AS-FPQ/AS-FPG

0 w w u TMH u r r ASD t e AS e !4 AS-FE !4 !3 KE !3 q q AS-FG i i y AS-FP AS-FP !5 AS-FM Meter-in type M5 type AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

3 Port Solenoid Valve SYJ300/500/700 Series

N.O. 24 VDC 12 VDC Type 42 7 Q Q Q Specifications Series SYJ300/500/700 Low Power Consumption 0.5 W Q Q Q Q Q SYJ300.pages 10-12 Q Q SYJ500.pages 13-15 Q SYJ700.pages 16-18 Q Q Q Specifications Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q 9 Series SYJ300 3 Port Solenoid Valve Valve Specifications Model Weight g Valve model Type of actuation Port

ML1C

9 MNB e CNA2 $2 q %3 %4 $1 CNS #1 #0 @9 #4 $0 !5 !4 $7 $6 y %0 %1 CLS CLQ #3 #2 !8 @0 @2 @1 @7 RLQ @3 r MLU o #5 !6 $3 $4 MLGP Component Parts Component Parts Material No.

Stainless Steel Heat

Inlet air temperature 35C Outlet air pressure dew point 10C Ambient temperature 35C Inlet air pressure 0.5MPa Air flow 1200 l/min (ANR) Inlet air temperature 55C Outlet air pressure dew point 10C Ambient temperature 35C Inlet air pressure 0.7MPa Air flow 350 l/min (ANR) Condition Condition A = 0.75 based on conditions q, w and e 1 B = 0.95 based on conditions q, w and e 1 C = 1.00 based on

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

3r#0q u @9#2 e y!6#1@8t!2w#3!5 !7 !8 @1 @6 14A !9 @0 CJ1 CJP @7 i o CJ2 80, 100 CM2 C85 !0 !1 CG1 @2@3@4@5 14B MB Locking at rod end C95 CA1 CS1 Manual release non-locking style: L Material Note Component Parts Material Note Component Parts No. q w e r t y No. !7 !8 !

VFM300

2 Description Material q Description No. Stainless steel Urethane rubber Notes No. Zinc alloy Aluminum alloy Material Notes Plunger Cushion for end cover Pilot body Body Metallic plated Metallic plated Black zinc chromate !3 !4 w e Zinc alloy Stainless steel Valve seat (A) !5 Brass Valve seat (B) Brass Head cover r Spool/sleeve t Polyacetal End cover !

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

q Part no.

VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 H Y F X E W D U V C S T B K R A J N Q N 79.5 87.5 101.5 106.5 L 108 117 130 135 1 4 3 8 , 28 35 43 45 26 30 38 43 14 17 22 22 7.5 8.5 9 9 24 33 42 47 1.6 2.3 2.6 2.6 22 28 36 42 5.5 6.5 6.5 6.5 40 52 65 70 6 7 7 7 11 14 18 21 93 102 115.5 120.5 25 25 28 28 89 97 112 117 67 75 87 92 50 63 80 90 23 23 25.5 25.5 35 35 40 40 25.5

NAIV

e E , q 1.5 8 1 2 1 6 2 0 Cylinder speed (in/sec.) Sl6ct a propr unit sccording to exhaust flo/, in lh6 following ordr: (l) Oete|mine air con6umplion ot actuaicrs uaed in tl|e ckc\rii.

25

E 21 SN LQ1 LQ1 fittings Nut (including insert bushing), 1 location removed Fitting type E Union elbow T Union tee Applicable tube size Metric Inch Applicable tube size (mm) Applicable tube (inch) Reducing Reducing Size No.

VZ3000

A E Push type A Push-locking type E Dimensions: Single Dimensions: VZ1120-G-M5-X1 Push type A (Push type A) Manual override Manual override (Non-locking) (Mounting hole for manifold) Push-locking type E (Piping port) Manual override (Push-locking type E) ( ) Pressing makes the valve operate.

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series How to Order XLAQ M9N 16 A q w e r t y w Indicator/Actuator port direction q Flange size Size 16 25 40 50 Indicator Without indicator Symbol Nil A F G J K L M Rear flange surface Actuator port direction Flange side Flange side Left flange surface Rear flange surface Right flange surface

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80

Clean Rodless Cylinder Series CYP

B Counter bore depth C 4-LD Thread depth M QW PB N A E depth EK Q + Stroke Z + Stroke G A A LW Stroke adjustment screw (inner cover) Note 2) Note 3) Note 2) Operating direction Plug [P (port g)] Plug [P (port h)] P (port a) P (port b) 0.5 0.5 Plug [P (port c)] Plug [P (port e)] Left Right Auto switch mounting groove HI HP H HL HG HT HS HB HA HB HA HG HT HI Note 3) Plug [P (port d)] Plug [

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

Condition Condition Inlet air temperature 35 C Outlet air pressure dew point 10 C Ambient temperature 35 C Inlet air pressure 0.5MPa Air flow 1200 l/min (ANR) Inlet air temperature 55 C Outlet air pressure dew point 10 C Ambient temperature 35 C Inlet air pressure 0.7MPa Air flow 350 l/min (ANR) A = 0.75 based on conditions q, w and e 1 B = 0.95 based on conditions q, w and e 1 C = 1.00 based

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Seal type Nil E With Without light, with surge voltage suppressor Metal seal Rubber seal 0 1 Coil voltage 1 2 3 Stations Function D side U side 1 2 3 4 5 6 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Standard type (1W) Energy saving type (0.5W) External pilot Nil Y Note 1) R Note 2) Note 1) Applicable to DC specifications.

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Power supply ON/Servo OFF: Green flashes. q q PWR Power supply LED y w With alarm : Red turns on. Parameter setting : Red flashes. w ALM Alarm LED Change and protection of the mode switch (Close the cover after changing switch.) u i e Cover o !0 Frame ground (Tighten the bolt with the nut when mounting the controller. Connect the ground wire.) r FG !1 !2 t y u i o !0 !1 !2 !3 !4 !5 !

D. P. Lube ALD600/900 Series

Lube Unit/ALDU600-06 to 10, ALDU900-12 to 20 Float switch mounting position Mounting thread M12 R 3.2 S 40 Q IN P M N M L A B C E E F G K J (Bracket mounting dimensions) H D S Bracket (Option) Panel (Option) 6 x 17 A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 289 291.2 453 453 476 24.5 13.6 51 45.5 14.5 69.5 78.2 89 94.5 102.5 4

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

80 85 90 95 100 105 60 65 70 75 80 85 73 78 83 88 93 98 16 to 25 Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R QA Q GC GB E MM GA D J C 2.8 A Width across flats L 2 x P through A1 H E 4 x T counterbore 0.5 B S Z (mm) S Z A A1 GB P Q QA R T B C D E GA GC H J L MM Bore size 5 30 40 50 5 10 15 20 25 30 40 50 10 15 20 25 20 16 12 11 5.5 4.5 9 4 4.5 2 16 12 26 20 40 32 8 6 30 27 M6 x 1.0

Steam Valve

N R Pilot port 12(P1) Indicator (Option) 1 8 2 x (Back side 10(P2)) VNA P1 4 x P S VNB F U D E SGC Bracket (Option) A B 15 SGH VNC 1(A) (Back side 2(B)) Main port T C Port size: refer to table below A B VNH VND VND Main port 1(A), 2(B) A B C D E F G M N P Q R S T U Model VCC VND20D-10A VND20D-15A VND30D-20A VND40D-25A 3 8 1 2 3 4 1 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3 25 34 56 TQ 80