Quick Exhaust Valve Series AQ 1

u NBR HNBR Seal Valve i i HNBR NBR Valve O-ring o o Dimensions With silencer With exhaust port fitting Applicable tubing O.D. d Applicable tubing O.D. d Weight (g) D1 39.2 M1 L3 12.9 M2 M1 12.9 L2 14.3 L4 12.9 L1 5.2 D2 39.2 L3 23.5 Weight (g) D1 10.0 L2 13.7 L1 5.2 Model Tubing O.D. d AQ240F-04-00 Model Tubing O.D. d AQ240F-04-04 6 4 9.3 5 4 9.3 AQ240F-06-00 AQ240F-06-06 13.7 13.7 15.4 6.2

SY3000/5000/7000/9000

suppressor 24, 12, 6, 5, 3 VDC M8 connector Electrical entry for D, Y Electrical entry for G, H, L, M, W LN, MN type: with 2 sockets.

PSE200

CH kPa MPa kPa MPa MPa kPa kPa MPa kPa MPa OUT1 OUT2 CH 1 2 3 4 P R E S S U R E Copy function (page 14) Each channel's information can be copied to another channel.

VND

Material Bronze Note Clear coated q Description Cover assembly Body Aluminum alloy Brass Platinum silver painted PTFE, EPR, FKM w e Plate assembly Valve element Piston assembly Return spring Second plate assembly r Brass, PTFE t Aluminum alloy y Piano wire u Aluminum alloy Body option S is made of stainless steel. 17-4-42

VVX31/32/33

92 95 97 Q 23 25 28 L 6 9 9 M 45.5 50.5 50.5 N 20 23 25.5 K 36 46 46 F 33 34 34 H 24 25 25 J 30 40 40 D 22 24 24 A 40 44 44 B 20 22 22 C 9 10 10 Model VVX31 VVX32 VVX33 TI/ TIL PA PAX PB 17-3-91

VXA21/22

E F With bracket G H I J VXA21 VXA22 , , 18 21 9 10.5 40 45 21 27 55 62 64 71 11 13 36 46 46 56 1 4 3 8 10 1 8 1 4 VX 11.5 VNl Dimensions (Orifice size 8mm, 10mm) VXA225m, VXA226m VQ Thread fixed: (VXA226 2 0 -04 0nly) Bracket E Port size Rc(PT) Model A B C D VXA22 52 60 02 03 , 1 4 3 8 22 11 67 77 27 VXA226 -04 2 0 1 2 28 14.5 73 83 30 Fixing with thread is also possible. 4.1-61 VVXA21/

q"s

I { 0 s l I l 6 l ; D.0 t' 6 l 0.6 0.5 o.4 0.3 6 ' ) !

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve Body Ported/Single Unit

Y: With connector Nil: Non-locking push type D: Push-turn locking slotted type E: Push-turn locking lever type + + + + H: Lead wire length 600 mm LN: Without lead wire LO: Without connector MO: Without connector DO, YO: Without connector Light/Surge voltage suppressor + + Electrical entry for D, Y Electrical entry for G, H, L, M, W AC CEcompliant DC Nil Without light/surge voltage

Rotary Actuator Vane Type CRB2 Series Size: 10, 15, 20, 30, 40

S Single vane D Double vane 90 90 180 180 270 270 Double vane 90 90 100 100 Nil Without auto switch (Built-in magnet) Single vane S 1 pc.* Nil 2 pcs.** M Without M9 type auto switch (Built-in magnet) u Connecting port location * For applicable auto switch model, refer to the table below. ** The operating range and hysteresis of the D-M9 are different from those of the other auto switches.

Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series * 1

VDC V V V V 6 12 VDC V V V V + G Grommet (Lead wire length: 300 mm) V V V V D Type D (DIN terminal/With connector) V V V V Y Type Y (DIN terminal/With connector)*2 V V V V DO Type D (DIN terminal/Without connector) V V V V YO Type Y (DIN terminal/Without connector) V V V V + y e Electrical entry u f Light/ surge voltage suppressor Nil None V V V V Z With light/surge voltage suppressor v*

VFR5000-OMN0001

COM A B 01C COM A B 1)8 2)+COM -COM . 3)D U D 1)8 2)+COM -COM . 3)D U D 11 VFR5000-OMN0001 () X () [3(EB)4(EA) ] () (PE) 12 VFR5000-OMN0001 o. 1(ISO VG 32) [3(EB),5(EA),PE] X(30.2~0.9MPa0.1~0.9*MPa) 1. 2. 3. 4. 5. 6. 7. 13 VFR5000-OMN0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note

Electro-Pneumatic Valve NVEP/NVEF Series

Mounting Amplifier Single mounting Ho.izontally Q r A vertica,,y F Multiple mounting + -f -t] + -ti n n n h n t t t l t t l t I i u ! L l !

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

1 w r u y e t !5 !2 !4 q !0 !3 i Component Parts No.

3 Port Solenoid Valve

D-DN This catalog is printed on recycled paper with concern for the global environment. Series 10-V100 Rubber seal 3 port direct operated solenoid valve Specifications Air Fluid Ambient and fluid temperature (C) 10 to 50 (With no freezing. Refer to page 714.)

Auto Drain Valve Longer life & Higher resistance to foreign matter

How to Order AD402 04 A D Semi-standard symbol: When plural options are required, indicate them in alphanumeric order.

Digital Flow Switch ( compatible)

U Function to change the unit in which the value of flow is displayed. Only a product with this function can change the unit. A product with unit selection function cannot be purchased if it is used within Japan. Flow is indicated only by SI units in Japan.

HRX-OM-X071

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Fieldbus system (SI unit – PROFIBUS DP compatible)

Correspondence between output data and valve manifold : Output numbers are assigned to stations from side D to U of manifold in order. (See manual of each valve manifold for the directions of side D and U) : Standard manifold is wired in double. Output numbers are assigned to side A and B alternatively. In case of single solenoid valve, output on side B is free.

HEC-OM-U015

D Level gauge K Circulating fluid OUT Set the Communication protocol.