No.PF-OMO0005-F PRODUCT NAME Digital Flow Switch MODEL / Series / Product Number PFMB7201 Contents Safety Instructions 2 Model Indication and How to Order 10 Summary of Product parts 13 Definition and terminology 14 Mounting and Installation 16 Installation 16 Piping 19 Wiring 21 Outline of Settings [Measurement mode] 25 Flow Setting (set value only) of OUT1 OUT2 [3 step setting mode] 26
OUT1 [CoL][] ON OFF ON OFF [F 1] OUT1 -38No.PF-OMO0004CN-E [F 2] OUT2 OUT2 (31 )(32 ) OUT2()[---] <>OUT2 [F 2] [F 2][oU2] [oU2][] [2ot][] 40 41 42 43 -39No.PF-OMO0004CN-E a.
No.PF-OMH0003-F PRODUCT NAME 4-channel Flow Monitor (Remote type monitor unit) MODEL / Series / Product Number PF2A20# PF2W20# PF2D20# Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 12 Definition and terminology 13 Mounting and Installation 15 Installation 15 Wiring 16 Outline of setting 19 List of outputs 20 Initialize mode 21 Default
Air Supply Piping Precaution Warning (1)Type of fluids (1) For the handling of one-touch fittings, refer to the Precautions for fittings and tubing (P38 to 41). Please contact SMC when using the product in applications other than (2) Preparation before piping with compressed air.
(Refer to page 19) 4. Forced input and output The input and output signal of the unit is forcibly operated with the Handheld Terminal. (Refer to page 20) -15No.EX-OML0011-C 1.
Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .
(It is set to RESET state when shipped.) ( ) ( ) 19 - Doc. no.
Tighten the hexagon socket head cap screws evenly. 19 - 8. Proximity switch 8-1. Proximity switch specifications / Maker: OMRON Co. Ltd.
Bracket B Model Tool Tightening torque AFM20-D Phillips AFM30-D screwdriver 0.75+/-0.2 N m AFM40-D Set screw (2 pcs.) -19- 8. Operation and Adjustment 8-1. Discharge from the product with drain cock Pressurize the inside of the mist separator when discharging drain. Drain will not be discharged properly if not pressurized.
Allowable load mass on guides and moment 17/28 18/28 19/28 20/28 21/28 22/28 5.
29.5 8 15.2 60 R 3/8 19 14 46.5 51.5 52.8 57.8 20.9 23 AS321FE-03-10SK 21 43.3 31.9 10 18.5 62 AS321FE-03-12SK 22 44.3 32.8 12 20.9 64 AS421FE-04-10SK 21 47.9 33.6 10 18.5 103 R 1/2 24 17 51.5 56.5 59.7 64.7 25.4 28.6 AS421FE-04-12SK 22 48.9 34.6 12 20.9 105 Reference dimensions of R thread after installation.
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 94 VR VH 144(191) 144(191) 97(145) 97(145) VHS 8 (10) 8 (10) 125(136) 123(134) M8 x 1.25 M8 x 1.25 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19 2 4-Rc 1/4, 3/8, 1/2 4-Rc 3/4 VH42-06 (Bottom ported) VH42-02 to 04 (Bottom ported) 2 (A) 2 (A) 46 54
Assembly of Optional Parts 19 8. Operation and Adjustment 20-21 9. Trouble Shooting 22 10. How to Replace the Components 23-28 10-1. Bowl Assembly Replacement 23-25 10-2. Element Replacement 26-28 11. Disassembly Drawing 29 12. Dimensions 30 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.
pulse output Accumulated pulse output Output 2 Switch output Switch output Shipment 16-11-37 2 Digital Flow Switch For Deionized Water and Chemicals Series PF2D How to Order PF2D5 13 20 1 Remote type Sensor unit Output specifications Flow rate range Output for display unit Note 1) + analog output (1 to 5 V) Output for display unit Note 1) + analog output (4 to 20 mA) 3/8 1/2 3/4 1 2 11 13 19
88.5 23 3 (R) 1 (P) 3 (R) 12 12 27 4-Rc1/4 13.5 4-Rc1/4, 3/8 VH32l-02 to 03 (Bottom piping) 2 (A) 44 3 (R) 1 (P) 4-Rc1/4, 3/8 4 (B) 3.6-9 Hand Valve Series VH Body Mounted/Dimensions VH40l-02 to 04 VH40l-06 4 (B) 2 (A) 4 (B) 2 (A) 25 25 1 (P) 3 (R) SlA 1 (P) 3 (R) l102 102 88 89 VlA SlA 4-6.6 4-6.6 VlA 81 88 94 VM/VR 144 144 97 97 VH 125 123 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19
Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series How to Order HRL A 20 100 Power supply Cooling capacity CH1 CH2 100 9 kW 1 kW 200 19 kW 1 kW 300 26 kW 1 kW 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Cooling method A Air-cooled refrigeration Specications
4, 3/8 4 (B) 5-8-10 Hand Valve Series VH Dimensions: Body Mounted VH40-02 to 04 VH40-06 ( ): Long handle type ( ): Long handle type 4 (B) 2 (A) 4 (B) 2 (A) 25 (32) 25 (32) 1 (P) 3 (R) 1 (P) 3 (R) SA 102 88 102 89 VA SA 4-6.6 VA 4-6.6 VM 81 88 94 VR VH 144(191) 144(191) 97(145) 97(145) VHS 8 (10) 8 (10) 125(136) 123(134) M8 x 1.25 M8 x 1.25 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19
No.SFOD-OMT0011CN-A (4 ) // JXC-W1 (JXC3 Series) 1. . 3 2. . 5 2.1 . 5 2.2 . 5 2.3 . 5 3. . 6 3.1 . 6 (1) . 6 (2) . 6 3.2 . 6 (1) . 6 (2) . 6 (3) . 8 4. . 9 4.1 . 9 (1) . 9 (2) . 16 (3) . 19 (4) . 22 (5) . 23 (6) . 24 (7) . 26 4.2 . 28 (1) . 28 (2) . 31 (3) . 32 4.3 . 33 (1) . 33 (2) . 35 4.4 . 36 4.5 . 36 4.6 . 39 (1) . 39 (2) JOG . 40 (3) 1 . 40 4.7 . 42
Parameter 19 4.1. Module parameters for Vacuum / Release module 19 5. Process data 23 5.1. Process data on Vacuum / Release module 23 5.2. Process data of Pressure value / Channel status module 27 5.3. Process data of Unit status module 28 6. RecordData 29 6.1. User specific RecordData 29 7. LED Indication and Alarm 30 7.1. LED Indication 30 7.2. Alarm 32 8. Specification 33 8.1.
Assembly of Optional parts 19 8. Operation and Adjustment 20 to 21 9. Troubleshooting 22 10. Replacement work procedure 23 to 29 1) Element assembly (AFF20) 23 to 24 2) Bowl assembly (AFF20) 25 1) Element assembly (AFF30/AFF40) 26 to 27 2) Bowl assembly (AFF30/AFF40) 28 to 29 11. Exploded Drawing 30 12.