 43.6 R R 4.9 7.9 4.9 7.9 15 15 R R R R R R R 50.5 41 39.8 32 Applicable pad part no.