Description Material Body A Elbow body Handle Body B Needle Needle guide Seat ring Lock nut U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Spacer Gasket Note PBT PBT PBT Brass(1) PBT PBT Brass(1) q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 q w e r t y u i o !0 !1 !2 !3 !4 !
6 !8 @2 !7 @0 !3 @1 q e r y C85 C85W C85-S/T C75-S/T C85K-S/T C75K-S/T C85K C75K C75R CP96 CP96K C96 C96K C96Y C55 C85R C75 C75W Auto Switch Made to Order Related Products o !0 80, 100 80, 100 !1 !0 u Component Parts Replacement Parts/Seal Kit (Single rod) Bore size [mm] Kit no. Contents 32 CS95-32 No.
Pressure gauge 6 Union tee fitting Flow meter O.D. 6 mm, I.D. 4 mm tube (Length 10 mm) Ionizer Fig. 1: Flow rate characteristics measuring circuit 446 Technical Data IZN10 Series Ozone Concentration (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 0.03 IZS IZN IZN IZF Ionizer ZVB 0.02 Concentration [ppm] Energy saving static neutralization nozzle/
/O.D. 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Applicable hose I.D.
4 o i q !3 e r !2 !1 u t w y CHK CHN CHM CHM CHS CH2 o !
10 8 14 12 16 34 20 18 24 22 26 30 28 32 36 40 38 Input/output connector (CS0) 3 1 5 9 7 13 11 15 19 17 23 21 33 25 29 27 31 35 39 37 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Power supply terminal block 108 109 110 111 112 113 114 115 100 101 102 103 104 105 106 107 2 6 4 8 10 12 14 16 18 20 Input/output connector (CS1) 1 5 3 7 11 9 15 13 17 19 Green Red F E D C B A 9 8 7 6 5 4 3 2 1 0 1 1 2
02 Symbol 0 2 3 5 6 P Applicable tubing O.D.
Incorrect internal data processing of the product (Er0, 4, 6, 8, 40) Check if there is a noise source nearby.
1 r #5 @3 @8 #6 y u t !5 #7 #8 @6 w !6 e &0 q &0 #4 #3 $8 $0 %9 ^0 #9 $6 $7 %9 !2 #1 !3 $9 %0 %1 !0 @2 @1 #2 ^2 ^5 $5 %2 @5 ^8 $4 ^1 @4 %4 %5 ^7 $3 #0 $2 %6 @7 ^4 o %7 ^9 ^6 @9 %8 ML2BS $1 %3 ^3 !
sides n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 100 + 100 (n 2) 100 + 100 (n 2) n = 4, 6, 8 Same side n = 2, 3, 4 10 1 pc. 90 75 80 35 75 Different sides 80 90 55 75 Same side 80 90 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 90 + 30 (n 2) Different sides D-A44 n = 2, 3, 4 n = 2, 4, 6, 8 n=2, 4, 6, 8 n = 2, 4, 6, 8 55 + 50 (n 2) 75 + 50 (n 2) 80 + 50 (n 2)
Cable color Signal Nil A A B B COM-A/COM COM-B/ Brown Red Orange Yellow Green Blue 2 1 6 5 3 4 S Standard cable Cable color Connector D terminal no. Shield Brown Black Red Black Orange Black 12 13 7 6 9 8 3 Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 Connector B terminal no.
Air Gripper Piping condition Recommended model Bore size (mm) Tube O.D. 2 mm IDK02-100 IDK02-200 Series Tube O.D. 4 mm IDK04-100 IDK04-200 Tube O.D. 6 mm IDK06-100 IDK06-200 Tube length (m) 5 10 5 10 5 10 5 10 5 10 MHZA2, MHZAJ2 6 MHZ2, MHZJ2 6 MHC2 6 MHCA2 6 MHCM2 7 Air gripper with bore size larger than those above Rotary Actuator Recommended model Piping condition Series Vane type Rotating
(Accessory) 6 Ionizer full length (L) Angle adjustable (90) (31) 12 2 Angle adjustment range is 45.
Metric 3, 4, 6 6, 8, 10 10, 12 Valve type Inch 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 Symbol Type Basic type N.C.
SY1 4, SY1 4A only 1 2 1 2 4-3-6 Series SY100 Construction SY114, SY114A (A) 2 3 (R) i q y e r w V100 SY SYJ VK VZ VT VP A R P !1 o u t !0 VG VP S070 VQ VKF Part no. Material Replacement Parts Material Note Component Parts VQZ No. q w e r t y No. !0 !
10 3-3H9 long groove depth 3 + 0.025 0 M5 x 0.8 37h9 0 0.062 Port A M5 x 0.8 (one each on three sides) Port B 4-M4 x 0.7 Depth 6 N I J E A D P A A M N R R SMC E O P T P A I R R 6 G Y R A I 18 2 6 21 9 5 23 5 Side A Side B Scale: 60% 9 Series MRHQ Rotary Gripper Dimensions (mm) 1in = 25.4mm Scale: 60% MRHQ16 A B 41 50 66.5 30 4-M5 x 0.8 Depth 6 47h9 0 0.062 20.6 opened 5 0 0.1 8 4-M3