SY

(S = 0.25) AN120-M5 (Cv = 0.27) AS3001F-06 (S = 0.36) AN110-01 (Cv = 1.94) 6 x 1m 6 x 1m 8 x 1m AS3001F-08 (Cv = 0.56) 8 x 1m AS3001F-08 (Cv = 0.56) AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36) AN101-01 (Cv = 1.11) AN110-01 (Cv = 1.94) 10 x 1m AS4001F-10 (Cv = 0.89) 10 x 1m AS3001F-08 (Cv = 0.56) 12 x 1m AS4001F-10 (Cv = 1.17) 6 x 1m 6 x 1m AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36)

HEC-OM-S008

35 30 30 03 3F 38 0D Answer 25.0 deg.C. 31 Temperature setting (without writing FRAM) No 02 31 32 35 30 30 03 3F 38 0D 06 0D Set at 25.0 deg.C 32 Reading internal sensor No 05 32 33 32 0D 02 32 32 35 30 32 03 3F 3B 0D Answer 25.02 deg.C 33 Reading external sensor No 05 33 33 33 0D 02 33 33 30 30 32 03 3F 38 0D Answer 30.02 deg.C 34 Reading alarm status No 05 34 33 34 0D 02 34 30 38 30 03

KQ2

P. 71 63 Series KQ2 Male Connector: KQ2H Note) 01-32 KQ2H03-32 07-32 H Connection thread UNF NPT 01-32 KQ2H03-32 07-32 Applicable tubing O.D.

Speed Controller with One-touch Fitting

ASD Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS AS-FE 2 F A 1 AS 1 M5 06 0 E Body size 1 KE AS-FG F A 1 AS 2 01 06 2 0 S Body size 2/3/4 AS-FP AS-FM Body size Made to Order Refer to page 562 for details.

VFS

03 04 06 q Description No.

Modular F.R.L. Unit

, AWD30 30 30 32 AC40 AF40, AR40, AW40 AL40, AFM40, AFD40 AWM40, AWD40 36 36 32 AC40-06, AF40-06, AR40-06, AW40-06 AL40-06, AFM40-06, AFD40-06 E500-06 44 40 32 3/4 E600-06 E600-10 3/4 1 AC50, AC55, AC60, AC50B, AC55B, AC60B AF50, AR50, AL50, AF60, AR60, AL60 53 48 35 Notes) in model numbers indicates a thread type.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

8 12.7 12.7 7 9.6 17.5 9.3 10.8 28.7 28.6 25.8 25 22.2 17.5 28.7 AS131F-M5-04 AS131F-M5-03 5/32" M5 x 0.8 M5 x 0.8 8 20.3 9.3 20.3 28.6 25.8 25 22.2 7 4 9.6 9.3 10.8 9.3 AS131F-U10/32-04 AS131F-U10/32-03 5/32" 10-32UNF 10-32UNF AS131F-M5-06 AS131F-M5-05 3/16" M5 x 0.8 M5 x 0.8 13.5 11.4 21.3 23.3 34.5 16.5 20.6 21.4 31.8 11.6 6 AS131F-U10/32-06 AS131F-U10/32-05 3/16" 10-32UNF 10-32UNF 8 9.6

Vacuum Unit

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25

SX

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

Compact Manifold Regulator

IN/OUT Piping Position IRV Metric size Inch size Position IN side OUT side VEX IN side Straight 4 6 OUT side IN side Straight OUT side Mounting position Mounting position Bottom Top Bottom Top Symbol Elbow Straight Elbow 4 6 Elbow Straight Elbow Fitting type Symbol Fitting type Symbol 1 2 3 4 4 6 4 6 5/32 1/4 5/32 1/4 5/32 1/4 5/32 1/4 SRH 06 07 08 18 19 20 25 26 27 32 33 34 56 57 58 68 69

Dual Speed Controller with One-touch Fitting Series ASD

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 1.5

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

CC-Link Protocol Applicable system Volume 1(Edition 3.5) Volume 3(Edition 1.5) DP-V0 Ver.1.10 Version Note 1) GSD file EDS file Configuration file Note 3) SMJ1: 32/32 SMJ3: 32/32 (1 station, remote I/O stations) SMJ2: 32/32 SMJ4: 32/32 (1 station, remote I/O stations) I/O occupation area (Inputs/Outputs) SPR1: 0/32 SPR3: 0/16 SPR2: 0/32 SPR4: 0/16 SPR5: 0/32 SPR7: 0/16 SPR6: 0/32 SPR8:

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

ARM10/11

58 68 69 70 75 76 77 82 83 84 06 07 08 18 19 20 25 26 27 32 33 34 3.

ARM10/11

58 68 69 70 75 76 77 82 83 84 06 07 08 18 19 20 25 26 27 32 33 34 3.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Note) Metric size Inch size With One-touch fitting 01 03 05 07 09 11 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 6 8 10 For low speed control Note) For applicable tubing O.D. selection, refer to the Model on page 727. Thread type Port size M5 U10/32 01 02 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT M5 x 0.8 10-32 UNF 1/8 1/4 N Made to Order Lubricant: Vaseline X12 Ex.)

Series AS-FM/AS-M/ASD-FM

100 200 205 Inch size M5 standard 1/8 standard 1/4 standard 3.2 23 04 06 08 01 03 05 07 09 1/8" 5/32" 3/16" 1/4" 5/16" 4 6 8 Use a 1/8" tube.