Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM00201 Manifold ZZK2 04 A 1 L 00 00 (1) (2) (3) (4) (5) (6) Remains blank when no potion is selected. (1) Number of stations Note 1) Symbol Stations 01 1 station 02 2 stations 10 10 stations Note 1) In the case of an ejector, for an adequate performance, the number of stations when operated simultaneously depends on the nozzle diameter.

SI Unit for Vacuum Manifold

Table. 6-1 User specific RecordData Index Slot No. Sub Slot No. Access Size Content 0x0020 1 1 Write 1 byte Zero clear 0x0021 1 1 Write 1 byte Valve protection release Table. 6-2 Description of User specific RecordData Content Description Value 0: No zero clear request. 1: Zero clear request. 2: Zero clear reset request. Zero clear Adjust pressure value to 0 kPa at atmospheric pressure.

Soft Start-up Valve

1/4 1/4 1/4 66 47 24.5 40 33 Width across flats 22 30 AV2000-m02-5 to 6G(Z)m-A AV3000-m03-1 to 4G(Z)m-A 3/8 3/8 3/8 76 50 29.5 40 38 Width across flats 24 35 AV3000-m03-5 to 6G(Z)m-A AV4000-m04-1 to 4G(Z)m-A 1/2 1/2 1/2 98 56 39.5 52 49 Width across flats 30 33 AV4000-m04-5 to 6G(Z)m-A AV5000-m06, 10-1 to 4G(Z)m-A 3/4, 1 3/4, 1 3/4 128 59 53 74 53 Width across flats 36 52 AV5000-m06, 10-

Soft Start-up Valve

1/4 1/4 1/4 66 47 24.5 40 33 Width across flats 22 30 AV2000-m02-5 to 6G(Z)m-A AV3000-m03-1 to 4G(Z)m-A 3/8 3/8 3/8 76 50 29.5 40 38 Width across flats 24 35 AV3000-m03-5 to 6G(Z)m-A AV4000-m04-1 to 4G(Z)m-A 1/2 1/2 1/2 98 56 39.5 52 49 Width across flats 30 33 AV4000-m04-5 to 6G(Z)m-A AV5000-m06, 10-1 to 4G(Z)m-A 3/4, 1 3/4, 1 3/4 128 59 53 74 53 Width across flats 36 52 AV5000-m06, 10-

EXxx-OMK0006

Baud rate Table Baud rate SW1 SW2 SW3 SW4 1000 0 0 0 0 800 1 0 0 0 500 0 1 0 0 250 1 1 0 0 125 0 0 1 0 1 0 1 0 50 0 1 1 0 20 1 1 1 0 10 0 0 0 1 : CAN LED illuminates RED when an invalid combination is set with DIP switches SW1 to 4.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Load factor: ((Load weight x 9.8) /Theoretical force) x 100% Note) 2 position single, 4/2 5/3 (A/B R1/R2) Conditions Base mounted Series CJ2 Series CM2 Series MB/CA1 TO604 x 1 m Tube x Length SQ1000 Speed controller AS3001F-06 Silencer AN110-01 Tube x Length T0604 x 1 m T1075 x 1 m T1209 x 1 m Speed controller AS4001F-10 AS3001F-06 SQ2000 Silencer AN200-02 2-3-1 2 Series SQ1000/2000 Precautions

Process Pump Series PA3000/5000/PAX1000 Series PB1000

, 3/8 FLUID OUT Rc 1/4, 3/8 PROCESS PUMP AIR SUP 110 45 29 FLUID IN FLUID OUT AIR EXH 33 AIR EXH (pilot air exhaust port) Rc 1/4 75 5 120 32.5 45.5 Bottom 15 Process Pump Built-in Solenoid Valve Type/Air operated Type (External Switching Type) Series PB1000 How to Order 1 0 1 01 PB 1 Body size Option/Part no. 1 1/8 standard Nil Pump only With foot (bolts included) KT-PB1-3 B Body material

Process Pump Series PA3000/5000/PAX1000 Series PB1000

button 100 125 23 RESET (175) AIR SUP (pilot air supply port) 1/4 FLUID IN 1/4, 3/8 FLUID OUT 1/4, 3/8 PROCESS PUMP AIR SUP 110 45 29 FLUID IN FLUID OUT AIR EXH 33 AIR EXH (pilot air exhaust port) 1/4 75 5 120 32.5 45.5 Bottom 15 Series PB1000 Process Pump Built-in Solenoid Valve Type/Air operated Type (External Switching Type) How to Order 1 0 1 01 PB 1 Body size Option/Part no. 1 1/8

Digital Pressure Switch

Repeatability 1%F.S. 1 digit Hysteresis Hysteresis mode 0 to variable 1 Window comparator mode Output Voltage (rated pressure range) Voltage output 1 to 5 V 2.5%F.S. 2 Linearity 1.5%F.S. 1%F.S.

Multi-channel Digital Sensor Monitor

Screw shall be tightened 1/4 to 1/2 turns more after touched correctly.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Models suitable to satisfy the requirement of 100 (N) are CY332 or CY340. 300 100 200 50 100 20 30 40 50 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10111213 7 8 9 1 01 11 21 3 1 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Useable range 5 1 0 1 2 3 4 5 6 7 8 9 10111213 Distance

Digital Pressure Switch

pressure value (main display). (1) Press and hold the button between 1 and 3 seconds in measurement mode.

VQC

valve Note 1) 1 VQC1000 B D D VQD With DIN rail (Rail length: Standard) With DIN rail (Rail length: Special) Note 2) Manifold model Special wiring specifications Note 3) (Except double wiring) With name plate External pilot Note 4) K 1 Plug-in unit N R S Stations Direct exhaust with built-in silencer Note 5) 01 1 station When specifying more than one option, enter symbols in alphabetical

PSE200

CAT.ES100-41 A Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 1 A single controller monitors up to 4 pressure sensors. 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 1 A single controller monitors 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 Space saving 1 40mm MPa kPa OUT1 76% OUT2 CH 1 2 3 4 PRESSURE

PA300/500/700

M3 x 0.5 x 32 VP300-2-1P (Rc 1/8) VP300-2-2P (Rc 1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) VPA344 VP300-17-1 VP300-24-4 M4 x 0.7 x 41 VPA544 VP500-17-1 Series Thread type VP500-24-3 M5 x 0.8 x 50 3 5 7 P F N T VPA344 VPA544 VPA744 Rc G NPT NPTF VPA744 VP700-17-1 VP700-24-1 Caution Port size Tightening Torque for Mounting Screw VPA344 1/8 1/4 VPA544

Guide Cylinder Series MGG

Auto Switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-A9 D-M9 D-M9W 1 BMA2-020 2 BJ3-1 Note) 1 BMA2-025 2 BJ3-1 Note) 1 BMA2-032 2 BJ3-1 Note) 1 BMA2-040 2 BJ3-1 Note) 1 BMA2-050 2 BJ3-1 Note) 1 BMA2-063 2 BJ3-1 Note) D-C7/C80 D-C73C D-C80C D-H7/H7C D-H7W D-H7BAL D-H7NF BMA2-020 BMA2-025 BMA2-032 BMA2-040 BMA2-050 BMA2-063 D-B5/B64 D-B59W D-G5/K59 D-G5W/K59W D-G5BAL/G59F D-G5NTL

AWG

Port size Symbol 20 30 40 Mounting Angle of Pressure Gauge 01 02 03 04 1/8 G4 G3 G2 G1 Symbol 1/4 270 180 90 0 Mounting angle 3/8 1/2 MPa IN OUT IN OUT IN OUT IN OUT Mounting angle view MPa MPa MPa JIS Symbol P P P P K K K K C C C C U U U U O O O O S S S S H H H H L L L L to to to to AWG20K/30K/40K Possible to change to the optional mounting angles.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bracket Mounting Stroke Bore size (mm) Stroke range (mm) Bore size (mm) Bore size (mm) Bracket mounting stroke Z Y X W V P U Y T R S O R Q 20 20 20 250 to 400 157 80 30 40 48 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 82 88 12 14 26 12 M6 x 1 depth 9 21 100 st or more 25 25 25 350 to 500 175 80 37 46 57 100 88 13 14 31 12 M6 x 1 depth 13 21 125 st or more 32 32 32 350 to 600 201 82 37 52 65 114

PSE530/200

for 1 second or longer.

Digital Flow Switch (Remote type monitor unit)

Panel mount adapter (Part number: ZS-26-B) Front protective cover (Part number: ZS-26-01) 1: The panel mount adapter can be rotated through 90 degrees for mounting. 2: The panel mount adapter should be fixed firmly with screws. Otherwise, fluids such as water may enter. After contact with the panel, tighten screws by 1/4 to 1/2 turn.