Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.
4 q w r !3 !0 !2 i o !5 e y !1 Replacement parts: Seal kits Parts list Seal kit no. No. Description Cylinder tube Bore size Material No. of pcs.
specications VQ 1/2 Type of actuation Nil Q CE-compliant 2-position single 3-position closed center Nil Side ported B Bottom ported VQ 4/5 VQ 4/5 (A) 4 (B) 2 (A) 4 (B) 2 1 3 Note) CE-compliant: For DC only.
Operating Pressure Particulate Generation Grade Classifications 1.2 104 Average particle concentration Particles/ft3 Max. operating pressure MPa Grade 4 1.0 103 0.8 Grade 3 102 0.6 101 Grade 2 100 0.4 Grade 1 10-1 0.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 15-17-3 4 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06 Body size 1 2 3 4 M5 standard
L O L ZX G H F K ZR J ZM ZH E D I A ZU B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL 2-4.5 ZY ZQ A B C D E F G H I J K L Model 4 ZFC100-04 ZF 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 ZP 1/4" ZFC101-07 6 ZFC200-06 ZCU 8 ZFC200-
(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.
Note 4) q Ambient temperature: 25C, w Circulating fluid temperature: 20C, e Rated circulating fluid flow rate, r Circulating fluid: Clear water, t Facility water temperature: 25C Note 5) Use a 15% ethylene glycol aqueous solution if operating in a place where the circulating fluid temperature is 10C or less.
*1 Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series 2(A) Symbol How to Order (P)1 3(R) *1 CE compliant AV 00 20 02 B B 1 D q w e r t y u i o A Electrical entry Grommet DIN terminal AC V DC V V V q Body size 20 30 40 50 Symbol Description w Thread type Nil Rc V V V V N NPT V V V V F G V V V V + 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V + e Port size 1(P), 2(A) a Mounting Nil
384) Cable for M12 connector V100 200 1 4 Specification 1 2 For DC For AC Cable length (L) 4 8 9 1000 [mm] 3000 [mm] 5000 [mm] 1 2 4 3 VNA VNB SGC VNC VNH VND VCC 379
80 85 90 95 100 105 60 65 70 75 80 85 73 78 83 88 93 98 16 to 25 Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R QA Q GC GB E MM GA D J C 2.8 A Width across flats L 2 x P through A1 H E 4 x T counterbore 0.5 B S Z (mm) S Z A A1 GB P Q QA R T B C D E GA GC H J L MM Bore size 5 30 40 50 5 10 15 20 25 30 40 50 10 15 20 25 20 16 12 11 5.5 4.5 9 4 4.5 2 16 12 26 20 40 32 8 6 30 27 M6 x 1.0
How to Order 307 5 F G 1 V T 01 Body type T O Body ported For manifold CE-compliant Valve option Nil Q None CE-compliant Nil E Y V W Standard type Continuous duty type Energy-saving type Vacuum specification type Electrical entry and light/surge voltage suppressor: D/DO/DZ/DOZ only Bracket Nil F None With bracket Energy-saving type, Vacuum specification type Semi-standard Pressure specifications
LEY25: 200 mm or less LEY32: 100 mm or less 3 Rod ange is not available for the LEY25/32 with stroke 50 mm or less and motor option With lock. 4 Head ange is not available for the LEY32. Nil Ends tapped/ Body bottom tapped 2 L Foot F Rod ange 2 3 G Head ange 2 4 Applicable Stroke Table : Standard For auto switches, refer to page 507.
Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: F (G), Material: Brass Body, NBR Seal, Class B Coil, Option: None, CE Compliance: Q (CE Marked)
Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: F (G), Material: Brass Body, NBR Seal, Class B Coil, Option: None, CE Compliance: Q (CE Marked)
Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: G, Material: Brass Body, NBR Seal, Class B Coil, Option: None, CE Compliance: CE Marked
Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: G, Material: Brass Body, NBR Seal, Class B Coil, Option: None, CE Compliance: CE Marked
mm, Length 500 mm O.D. 6 mm, I.D. 4 mm, Length 500 mm O.D. 6 mm, I.D. 4 mm tube (Length 10 mm) 0.15 0.10 O.D. 6 mm, I.D. 4 mm, Length 100 mm O.D. 6 mm, I.D. 4 mm, Length 100 mm 0.05 Ionizer 0.00 0 300 100 200 Flow rate [L/min (ANR)] * When a pressure above each line is used, the maintenance warning function may work and turn on the LED.
+ Stroke CY1F 1/2 (Q + Stroke) (LL) LA 6-YB through hole 6-YA recessed area 4-MM thread depth ML Adjustment bolt Note2) PA MAX. approx.
Description Material Note 1 Solenoid valve Unit assembly 4 mounting screws M2 x 27 L are included. w 2 PCB assembly 3 Cover Resin 4 Base Resin q 5 Plate Aluminum Plate assembly 6 Barb fitting Aluminum r t y 1 (P) 2 (A) 2 (A) 3 (R) Note) As this drawing shows the internal construction, it is different from the actual product. 3 Series VV061 Replacement Parts q Unit assembly Mounting screw