Magnetically Coupled Rodless Cylinder (Slider Type: Slide Bearing)

Allowable load mass on guides and moment 17/28 18/28 19/28 20/28 21/28 22/28 5.

180

Description Material No. 1 Description Material Note 11 Bumper Body Urethane rubber Aluminum alloy Hard anodized High carbon chrome bearing steel 10: Stainless steel 16 to 25: Aluminum alloy 12 Needle roller 2 Piston 16 to 25: Chromated 13 14 15 16 17 18 19 20 3 4 5 6 7 8 9 10 Joint roller Joint Nitriding Stainless steel Carbon steel Heat treated Rubber magnet Finger Stainless steel Synthetic

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

29.5 8 15.2 60 R 3/8 19 14 46.5 51.5 52.8 57.8 20.9 23 AS321FE-03-10SK 21 43.3 31.9 10 18.5 62 AS321FE-03-12SK 22 44.3 32.8 12 20.9 64 AS421FE-04-10SK 21 47.9 33.6 10 18.5 103 R 1/2 24 17 51.5 56.5 59.7 64.7 25.4 28.6 AS421FE-04-12SK 22 48.9 34.6 12 20.9 105 Reference dimensions of R thread after installation.

ML1

How to Adjust Air cushion stroke (mm) Bore size Cushion stroke 25 15 32 19 40 24 Air cushion absorbing capacity Remove the dust proof cover, loosen the four fixing bolts to move the unit body. Tighten four fixing bolts to fix the unit body with equal tightening torque.

Hand Valve Series VH 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 94 VR VH 144(191) 144(191) 97(145) 97(145) VHS 8 (10) 8 (10) 125(136) 123(134) M8 x 1.25 M8 x 1.25 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19 2 4-Rc 1/4, 3/8, 1/2 4-Rc 3/4 VH42-06 (Bottom ported) VH42-02 to 04 (Bottom ported) 2 (A) 2 (A) 46 54

FILTER REGULATOR

HOW TO ORDER" (P8). 19 8REPLACEMENT PROCEDURE WARNING Before replacement, ensure that the regulator is not pressurized. Rotate the pressure adjusting handle to zero. Replace refering to 9DISASSEMBLY DRAWING P24 to P28. After replacement, ensure that specified function is satisfied and external leakage is not found before starting operation.

Air Filter

Assembly of Optional Parts 19 8. Operation and Adjustment 20-21 9. Trouble Shooting 22 10. How to Replace the Components 23-28 10-1. Bowl Assembly Replacement 23-25 10-2. Element Replacement 26-28 11. Disassembly Drawing 29 12. Dimensions 30 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

IR1000/2000/3000

Note 2) Replacement part numbers correspond to the item numbers in the figures. 14-5-18 18 Precision Regulator Series IR1000/2000/3000 Dimensions IRV1000-01 IRV2000-02 53 55 16.5 2.3 30 22 2.3 41 (R) F.R.L.

PF2D

pulse output Accumulated pulse output Output 2 Switch output Switch output Shipment 16-11-37 2 Digital Flow Switch For Deionized Water and Chemicals Series PF2D How to Order PF2D5 13 20 1 Remote type Sensor unit Output specifications Flow rate range Output for display unit Note 1) + analog output (1 to 5 V) Output for display unit Note 1) + analog output (4 to 20 mA) 3/8 1/2 3/4 1 2 11 13 19

Hand Valve Series VH

88.5 23 3 (R) 1 (P) 3 (R) 12 12 27 4-Rc1/4 13.5 4-Rc1/4, 3/8 VH32l-02 to 03 (Bottom piping) 2 (A) 44 3 (R) 1 (P) 4-Rc1/4, 3/8 4 (B) 3.6-9 Hand Valve Series VH Body Mounted/Dimensions VH40l-02 to 04 VH40l-06 4 (B) 2 (A) 4 (B) 2 (A) 25 25 1 (P) 3 (R) SlA 1 (P) 3 (R) l102 102 88 89 VlA SlA 4-6.6 4-6.6 VlA 81 88 94 VM/VR 144 144 97 97 VH 125 123 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19

NAMUR

Note) For other voltages, please contact SMC. 3-12-1 A Series VFN2000N Dimensions (mm) VFN2120N--02 148 19 23 Applicable heavy-duty cord O.D.6 to 8 Pg9 37 24 66.5 57 32 40 14 Pilot EXH. 2-5.5 Mounting hole 3-1/4 3 4 5 1 Manual override (Non-locking) 23 23 VFN2220N--02 224.5 19 23 Applicable heavy-duty cord O.D.6 to 8 Pg9 24 66.5 57 32 40 14 Pilot EXH. 2-5.5 Mounting hole 189 3-1/4 3 4 5 1

Thermo-chiller

Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series How to Order HRL A 20 100 Power supply Cooling capacity CH1 CH2 100 9 kW 1 kW 200 19 kW 1 kW 300 26 kW 1 kW 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Cooling method A Air-cooled refrigeration Specications

Hand Valve Series VH

4, 3/8 4 (B) 5-8-10 Hand Valve Series VH Dimensions: Body Mounted VH40-02 to 04 VH40-06 ( ): Long handle type ( ): Long handle type 4 (B) 2 (A) 4 (B) 2 (A) 25 (32) 25 (32) 1 (P) 3 (R) 1 (P) 3 (R) SA 102 88 102 89 VA SA 4-6.6 VA 4-6.6 VM 81 88 94 VR VH 144(191) 144(191) 97(145) 97(145) VHS 8 (10) 8 (10) 125(136) 123(134) M8 x 1.25 M8 x 1.25 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19

SFOD-OMT0011CN

No.SFOD-OMT0011CN-A (4 ) // JXC-W1 (JXC3 Series) 1. . 3 2. . 5 2.1 . 5 2.2 . 5 2.3 . 5 3. . 6 3.1 . 6 (1) . 6 (2) . 6 3.2 . 6 (1) . 6 (2) . 6 (3) . 8 4. . 9 4.1 . 9 (1) . 9 (2) . 16 (3) . 19 (4) . 22 (5) . 23 (6) . 24 (7) . 26 4.2 . 28 (1) . 28 (2) . 31 (3) . 32 4.3 . 33 (1) . 33 (2) . 35 4.4 . 36 4.5 . 36 4.6 . 39 (1) . 39 (2) JOG . 40 (3) 1 . 40 4.7 . 42

SI Unit for Vacuum Manifold

Parameter 19 4.1. Module parameters for Vacuum / Release module 19 5. Process data 23 5.1. Process data on Vacuum / Release module 23 5.2. Process data of Pressure value / Channel status module 27 5.3. Process data of Unit status module 28 6. RecordData 29 6.1. User specific RecordData 29 7. LED Indication and Alarm 30 7.1. LED Indication 30 7.2. Alarm 32 8. Specification 33 8.1.

Line filter

Assembly of Optional parts 19 8. Operation and Adjustment 20 to 21 9. Troubleshooting 22 10. Replacement work procedure 23 to 29 1) Element assembly (AFF20) 23 to 24 2) Bowl assembly (AFF20) 25 1) Element assembly (AFF30/AFF40) 26 to 27 2) Bowl assembly (AFF30/AFF40) 28 to 29 11. Exploded Drawing 30 12.

Mist Separator

Assembly of Optional parts 19 8. Operation and Adjustment 20 to 21 9. Troubleshooting 22 10. Replacement work procedure 23 to 29 1) Element assembly (AM20) 23 to 24 2) Bowl assembly (AM20) 25 1) Element assembly (AM30/AM40) 26 to 27 2) Bowl assembly (AM30/AM40) 28 to 29 11. Exploded Drawing 30 12.

Micro Mist Separator

Assembly of Optional parts 19 8. Operation and Adjustment 20 to 21 9. Troubleshooting 22 10. Replacement work procedure 23 to 29 1) Element assembly (AMD20) 23 to 24 2) Bowl assembly (AMD20) 25 1) Element assembly (AMD30/AM40) 26 to 27 2) Bowl assembly (AMD30/AM40) 28 to 29 11. Exploded Drawing 30 12.

Activated Carbon Filter

P A B C D E G J M N Q R S T U V AMK20 1/81/4 40 133.9 17.5 21 25 21 30 27 22 5.4 8.4 60 2.3 28 AMK30 1/43/8 53 167 21.5 26.5 30 35 26.5 41 35 25 6.5 13 71 2.3 32 AMK40 1/43/81/2 70 212.5 25.5 35.5 38.4 40 35.5 50 52 30 8.5 12.5 88 2.3 39 semi-standard bowl Semi-standard specifications Model Metal bowl No.

Micro Mist Separator

Bracket B Model Tool Tightening torque AFD20-D Phillips AFD30-D screwdriver 0.75+/-0.2 N m AFD40-D Set screw (2 pcs.) -19- 8. Operation and Adjustment 8-1. Discharge from the product with drain cock Pressurize the inside of the micro mist separator when discharging drain. Drain will not be discharged properly if not pressurized.