Monitor data 1 lower 16 bit (RWrn) : Lower 16 bits of data demanded by Monitor 1 (RWwn) Monitor data 1 upper 16 bit (RWrn+1) : Upper 16 bits of data demanded by Monitor 1 (RWwn) Monitor data 2 lower 16 bit (RWrn+5) : Lower 16 bits of data demanded by Monitor 2 (RWwn+1) Monitor data 2 upper 16 bit (RWrn+6) : Upper 16 bits of data demanded by Monitor 2 (RWwn+1) A sign is set if data does not
Flow Rate and Sonic Conductance AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Metric size 3.2, 4, 6 10, 12 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 Tubing O.D. 1/8", 5/32" 1/8", 3/16", 1/4", 1/4", 5/16", 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Flow rate (L/min (ANR)) 180 230 100 260 390 660 790 460 920 1580 1710 Controlled
B C d H D E F MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M NTJ-015A NT-015A NT-02 NT-03 NT-04 20.5 M5 x 0.8 8 9.2 6 15.5 5 9.2 4 10 10 8 22.5 M6 x 1.0 8 9.2 8 16.5 6 11.5 5 16 16 10 24.5 M8 x 1.25 8 9.2 10 18.5 6 15 5 20 20 13 33.5 M10 x 1.25 10 11.5 12 22.5 11 19.6 6 25 25 17 40.5 M14 x 1.5 14 16 16 28.5 12 25.4 8 28 28 22 Applicable bore size (mm) Part no.
11.5 12 22.5 11 25 19.6 M10 x 1.25 6 33.5 17 28 14 16 16 28.5 12 28 25.4 M14 x 1.5 8 40.5 22 Applicable bore (mm) Part no.
33.5 48 8 5 M LY 16 22 3.2 48 42 62 9.2 5.8 LH MQQ M 20 22.5 3.2 52 46 66 10.7 5.8 Y Y X X LG 4-LD LT 25 26 3.2 57 57 71 11.2 5.8 RHC LS + Stroke LX LZ 28 32.5 3.2 64 64 78 11.2 7 A + Stroke MK(2) RS Q G Rod side flange style: MQQTF 10, 16, 20 RS H A RZQ Bore size (mm) Stroke range (mm) A B FD FT FV FX FV MI W S 10 10 to 40 49.5 31.5 4.5 5.5 30 45 FX FT L B + Stroke 16 10 to 60 54 34 6.6
M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.
For details, refer to page 10-20-41. 10-16-20
Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 Universal type 3.2 6 8 10 12 3.2 6 10 4 6 8 JIS Symbol 4 4 8 10 12 Metric size 6 10 Tubing O.D. 1/8" 5/32" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 5/16" 3/16" 1/4" 1/8" 5/32" Inch size 3/8" 5/16" 3/16" 1/4" Flow Direction Symbols on Body Meter-out type Meter-in
16 16 16 17 17 17 17 21 21 21 21 21 21.8 21.8 21.8 22 22 22 25 17 16 16 16 21 17 17 17 17 17 21 21 21 16.8 20.4 20.4 2 22 22 25 1.6 1.6 1.6 1.6 3.5 3.5 3.5 3.5 3.5 3.5 5.4 5.4 5.4 4.6 7.0 7.0 8.5 8.5 8.5 9.8 23 15 16 23 40 16 23 37 40 53 36 44 68 76 64 76 43 51 76 126 100/400 100/400 100/400 100/400 100/200 100/400 100/400 100/400 100/200 100/200 100/200 100/200 100/100 100/100 100/100 100
M2 M3 m1 m2 m3 16 25 40 16 25 40 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 100 120 100 38 35 35 MY2HT 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load. Refer to each graph regarding the maximum allowable moment and maximum allowable load for a particular piston speed.
40 10 to 50,75,100 70.2 50 12 9 5 39 Bore size (mm) LS LT LX LY LZ X Y M LY 10 19.5 2 38 33.5 48 8 5 LH 16 22 3.2 48 42 62 9.2 5.8 X X LG Y Y 4-LD LT 20 22.5 3.2 52 46 66 10.7 5.8 LS + Stroke LX LZ 25 26 3.2 57 57 71 11.2 5.8 A + Stroke 30 32.5 3.2 64 64 78 11.2 7 40 27 3.2 79 78 95 14.7 8 Front flange type: MQQTF 10, 16, 20 (mm) Bore size (mm) Stroke range (mm) A B FD FT FV FX FV 10 10
4 9 13 75 MHY Double acting Single acting External grip: 31 Internal grip : 36 External grip: 46 Internal grip : 56 External grip: 80 Internal grip : 86 MHK2-16D 16 6 14.6 20.6 113 MHW MHK2-20D 20 10 16 26 235 MRHQ MHK2-25D 25 14 19 33 440 Misc.
4 9 13 75 MHY Double acting Single acting External grip: 31 Internal grip : 36 External grip: 46 Internal grip : 56 External grip: 80 Internal grip : 86 MHK2-16D 16 6 14.6 20.6 113 MHW MHK2-20D 20 10 16 26 235 MRHQ MHK2-25D 25 14 19 33 440 Misc.
) 4 9 13 2.6 O.D. holding:7.0 (31) I.D. holding :8.1 (36) MHK2-16D 16 6 14.6 20.6 4.0 Double acting O.D. holding:10.3 (46) I.D.holding :12.6 (56) MHK2-20D 20 10 16 26 8.3 O.D. holding:18.0 (80) I.D. holding :19.3 (86) MHK2-25D 25 14 19 33 15.5 MHK2-12S 120 12 2.0 (9) 4 9 13 2.7 Normally open Normally closed MHK2-16S 16 5.2 (23) 6 14.6 20.6 4.0 MHK2-20S 20 7.6 (34) 10 16 26 8.4 L1 MHK2-25S
The total number of solenoids (points) must not exceed 24. 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 (For 26P) (For 20P) 2-2-46 Base Mounted Series VQC Plug-in Unit VV5QC41 3(R) port 2-Rc 3/4 Flat ribbon cable connector assembly (26P) 1(P) port 2-Rc 1/2 AXT100-FC26-3: 5 m AXT100-FC26-2: 3 m AXT100-FC26-1: 1.5 m VQC SMC SMC SMC SMC
External temperature sensor 13 ue own Blue 3B 8 14 ue 15 (CN7) Blue 5 7 ue 16 6 Blue 8 Brown 3 4 1 9 Brown Blue Serial communication 9 10 Blue Blue Blue 7 12 2 Blue 9 Blue 11 3 10 11 12 Blue Blue Blue External communication section for customer connection Brown 15 1 Blue 8 Blue 16 9 17 2 Brown Blue 18 10 (CN1) 1/2 Red Brown 19 3 1A White Blue 20 11 2A outlet White Blue 21 4 3A 22 12 Blue
(DIN ) 1) 2) 3) 25 No.SFOD-OMT0009CN-B 4.2 (1) (9) (2) (10) (3) (4) (15) (16) (7) (11) (5) (12) (17) (8) (18) (19) (6) (20) (13) (14) 1 PWR LED() ON OFF 2 RUN LED I/O USB 3 USB USB LED USB USB 4 ALM LED 5 USB USB 6 C PWR 2 (+)(-) 7 I/O 1 I/O 40 I/O PLC 8 I/O 2 I/O 40 I/O PLC 9 ENC1 (16 ) 1 10 MOT1 (6 ) 11 ENC2 (16 ) 2 12 MOT2 (6 ) ) (+)1 (+) 1 (+)2 (+)2 (+) 13 CI 1 2 )
(D) 2n x 1/4 Applicable cable O.D. 6 to 12 L Dimension n: Stations Stations Formula L1 = 46 x n + 29 L2 = 46 x n + 14 2 121 106 3 167 152 4 213 198 5 259 244 6 305 290 7 351 336 8 397 382 9 443 428 10 489 474 L L1 L2 Precautions Be sure to read this before handling the products.
stations 16 stations 8 16 Note 1) Separately order the 20P type cable assembly for the P kit.
-12-12-12 ZH20DS-12-16-16 ZH20DL-12-16-16 12 12 16 16 15.8 35.5 50 17 10 15.8 35.5 50 10 17.2 38.5 54.3 12 17.2 38.5 54.3 12 12 12 16 16 17 21.7 21.7 One-touch and screw-in connection Applicable tubing diameter N Applicable tubing diameter E S type: White color L type: Black color (Mounting hole) B C D E F G H Model A ZH18DS-12-03-12 ZH18DL-12-03-12 ZH20DS-12-04-16 ZH20DL-12-04-16 12 12 12