IC

VE 4 point preset output pressure Applicable in the programming function with up to 20 steps. 10 bit parallel input signal (maximum) Pressure can be set with 2 10 = 1024 steps. VY1 G Step 1 Step 2 Step 3 Step 4 . . . . . . . . . . . . .

Digital pressure switch for energy-saving control ejector

(such as static electricity. (2) Check if the power supply voltage System error is in the range 24 VDC 10%. (Er0, 4, 6, 7, 8 or 9) is displayed. (2) Supply power in the range 24 VDC 10%. HHH is 6 displayed. (1) Reset applied pressure (1) Check that the pressure is not to a level within the set pressure range.

High Vacuum L Type Valve

Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

Digital Flow Switch (Manifold type)

Indicator light Output 1 and 2: Orange Power supply Used as switch output device 12 to 24 VDC, including ripple (p-p) 10% voltage Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Current consumption 50 mA max.

CEx-OMQ0011

LCD 4.DIN 30mm 30mm 10 - 2-2 30mm No. 2-3 (1), (Err6), 1 ML2B25 15 ML2B32 19 ML2B40 24 2-4 5mm 5-10-15 5mm Err5 4.2 5 10 15 20 1.0 1.0 1.0 1.0 5.8 5mm30mm Err6: 20 30 100mm/sec :50cm :0.5MPa 11 - 3 3 3 3 ML2B+CEU2 NO 1 () () YES NO () YES NO YES YES NO YES NO YES YES NO NO NO YES A 12 - A 1.

High Vacuum L Type Valve

Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No. Bellows assembly (7) XL1A63-2-101 XL1A80-2-101 Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Note 1) Bellows assembly contains the valve seal 1. It does not contain the valve seal 2.

Activated Carbon Filter

AMX-OMZ0095 PRODUCT NAME Activated Carbon Filter MODEL / Series / Product Number AMK50-(F,N)06 ~ (F,N)10(B)(-R,Z)-D AMK60-(F,N)10(B)(-R,Z)-D Contents Page 1. Safety Instructions 2 to 6 2. Application 7 3. Standard specifications 7 4. How to Order 8 5. Construction / Options / Replacement parts 9 6. Bowl assembly specifications 10 6-1. Bowl assembly for AMK50 10 6-2.

Peltier-type Chiller Thermo-con/ Compact Type

temperature [C] 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] For the high-pressure pump (Option), the heating capacity increases by approx. 10 W.

Transfer

CE2 ML2B ML2B ML2B/W1 ML2B/W2 ML2B/W3 ML2B/W4 50 10 10 20 4 5 3 4 5 10 Load weight (kg) Load weight (kg) Load weight (kg) Load weight (kg) 10 3 5 4 3 2 2 5 2 1 1 1 0.5 0.4 0.3 0.5 0.4 0.3 ML2B40 ML2B40 ML2B32 ML2B32 1 ML2B40 ML2B40 ML2B32 ML2B32 ML2B40 ML2B40 ML2B32 ML2B32 ML2B25 ML2B25 ML2B40 ML2B40 ML2B32 ML2B32 ML2B25 ML2B25 0.2 0.2 0.5 ML2B25 ML2B25 ML2B25 ML2B25 0.1 0.1 100 200 300 400

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

Coolant Valve

SGC SGH Large valve capacity VNC VNC Av factor 30 x 10-6 to 1600 x 10-6 (VNC1 to VNC7) Cv factor 49 to 100 (VNC8 to VNC9) VNH VND VCC TQ 617 Coolant Valve: Air Operated/External Pilot Solenoid VNC Series [Option] Note) CE-compliant: For D or DZ only How to Order Thread type Seal material Bracket (Valve size: 1/2/3/4) A B Rc G NPT NPTF Nil F N T NBR seals FKM seals None With bracket (VN-16

PFxx-OMP0001CN

No.PF-OMP0001CN-F // PFMB7501 PFMB7102 PFMB7202 2 10 11 12 14 14 16 17 [] 21 OU1OUT2 {3 ] 22 22 [] 24 25 F0 26 F1 OUT1 28 F2 OUT2 36 F3 41 F10 42 F13 43 F20 44 F22 45 F30 46 F31 47 F80 OFF 48 F81 49 F90 50 F98 52 F99 53 54 58 59 61 62 62 65 67 -1No.PF-OMP0001CN-F (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

PSxx-OMM0002CN

DC12~24V10% DC12~24V10% DC(+) DC(-) 9 / / 10 () 11 /5 m / 12 10~15 10 "-M" (kPaMPa) ( ) "-M" 13 SI kPa,MPa -47No.PS-OMM0002CN-F No. 14 15 16 () 17 () ( ) () / -48No.PS-OMM0002CN-F 80mA 10 1 1dight 1 -49No.PS-OMM0002CN-F ISE80() ISE80H() ZSE80() ZSE80F() -0.11MPa -0.12MPa 0-101kPa -100100kPa -0.1051.1MPa -0.1052.2MPa 10-111kPa -110110kPa 2 MPa 4 MPa 500 kPa 0.001 MPa

LECA6_C

(P.48) 5() ()() () 6 10 - 3. 3.1.

High Vacuum L Type Valve

AS568-030-XN1 Note2) Refer to Chapter 4, Construction and Dimensions" (P. 10) for the part indication numbers.

ZQ-OM01601

DC24V10% DC24V 10% DC(+) DC(-) 8 / / 9 ( ) 10 , 5 m / / 11 1015 10 "-M" (kPaMPa) ( ) "M" 12 SI kPa,MPa 48 - No. 13 14 () 15 () / ( ) () 49 - 80mA 3.5 F.S.1 1F.S. 50 - 100.0-100.0 kPa 105.0-105.0 kPa 500 kPa 0.1 kPa DC24 V 10(p-p)10() 40 mA NPN PNP OUT1OUT2 80 mA DC26.4 V 2 V (80 mA ) 2.5 ms (20,100,500,1000,2000 ms ) 0.2F.S.1 digit 1 0 3 1/2 7 LED () 2% F.S

Rotary One-touch Fittings Series KS/KX

(inch) Thread UNF NPT UNF, M5, M6 10-32 UNF, M5, M6 Weight (g) H (Hex.)

2/3 Port Valve

12 55 63 74 1 4 1 2 1 1 2 VND50D-32A VND60D-40A VND70D-50A Flange/32F, 40F, 50F Port size VX VN VQ Model Pilot port Rc(PT) Applicable flange A B C D E F G H J 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36 42 54 12 12 14 VND50D-32F VND60D-40F VND70D-50F 4.2-41 VND Precautions Be sure to read before handling.

LEC-T1_C

115 - 5 () 116 - 9.3 50mm 9.4 ( ) 117 - 9.5 9.6 D 100 9.7 118 - 10.

CU

Tightening torque Bore sizes (mm) Hexagon socket head cap screw (mm) Proper tightening torque (Nm) Piston rod lateral load (Graph 2) 20, 25 32 M5 M6 5.10 10% 8.04 10% 5.00 4.50 4.00 Selection Caution 3.50 Lateral load (N) 3.00 32 2.50 1. Operate the cylinder to the stroke end.