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How to Order Symbol 2 1 01 06 2 AS 1 F E S K JIS Symbol Hexagonal lock nut Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Applicable tubing O.D.

If a small flat head screwdriver is inserted between the opening in the bottom, terminal block (3) will be removed from the cover (2). (Refer to Figure (1).) 4) Remove the cable gland (4) and plain washer (5) and rubber seal (6). 2.

LVH LVD Table (1) Port/Orifice Size Table (2) Bracket Part No. Model Orifice size (No.) 2 (3 mm) 3 (4.5 mm) 4 (6 mm) 5 (8 mm) 6 (10 mm) Part no.

screw 2 1 3 (2b) How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6.

Construction 3 1 Component Parts Description Material No. q w e r t y u 4 Solenoid coil Body Fixed armature Armature Return spring Poppet Diaphragm assembly Resin Stainless Steel Stainless Steel Stainless Steel NBR NBR, Resin 2 5 6 7 4.3-5 Series VQ20/30 Dimensions/Series VQ20 In-line style/Grommet(G) VQ21A1-mGm-m Dotted line: Bracket mounting style (-F) 4.3-6 Series VQ20/30 For Dry Air,

2 q w e r t y !1 !0 o i u Component Parts No.

(different sides) 25 2 pcs. (same side) 70 D-Y7BAL 1pc., 2 pcs.

Fluid Seal material NBR, FKM, EPDM Manifold body, Base (2) Aluminum Air Liquid Non-leak, Vacuum q 106 Pam3/s or less (1) 1 cm3/min or less 0.1 cm3/min or less Valve assembly NBR, Polyacetal Aluminum FKM/EPDM w Note 1) Differs depending on the operating conditions such as pressure, etc. Note 2) Value on option V (Non-leak, Vacuum).

MHL2-40D MHL2-40D1 MHL2-40D2 SMHL2C, #4 SMHL2C, #5 SMHL2C, #6 (#6+#7) 2.2-12

assembly Bumper retainer seal -2, -8 -2, -8 Standard -2 -3 -6 -8 -1 -1S-1 -1S-2 NBR C4SL C4SL-2 C4SL-3 C4SL-6 C4LL-8 800147AP 800147A-S1P 800147A-S2P O-ring 15 1 NBR C4SFP-260S C4SFP-260S Case assembly Note 2) 14 1 Note 1) Description: Bumper assembly Note 2) O-ring !

m 4 m 6 m 13 m Filtration efficiency 99% FQ1 HEPO 2 FGH100 to 300 FN The membrane element cannot be selected for FGH100.


Type 41, 42, and 43 base mounted manifold gasket part number.: SY□000-GS-2(-Q) (10 pcs./set: mounting screws and gasket)
Valve part numbers: SY3140, SY5140, SY7140, SY9140, etc.
Note) For type 41 and 42 SY5000/7000 series manifolds, when there is a “-Q” (CE-compliant product) suffixed to the part number, suffix a “-Q” to the gasket assembly part number as well .

4 3 1 7 9 SA 1 (P) VA 4 (B) 2 (A) 3 (R) 2 SA VA VH300/400 VM 8 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 VR 4 3 VH 1 9 VHS 7 4 (B) 3 (R) 1 (P) 2 (A) 2 VH600 6 5 4 1 7 1 (P) 2 (A) 4 (B) 2 3 (R) Component Parts Material VH200/300/400 Zinc die-casted Aluminium

4 6 0 100 400 200 300 100 200 300 400 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH3100-02 SRH3110-02 SRH3100-02 0.5 0.20 0.20 0.4 Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 0 100 200 300 400 0 2 4 6 400 100 200 300 0 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min SRH4000-03 SRH4010-03 SRH4000-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet

Designation Description 1 Tx+ Transmit Data + 2 TxTransmit Data 3 Rx+ Receive Data + 4 5 6 RxReceive Data 7 8 BUS IN: RJ45 8-pin socket No. Designation Description 1 Tx+ Transmit Data + 2 TxTransmit Data 3 Rx+ Receive Data + 4 5 6 RxReceive Data 7 8 Use only plugs conforming to FCC standards. Shielded Ethernet cable is recommended.

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice. ii HEF002-A6 Contents Contents 1 PREPARATION FOR COMMUNICATION -1-1 2 OPTIONS OF COMMUNICATION METHOD -2-1 2.1

ASN AQ ASV AK How to Order VCHC F S 1 0 03 06 3 2 AS ASR ASQ Hexagon lock nut Round lock nut J Nil Lock nut option Speed controller Option None Electroless nickel plated Nil N Body size 1 2 3 4 M5 standard 01, 02 standard 03 standard 04 standard Tube size Note) With seal 04 06 08 10 12 4 6 8 10 12 Made to Order Refer to page 612 for details.

Description Material Part no. 11 End plate L 1 End plate ass'y NARM2500 NARM3000 12 O-ring 1 13636A 13646A 13636B 13646B Bracket A 131515A 1349161A 3 Diaphragm ass'y NBR 2 (Except for O-ring) (Except for O-ring) Bracket 2 1 set 2 Bracket B Hexagon socket head cap screw 13649A 13639A 4 13 Valve ass'y Brass/NBR 136410 136310 5 Valve spring Stainless steel 11.5 X 8.5 X 1.5 14.5 X 10.5 X 2 6

Quality of supply air 2 Diffuser PBT Type S: White, Type L: Black 3 Cap POM Use clean compressed air as fluid. (Air quality class 2 : 4 : 3, 2 : 5 : 3, or 2 : 6 : 3 as specified in ISO 8573-1: 2010 is recommended.)