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L Type Plug Connector (L) 10-32 Nom (M5) 10-32 Nom (M5) 4 porls g .g 3 1 1 . 8 1 I (300)r I 2.0i (St ) -9 :ions (n 7 6 10 11 12 13 14 'i6 17 18 20 L1 1.40 11.41 (35.s) (46) 2.22 2.& (56.5) (67) 3.O5 3.46 (Be) 3.84 1 4.2S (e8.5) oos) 4.70 (119.5) 512 15.53 (130) (140.5) 5.94 (1511 (161.5) \172) 7.19 7.60 (182.s) (1S3)a.ol (203.5) 8.43 \7t4) 8.84 Q24.5) L2 1.12 {a.r) 1.54 (30) 1.95 (4e.5)2.36

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L Type Plug Connector (L) 10-32 Nom (M5) 10-32 Nom (M5) 4 porls g .g 3 1 1 . 8 1 I (300)r I 2.0i (St ) -9 :ions (n 7 6 10 11 12 13 14 'i6 17 18 20 L1 1.40 11.41 (35.s) (46) 2.22 2.& (56.5) (67) 3.O5 3.46 (Be) 3.84 1 4.2S (e8.5) oos) 4.70 (119.5) 512 15.53 (130) (140.5) 5.94 (1511 (161.5) \172) 7.19 7.60 (182.s) (1S3)a.ol (203.5) 8.43 \7t4) 8.84 Q24.5) L2 1.12 {a.r) 1.54 (30) 1.95 (4e.5)2.36

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

L Type Plug Connector (L) 10-32 Nom (M5) 10-32 Nom (M5) 4 porls g .g 3 1 1 . 8 1 I (300)r I 2.0i (St ) -9 :ions (n 7 6 10 11 12 13 14 'i6 17 18 20 L1 1.40 11.41 (35.s) (46) 2.22 2.& (56.5) (67) 3.O5 3.46 (Be) 3.84 1 4.2S (e8.5) oos) 4.70 (119.5) 512 15.53 (130) (140.5) 5.94 (1511 (161.5) \172) 7.19 7.60 (182.s) (1S3)a.ol (203.5) 8.43 \7t4) 8.84 Q24.5) L2 1.12 {a.r) 1.54 (30) 1.95 (4e.5)2.36

ZL3-OM00801

16 No.ZL3-OM00801-A 7.2 1 (/) ZL3/ZL6 ZL3-JSY3140-5LZ -a 1 3) 2) DC24V 1) 300mm 300mm * *0.150.18Nm 2) D: E: 1 1 1 1 3) 1 1 2 X12 ZL3/ZL6 SY100-30-4A-6 1 2) / 1) 2) 300 4 DC24V 6 600 10 1000 15 1500 20 2000 25 2500 30 3000 50 5000 ZL3/ZL6 SY100-30-A *x2 17 No.ZL3-OM00801-A ZL3/ZL6 ZS-39-5G ZL3-LW1-N-A 1 1) N NPN P PNP 2 ZL3/ZL6 ZL3-EJ1-H-A 1 2) 1) M 0.35 MPa

IR1000/2000/3000

44 51 Approx. 90 10 9.5 Bleed Bleed 63 Exhaust SUP(1) OUT(2) G 2 OUT 30 OUT(2) SUP(1) OUT 10 43 35 EXH Approx. 43 2-Rc(PT) 1/8 Port size 2-Rc(PT) 1/4 Port size Rc(PT) 1/8 Pressure gauge port 50 50 35 2-Rc(PT) 1/8 Pressure gauge port Approx. 60 50 Mounting hole IR300-0 IR2120-02 36 2 Bracket (optional) 30 82 Mounting hole Pressure gauge (optional) 60 2.3 48 Bracket (optional) 5.5 9.5 M5

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Side 1/4 1/4 1,3,5 (P,EA,EB) Port 1/8 C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) 1/4 Port size 1/4 C6 (One-touch fitting for 6) 4,2 (A,B) Port C10 (One-touch fitting for 10) C8 (One-touch fitting for 8) Manifold base weight W (g) n: Station W = 61n + 101 W = 79n + 127 W = 100n + 151 Note 1) For more than 10 stations (more than 5 stations in case of SS5Y7), supply pressure to

IDX-OM-W095

ADH-E400 1.6MPa 0.051.6MPa 0.024m 3/h 0.7MPa IDFC60/70/80/90 Series 9-1 IDX-OM-W095 L 9.3 Rc1/225 30 5 IDFC60 2722IDFC70,IDFC80,IDFC90 22 IDFC60 (IDFC70/80/90) 1) 2830Nm 2) 9.4 1 1 IDFC60/70/80/90 Series 9-2 IDX-OM-W095 R 10 R R (GFCI) 10.1 10.2 IDFC60-23-R IDFC70-23-R IDFC80-23-R IDFC90-23-R (A) 10 15 20 30 (mA) 30 IDFC60/70/80/90 Series 10-1 IDX-OM-W095 R 10.3 M3.5

Series AS-FM/AS-M/ASD-FM

Symbol JIS symbol 1 Series AS-FM How to Order AS 2 2 1 1 F M 01 06 Body size Option 1 2 M5 standard 1/8, 1/4 standard Nil S None With sealant M5 and U10/32 are not available with sealant.

Fluoropolymer Tubing Variations

8" x 0.086" 1/8" TILMB01 1/8" x 1/16" 1/8" TILM05 3/16" x 1/8" 3/16" 4.75 1/8" 3.15 TILM07 1/4" x 5/32" 1/4" 6.35 5/32" 3.95 TILM11 3/8" x 1/4" 3/8" 9.53 1/4" 6.33 TILM13 1/2" x 3/8" 1/2" 12.7 3/8" 9.5 TILM19 3/4" x 5/8" 3/4" 19.05 5/8" 15.85 TILM25 1" x 7/8" 1" 25.4 7/8" 22.2 TILM32 11/4" x 11/10" 11/4" 31.75 11/10" 27.95 KQB2 O.D. 3.18 1/16" 1.58 0.086" 2.18 KS KX I.D.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Specifications PF2D200/201 Model Applicable flow rate sensor PF2D504--1 PF2D520--1 PF2D540--1 0.25 to 4.50 l/min 1.3 to 21.0 l/min 2.5 to 45.0 l/min Flow rate measurement range Note 1) 0.25 to 4.50 l/min 1.3 to 21.0 l/min 2.5 to 45.0 l/min Set flow rate range Note 1) 0.05 l/min 0.1 l/min 0.5 l/min Minimum set unit Note 1) Accumulated pulse flow rate exchange value (Pulse width: 50ms) Note

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 12 Series XMH, XYH Stainless steel High Vacuum Angle/In-line Valve Dimensions XMH/Angle type C D L2 (KF flange) Fn Fc C (Fc) L1 (CF flange) H J B G A A (mm) Model A 100.5 114 162.5 179.5 B 38 48 66 79 C 1 1 2 2 D 30 40 55 75 Fn 34 70 Fc 17 26 41 52 G 35 40.5 57 70 H 18 21.5 30 35 J P.C.D L1 6-4.4 6-6.6 L2 XMH-16

Pressure switch for energy-saving control ejector with N.O. type valve

Power saving mode 1 remains enabled until turned off. In power saving mode 1, the brightness of the whole display is reduced. In power saving mode 2, when buttons are pressed the display is normal, but if no buttons are pressed for 30 seconds, it will revert to power saving mode. (Power saving is only enabled in measurement mode).

25

Rc, NPT, G 1/8 PB PB With LQ3 fitting With LQ1 fitting (6.35) PAF (1.2) PA PB 55 15 FLUID IN FLUID OUT 4.5 30 41 7 (140) (149) 139 79 87 77 2 4.5 FLUID IN Rc, NPT, G 1/8 With nut (LQ1/LQ3 fittings) 1/4" tube extension Caution 1.

Digital pressure switch for energy-saving control ejector

Power saving mode 1 remains enabled until turned off. In power saving mode 1, the brightness of the whole display is reduced. In power saving mode 2, when buttons are pressed the display is normal, but if no buttons are pressed for 30 seconds, it will revert to power saving mode. (Power saving is only enabled in measurement mode).

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

How to Order 10 30 CUX D Without auto switch 10 A90 30 CDUX D With auto switch Number of auto switches With auto switch (with built-in magnet) Nil S 2 pcs. 1 pc. Microspeed cylinder Bore size 10 16 20 25 32 Auto switch type 10mm 16mm 20mm 25mm 32mm Nil Without auto switch Select auto switch type number from the table below.

PSxx-OMH0002CN

() -27-67 NPN2 PNP2 -43 NPN PNP NPN PNP NPN PNP DC(+) -27 27 27 27 NPN 2 Max.30 V80 mA 1 V OUT1(NPN) DC12 24 V OUT2(NPN) DC(-) -43 43 43 43 NPN 1 + PNP 1 Max.30 V(NPN)80 mA 1 V NPN PNP DC(+) OUT1(NPN) DC12 24 V OUT2(PNP) DC(-) DC(+) OUT1(PNP) -65 65 65 65 PNP 1 Max.80 mA DC12 24 V N.C.

ZQ-OM01601

[inHg]:) ([kgf/cm 21 -[F 0] 30 - [F80] 30 ,OFF <> [F80] 1 2 2 1 [F80] 1,OFF 1 2,30 () 2 OFF ON 31 - [F81] , <> [F81] [F81] , 000 40 32 - [F90] <> [F90] [on] [oFF] 1 [oFF]() 2 [F90] 1 34 -"" 33 - 1 2 OUT1 3 OUT1 4 OUT1 5 OUT1 6 OUT2 7 ON 8 OFF 9 10 11 12 13 14 15 2 34 - [F96] <> [F96] ,oFF ,on [F96] 35 - [F98] ON/OFF <> [F98] [F]() [n]( ) OUT1

F

34 14 1/8 (N)ASN2-01 15 34.2 38.2 17 1/4 (N)ASN2-02 20 37 41 21 3/8 (N)ASN2-03 25 49 55 24 1/2 (N)ASN2-04 30 y, South San Francisco, CA 94080-6370 !

JSY1000/3000/5000 Series (Non Plug-in)

Tube attachment/detachment for One-touch fittings Caution Caution 1) Tube attachment 1. Take a tube having no flaws on its periphery and cut it off at a right angle. When cutting the tube, use tube cutters TK-1, 2 or 3. Do not use pliers, nippers or scissors, etc.

Electric Slide Table / High Precision Type 《 AC servo motor 》

They are all important notes for safety and must be followed in addition to International Standards (ISO/IEC)*1) , and other safety regulations. *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems. IEC 60204-1: Safety of machinery -Electrical equipment of machines .