Cylinder

5+ g"'" 116 5:5 M4XO,7 YPOIO , '10 6.S 10 sg04I 16 5.5I M,4 XQ,7 71' 5 a 6.3 7 I 5 a 1 6.3 YP015 I 15 7 12 ~-g.048 19 7 M5XO,a 9 I 6 10 ,7.8 10 7,a ...!:!'.015 l 15 7 12 6 -g~ 19 9 I 6 7 M5 x O.B . ~I ~--~~ K ~~ P~ ' ~k I -TFunnion Pin' . , nue ' :e In .

Vacuum gripper

9 10 10 10 ZP20U ZPT3-7A-X2 ZP 25 U ZPG25U-7A-X2 10 10 10 11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B

Rotary Table: High Precision Type

Mounting dimension in axial directions Size Tap depth for the Tap depth for the top Bolt bottom mounting mounting 1 8 4 M4 3 8 7 M4 7 10 7 M5 20 11 7 M6 Vertical mounting body through hole Body side mounting body through hole Table 9. Mounting dimension in body side Size L Bolt 1 38 M4 3 44 M4 7 50 M5 20 59 M6 28 Piping Fig. 4 and Table 10 show port position and size.

Pressure Gauge Guide

Turn the cover clockwise (approximately 6 to 7 mm) until it stops. Make sure that the matching mark on the cover is aligned with the groove on the top of the case. VBA Mark VE VY1 Top hollow G Precautions Slit PPA Mark Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions.

CE

0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

Servo Motor Controller (24 VDC)

Common power(-),Motor power (+),Control power(+),Stop signal(+),Lock release(+),Regenerative output(+), Regenerative output(-) 7 CN1 Power connector (7 pins) 8 Compatible actuator label The label indicating the applicable actuator model.

Stroke Reading Cylinder and Counter

7 !7 @7 !2 w @5 q y !3 @3 r t @5 e !1 @1 @1 @6 @6 @4 !4 !4 u @8 !5 @0 !9 !8 i Component Parts Component Parts Description Material Note No. Description Material Note No.

Fieldbus system EtherNet/IP TM compatible SI unit

, SPEEDCON compatible (8)Power supply cable PCA-1558810 Cable with 7/8 inch connector, Socket, Straight 2 m PCA-1558823 Cable with 7/8 inch connector, Socket, Straight 6 m PCA-1558836 Cable with 7/8 inch connector, Socket, Right angle 2 m PCA-1558849 Cable with 7/8 inch connector, Socket, Right angle 6 m PCA-1564927 Cable with M12 connector, B code, Socket, Straight 2 m, SPEEDCON compatible

JXCx-OMT0032CN

6.1 . 20 6.2 . 20 6.3 . 21 1 - . 22 7.CN3 . 23 8.CN1IF(CONT) . 24 8.1 . 24 8.2 . 26 9.CN2TB/PC . 27 9.1 . 27 10.LED . 28 10.1 LED . 28 10.2IFLED . 28 11. . 29 11.1 . 29 11.2 . 29 11.3 . 29 11.4 . 31 12. . 32 12.1 . 32 12.2 IF(IN Data) . 38 12.3 (IN Data) . 38 12.4(OUT Data) . 40 13.

1.1

IDF-TR4000-6 440, 460 VAC (50 Hz) 440 to 500 VAC (60 Hz) IDF-TR4000-7 HRG005IDF-TR7000-8 IDF-TR14000-8 IDF-TR18000-8 7 kVA 220, 240, 380, 400, 415, 440 VAC (50/60 Hz) 3-phase double HRG01014 kVA 200 VAC (50/60 Hz) HRG01518 kVA IDF-TR1700-5 IDF-TR1700-6/7 39 Cable hole Terminal block 243 183 Terminal block 295 259 200 220 30 205 10 15 220 270 160 15 4 x 8 4 x 10 250 290 190 IDF-TR-5/6/7 Terminal

HRX-OM-Y120

Terminal Terminal resistance resistance 2 2 2 7 5 7 5 7 5 SDSD+ SDSG SD+ SD+ SD+ SG SDSG SDSG Controller This product This product This product (Second) (31 device) st (First) Do not connect any wire to other PIN numbers.

e

M1 M2 M3 m1 m2 m3 E-MY2C 16 25 16 25 16 25 5 18 16 14 4 3.5 13 35 35 30 14 10 LJ1 LJ1 7 15 13 13 6 7 E-MY2H 28 32 30 30 26 26 LG1 LG1 46 20 18 18 55 46 E-MY2HT 100 38 35 35 120 100 Maximum Load Mass LTF LTF The above values are the maximum allowable values for moment and load mass.

IZx-OMP0064

Dimensions Ionizer/ IZS40 340 5 340 400 6 400 460 7 460 580 9 580 640 10 640 820 13 820 1120 18 1120 1300 21 1300 1600 26 1600 1900 31 1900 2320 38 2320 2500 41 2500 bar length Model Symbol for n (No. of cartridge), L IZS40 fitting A (mm) 06 13 08 15 10 22 Symbol for A Ionizer/ IZS41, IZS42 340 5 340 400 6 400 460 7 460 580 9 580 640 10 640 820 13 820 1120 18 1120 1300 21 1300 1600 26 1600

Suction cups with flange

7 7 7 ZP10U ZPT2-7A-X2 ZP 13 U ZPG13U-7A-X2 7 7 7 8 ZP13U ZP 16 U ZPG16U-7A-X2 7 7 7 8 ZP16U ZP 20 U ZPG20U-7A-X2 9 10 10 10 ZP20U ZPT3-7A-X2 ZP 25 U ZPG25U-7A-X2 10 10 10 11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2

Slider Type Ball Screw Drive/11-LEFS Series

4 x M8 x 1.25 thread depth 13 (170) Motor cable (6) 106 60 Body mounting reference plane Note 1) 74 58 6H9 ( ) depth 7 7 +0.030 0 +0.030 0 6H9 ( ) depth 7 13 L (3.1) A (Table traveling distance) Note 2) 86 86 (223.5) Stroke (88) (90) 61 90 Encoder Z-phase detecting position Note 3) 48.5 (4) 21 68 53.8 85.5 8 31 8 12.9 Vacuum port Rc1/8 M4 x 0.7 thread depth 8 (F.G. terminal) +0.030 0 6H9

LEH_C

42 (DC24V) () A/B (800 /) (V) DC2410% 11/7 28/15 34/13 36/13 / (W) 8) 8/7 22/12 (W) 9) 14 42 19 51 57 61 1) 1020 150 LEHZ10,16:30(F.S.),LEHZ20,25:25(F.S.),LEHZ32,40:20(F.S.) 2) () 3) 5m 5m 10%(15m 20%) 4) 5) () 6) () 7) () 452000Hz 1 () 8) () 9) 11 - 2.1.2 6N LEHZ 10 K 4 2 1 R 1 2 10 10 D DIN D DIN 16 16 1DIN 2 0 2 0 I/O (m) L ) L ) 25 25 ) 10,16,20,25 32 32 1.5

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

D-F9NW(V) Auto Switch Weights DC (+) Brown [Red] (g) Model D-F9NW D-F9NWV D-F9PW D-F9PWV D-F9BW D-F9BWV Main switch circuit OUT Black [White] Lead wire length 0.5m 7 7 7 7 7 7 Lead wire length 3m 34 34 34 34 32 32 DC () Blue [Black] Auto Switch Dimensions D-F9NW, D-F9PW, D-F9BW D-F9PW(V) DC (+) Brown [Red] Main switch circuit Main switch circuit OUT Black [White] DC () Blue [Black] D-F9BW

CV/MVGQ

Made to Order Specifications (For details, refer to page 10-21-1.)

CXS

7, !8, and !9 from the chart above CXSM32-PS CXSL15APS CXSL20APS CXSL25APS CXSL32APS 8-28-21 21 Series CXSJ Construction: Axial Piping CXSJ6P, CXSJ10P e q t w r u y i o Component Parts No.

CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5