VHS

Left IN1(P) Piping VHS500-06 VHS501-06 VHS400-04 VHS401-04 VHS400-03 VHS401-03 VHS400-02 VHS401-02 Right IN1(P) 3 4 1 2 3 8 1 4 Port size Effective area (mm2)(CV) Weight (kg) 93(5.22) 57(3.20) 35(1.97) 21(1.18) 105(5.90) 76(4.27) 54(3.03) 35(1.97) 0.29 1(P)2(A) 2(A)3(R) 0.34 0.25 0.27 Left or right to the front face of the handle.

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cF , 06, a8 010 0 10 012 rv,iIljme:tersi~e 06 08 08 01 /4" Tube out&ide . Inch' size I0 1/4" 03/8' 05/16" 05/16" diameter . . 03/S' 051160 1/2" Flbw."rate tlin\~ 330 750 350 C ,oP/rolled flow . (A,MR~~N '(lmjQ' . 180 600 1100 1190 [Ereo flaw) Effettive ~IOnal 11.6 17 2.9 5.2 18.4 5.4 9.3 'ttrea mm 2 .

PFxx-OMX0007

Bit offset Item Notes 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 8 Measurement diagnostics 0: Within range 1: Out of range (HHH) 14 Fixed output 0: Normal output 1: Fixed output (Setting of output check) 15 Error Diagnosis 0: Error not generated 1: Error generated 16 to 31 Flow measurement value With sign: 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Flow

PF-OMN0009_C

9No.PF-OMN0009CN-F * , *PVC PVC PVC () PVC PVC , -10No.PF-OMN0009CN-F PF3W5 48 () 3 A : 04 20 40 11 21 0.5~4 L/min 2~16 L/min 5~40 L/min 10~100 L/min 50~250 L/min 2 04 20 40 11 21 R 04 20 40 11 21 S 250L/min G L/min(gal/min) / : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] 1=9/5+32 L/min 100L/min250L/min Rc N NPT F G IS0228 1 N M8(3m) 04 20 40 11 21 03 3/8 04 1/2 06

VCL

Dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size B D E F H K L M N A C Model Note) Q V R Q R Q R S Q R S U 22 23 45 44 43 58 40.5 46.5 99 43 66 83 13.5 28 31 56.5 12.5 28 14 12.8 M4 4.5 64 1/8 VCL21 22 23 46 44 44 58 41.5 46.5 99 44 66 86 18 36 31 58.5 12.5 28 18 12.8 M4 6 67.5 1/4 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 99 22 40 36.5 11 15 32 20 19

DM

(d) 1.6 3 1.6 3 A B DM12-04N DM12-06N DM12-04NU DM12-06NU DM6-04N DM6-06N DM6-04NU DM6-06NU 5 31 6 31 15-2-102 Multi-connector Series DM Precautions Be sure to read before handling. Refer to pages 15-18-3 to 15-18-4 in the front matter for Safety Instructions and Common Precautions mentioned in this catalog, and refer to pages 15-1-10 to 15-1-11 for Precautions on every series.

AC Servo Motor Driver (SSCNET Type)

each actuator . 21 6.3.5 Forced stop input selection . 24 6.3.6 Absolute position detection system . 25 6.3.7 Verify of parameters . 26 6.3.8 Parameter initialization . 27 6.4 JOG Mode in the Setup Software .28 6.4.1 JOG Mode . 29 6.5 Changing Output Signal Allocation .30 6.5.1 Initial I/O Signal Allocation . 30 6.5.2 Signal Allocation using Setup Software . 30 6.5.3 Allocation Examples . 31

ZB-OM00301

No.ZB-OM00301 / ZB No.ZB-OM00301 2 9 12 13 15 16 16 V Assy 17 21 25 26 28 28 29 30 30 31 31 32 35 37 38 39 40 Assy 40 Assy 41 42 1 - No.ZB-OM00301 1) (ISO/IEC) (JIS) 2 *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems.

SL5200

MPa) Sub-atmospheric (A): 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) Code Range options 1) Specification Code Ports 2 ports 3 ports Standard (Cv: 0.07) Code Specification Standard Sub-atmospheric 2PW 3PW No code 01 No code A High flow (Cv: 0.15) HF 1) Only available with SL5201. 0.5 to 30 psig (0.0034 to 0.2 MPa) 1 to 60 psig (0.007 to 0.4 MPa) 1 to 100 psig (0.007 to 0.7 MPa) 02 06

Table of Contents

SV100 ANA1 -C08 T0604 SV200 ANA1 -C10 T0806 200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700

ZMA

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R L 10 8 5 4 ZZMA Stations 06 ZL 10 10 8 6 ZZMA Stations 06B ZY R L 10 8 5 4 ZZMA Stations 04 ZQ 10 10 8 6 ZZMA Stations 04B Effective area of external silencer is 160 mm2. ZF ZP ZCU How to Order Ejector Manifold AMJ ZZMA 06 06 R Misc.

VZ3000

(Example) VV5Z3-45FD-06-C6C1 pc. (Manifold base) VZ3143-5FZ2 pcs. (Valve) VZ3243-5FZ3 pcs. (Valve) VZ3000-69-1A 1 pc. (Blanking plate assembly) VQ7 EVS The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

5 Port Solenoid Valve Series SV

-01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions, make determinations after using the P/A

Hand Valve Series VH 1

VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust center) Rc 3/8: 49 Rc 1/2: 55 VH402-02 to 06 VH412-02 to 06 2 (Position) 1/4 to 3/4 2 1 1.28 VH4 Handle Operation Angle and Air Flow Direction VH420-02 to 06 VH430-02 to 06 3 (Closed center) (Refer to the figures of piping direction to the right.)

Hand Valve Series VH

VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust center) Rc 3/8: 49 Rc 1/2: 55 VH402-02 to 06 VH412-02 to 06 2 (Position) 1/4 to 3/4 2 1 1.28 VH4 Handle Operation Angle and Air Flow Direction VH420-02 to 06 VH430-02 to 06 3 (Closed center) (Refer to the figures of piping direction to the right.)

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

(Brackets for 6 stations) ZZFA1-06 1 pc.

S Couplers

Operating pressure at the outlet: 0.5 MPa Air consumption of one line at end: 1.2 m3/min (ANR) Air consumption time: 20% of annual operating time of 2500 hours Compressor efficiency: 0.7 Electric power cost: 15 yen/kWh Compressor capacity: 8 m3/kWh S coupler S coupler 0.5 MPa 1.2 m3/min (ANR) Features 1 Series KK130 Variations Plug (P) Socket (S) Male thread type Male thread type Model Port

VPA4

VVPA4 5 0 04 04 1 Thread type Nil Rc G NPT NPTF VP 5 port Air operated manifold F N T 5 Base size Rc A, B Port size Rc 3 4 6 1 VVPA450 Symbol 04 Port size VVPA460 1 2 3 4 Mixed 1 06 10 M (2) Piping Note 2) In the case of mixed specifications, indicate M and specify port location sparately on a manifold specification sheet.

For Water Digital Flow Switch Series PFW

View A PFW31(-M) PFW3-B DIN rail type 8-M3 3 x 7.2 (= 21.6) 36 2-3.4 6.4 15 1 2 3 4 6.5 26 FLOW SWITCH SMC 35.5 30 56 (4.5) 44 UNIT RESET SET 5 6 7 8 29 38 15.2 26

VK300

Combinations of Blanking Plate Assembly and Manifold Base Blanking plate assembly: VK300-42-1A M3 x 8 Round head combination screw Blanking plate Manifold gasket for blanking plate Caution Mounting Screw Tightening Torques M3: 0.6 Nm Applicable base: In common for all types of VV3K3 models 4-5-4 5 3 Port Direct Operated Poppet Solenoid Valve Rubber Seal Series VK300 Dimensions: Body Ported