ITV

1000 2000 2500 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Supply pressure (MPa) 14-8-21 22 Series ITV1000/2000/3000 Series ITV305 Linearity Hysteresis Repeatability 1.0 1.0 1.0 0.9 0.8 Output deviation factor (%F.S.)

Step Motor Driver （ Pulse input type ）

2000 2000 2000 Step data default Deceleration 2000 2000 2000 2000 Pushing force 100 100 100 100 Trigger LV 100 100 100 100 Pushing speed 20 30 30 30 Moving force 150 150 150 150 Area1 0.00 0.00 0.00 0.00 Area2 0.00 0.00 0.00 0.00 In position 0.50 0.50 0.50 0.50 98 - LEHF Basic parameter default Model LEHF10 LEHF20 LEHF32 LEHF40 Lead [mm] 40 / 15 50 / 15 70 / 16 70 / 16 Controller ID 1 1

Table of Contents

Series IR1000/2000/3000 Precision Regulator. Series Variations. Features. Precautions. Series IR1000/2000/3000 Precision Regulator. Specifications. How to Order. Construction. Dimensions . Made to Order Specifications. Series IRV1000/2000/3000 Vacuum Regulator. Features. Precautions. Series IRV1000/2000/3000 Vacuum Regulator. Specifications. How to Order. Construction. Dimensions .

Precision Regulator

0.1 0.194 0.1 0 1000 2000 3000 4000 5000 6000 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 6000 0 1000 2000 3000 4000 5000 1.0 Flow rate (L/min (ANR)) Relief flow rate (L/min (ANR)) Supply pressure P1 (MPa) 818 IR1000/2000/3000 Series Made to Order Please contact SMC for detailed dimensions, specifications, each part number and lead times.

V

Note 4) Grommet type (G) is also available for C-kit, single type of VQ0/1000/2000.

IR1000/2000/3000

1 Precision Regulator Series IR1000/2000/3000 G F.R.L.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Note 3) Weight without sub-plate 1.12-35 VQZ1000/2000/3000 Base Mounted Construction: VQZ1000/2000/3000 Metal seal Rubber seal 4 3 2 1 4 3 2 1 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 2 position double 2 position double (B) 2 (A) 4 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 (1) 3 position closed

Uniaxial Electric Actuator Series LJ1

W: Work load (N) L1, L2, L3: Amount of overhang to work piece center of gravity (mm) a: Table acceleration (mm/s) Mounting position Direction of load movement Model LJ1H10 LJ1H20 LJ1H30 Horizontal/Lateral Horizontal/Lateral Vertical Lateral Horizontal a M1 2000 a=1000 a=1000 2000 2000 a=1000 L1 mm L1 mm L1 mm Pitching W a=2000 a=2000 a=3000 a=3000 a=2000 1000 1000 1000 L1 a=3000 0 2 4 6 8

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Socket Hook 1.12-4 VQZ1000/2000/3000 Body Ported Mounting 3 Port Valves on 5 Port Manifolds(VQZ 82 , N.C.

HRX-OM-W002

Facility water temp. 2000 2000 2000 2000 Facility water temp. Facility water temp. 2000 2000 Cooling capacity[W] Cooling capacity[W] Facility water temp.

Ionizer

0 0 100 200 300 400 500 600 1000 Distance (mm) Distance (mm) Air purge: Yes Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.05 MPa (3.5 L/min (ANR) per nozzle) 45 25 40 35 20 Discharge time (s) Discharge time (s) 60 Hz 30 15 25 1 Hz/60 Hz 20 1 Hz 10 15 Sensing DC Sensing DC 10 5 5 00 500 1000 1500 2000 00 500 1000 1500 2000 Distance (mm) Distance (mm

AC

4 Note 1) Bowl guard (SPC) is attached to the bowl assembly of "AW3000" to "AW4000-06". 1.8-4 Filter Regulator AW1000 to 4000 Dimensions Options (AW3000/4000) AW1000/2000 Metal bowl With drain guide AC Drain cock style for AW1000/2000 is same as the standard. Without valve mechanism.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEC Y 10 5 5 Motorless 0 0 500 1000 1500 2000 0 0 500 1000 1500 2000 2500 3000 LAT Speed [mm/s] Speed [mm/s] When the stroke of the LEJB40 series exceeds 1000 mm, the work load is 10 kg.

90

-A 0.47 0.64 IR3000-A SRF ITV * Compared with the current IR1000/2000/3000 IC ITVH ITVX Mist Separator Precision Regulator Air Filter PVQ VY1 Digital pressure switch standardized VBA VBAT AP100 789 Precision Regulator IR1000-A/2000-A/3000-A Series Reduction in air consumption Air consumption is reduced with a new original structure.

Slider Type Ball Screw Drive/11-LEFS Series

0 4 8 12 16 20 24 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] LEC SS-T 2000 2000 2000 2000 1500 1500 1500 1500 LEC Y L4 [mm] L4 [mm] L4 [mm] L4 [mm] L4 1000 1000 1000 1000 X Motorless 500 500 500 500 LAT 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 LZ Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000

A

www.stevenengineering.com I 5.16 AIR PREPARATION MODULAR TYPE ACCESSORIES END BLOCK ADAPTOR Port Sizes: M5 ~ 1Rc Allows for easy installation and maintenance H O W T O O R D E R P I P I N G A D A P T O R E10-M5 1000 S E R I E S E20-N01 2000 S E R I E S E20-N02 2000 S E R I E S E20-N03 2000 S E R I E S E30-N02 3000 S E R I E S E30-N03 3000 S E R I E S E30-N04 3000 S E R I E S E40-N03 4000

Precision Regulator Series IR1000/2000/3000

(MPa) Set pressure (MPa) 0.202 0.8 0.6 0.7 0.5 0.200 0.6 Set point 0.4 0.5 0.198 0.4 0.3 0.3 0.196 0.2 0.2 0.1 0.194 0.1 0 1000 2000 3000 4000 5000 6000 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 6000 0 1000 2000 3000 4000 5000 1.0 Flow rate (l /min (ANR)) Relief flow rate (l /min (ANR)) Supply pressure P1 (MPa) 559 Made to Order Specifications: Series IR1000/2000/3000 Please contact SMC regarding

Thermo-chiller/Rack Mount Type

Cooling Capacity HRR010-A-20-m [50 Hz] [60 Hz] 2000 2000 Ambient temperature Ambient temperature Ambient temperature Ambient temperature 25C 25C Cooling capacity [W] Cooling capacity [W] 1500 1500 32C 32C 1000 1000 500 500 40C 40C 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20-m [50 Hz] [60 Hz] 2000 2000 Facility

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

However, the 10-SV1000 and 2000 series type 10 manifolds require only one piece.)

Best Pneumatics Vol. 14

Lubrication cannot take place under a pressurized condition. 0.02 0 0 2000 4000 6000 8000 Caution Flow rate (/min (ANR)) 1. Check the dripping amount once a day.