, tri.gr,o*e 056 (r/6) h l:0.36 ot s 1s1"1 % l=0.36 r06 (170') % , 1 L l=0.52 150 \1%',) ls, th l=0.5 2O0 (2') h, t1 t:O.44 250121/z') h t:O.44 300 (3') 16, 1n l-0.55 400 (4') th, la l=0.65 056 (%6') 11,4a o75 (%',I 1'Aa 1 % 106 (1%a) 't% 15o 11%'l 13A 2 200 (2'1 1'la 2'Aa 25O l2%',) 1151e 213,4e 300 (3') 2 2% 400 (41 2uAe 33Aa NOTE l) Female lhread length ('l l rs shorter lor lhe above listed
41"ry19e: 4-position dual 3-port valves for \ \ ..;'r..:.. independent control of ' .:1-.i/-9-.A & B ports Availabe conf igurations [N.C./N.C ]. I N I n / N l / . \ I n i r N l a / N l ^ l : , ! . : ' : ) ' , + . .
0.3906 10mm 0.3937 X 0.3970 Y 0.4040 13/32 0.4062 Z 0.4130 10.5mm 0.4134 27/64 0.4219 11mm 0.4331 7/16 0.4375 11.5mm 0.4528 29/64 0.4531 15/32 0.4688 12mm 0.4724 31/64 0.4844 12.5mm 0.4921 1/2 0.5000 13mm 0.5118 33/64 0.5156 17/32 0.5312 13.5mm 0.5315 35/64 0.5469 14mm 0.5512 9/16 0.5625 14.5mm 0.5709 37/64 0.5781 15mm 0.5906 19/32 0.5938 39/64 0.6094 15.5mm 0.6102 5/8 0.6250 16mm 0.6299 41
59 67 81 84 L 52.5 59 67 81 84 LD LU 13 14 17 23 23 ZZ 116 127 138 171 175 LA 35 41 46 62 62 ZZ Model MUl25 MUl32 MUl40 MUl50 MUl63 lLC 18 22 26 32 32 8 10 10 14 14 9 11 13 16 16 8 10 10 14 14 9 11 13 16 16 CD-MU02 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 Dimensions L, Z, and ZZ are reference dimensions for installing a single knuckle joint, which may be used as a guide.
0.3906 10mm 0.3937 X 0.3970 Y 0.4040 13/32 0.4062 Z 0.4130 10.5mm 0.4134 27/64 0.4219 11mm 0.4331 7/16 0.4375 11.5mm 0.4528 29/64 0.4531 15/32 0.4688 12mm 0.4724 31/64 0.4844 12.5mm 0.4921 1/2 0.5000 13mm 0.5118 33/64 0.5156 17/32 0.5312 13.5mm 0.5315 35/64 0.5469 14mm 0.5512 9/16 0.5625 14.5mm 0.5709 37/64 0.5781 15mm 0.5906 19/32 0.5938 39/64 0.6094 15.5mm 0.6102 5/8 0.6250 16mm 0.6299 41
manifold assembly: sta. 1-4) NZXl101-KlsLZ-EC-M NZZXlO4-TB-A Parl Number / Configuration Six station manitold assembly: sra. 1) NZX 1071 -K3sMZ-F-M sta. 2-5) NZX1071-K1sLZ-EC-M sta. 6) zx'l-BABI NZZXl O6-TB-A 4tl 2 ' Part Number / Configuratlon Four station manifold assembly: sta. 1-2) NZX'I101-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41
40 49.5 40 3 3 18 20 16 18 20 16 11 13 11 Vacuum supply port 3.3 Gasket Vacuum supply port 3.3 Gasket 784 Compact Pressure Switch Series ZSE2/ISE2 01 T1 Dimensions: ISE2Connector type: ISE2-15C Grommet type: ISE2-15 01 T1 01 T1 Pressure setting trimmer Pressure setting trimmer L H SET L H SET 15 15 Indicator light (Red) Indicator light (Red) 20 20 600 (3000) 600 (3000) ZSE ISE ZSP 48.5 41
Correction Factors Data Inlet Air Temperature Data Outlet Air Pressure Dew Point Data Air Flow Capacity A C E Inlet air temperature F (C) Correction factor Outlet air pressure dew point F (C) Correction factor 3.5 (100) 7.1 (200) 10.6 (300) 14.1 (400) 17.6 (500) 21.2 (600) 24.7 (700) 28.3 (800) Air flow capacity scfm (L/min [ANR]) Model IDH4 IDH6 68 (20) 1.36 37.4 (3) 0.50 77 (25) 1.24 41
15.2 18.5 18.5 20.9 18.5 20.9 18.5 20.9 65.9 67.8 65.9 67.8 75.6 77.7 75.6 77.7 75.6 77.7 84.2 85.8 84.2 85.8 84.2 85.8 69.9 71.8 69.9 71.8 81.1 83.2 81.1 83.2 81.1 83.2 88.2 89.8 88.2 89.8 88.2 89.8 63.9 65.8 63.9 65.8 73.6 75.7 73.6 75.7 73.6 75.7 82.2 83.8 82.2 83.8 82.2 83.8 17 19 17 19 19 21 19 21 19 21 21 22 21 22 21 22 19 21 19 21 21 23 21 23 21 23 23 24 23 24 23 24 22 23 30 31 39 41
25.2 30 20 20 10 30 60.5 (N02L: 61.5) 2 x M3 x 0.5 thread depth 4 ZSE ISE Piping port 02L: R1/4 N02L: NPT1/4 3.5 ZSP PS 8.8 Atmospheric vent port 2.6 ISA PSE IS 10.3 29.5 ISG ZSM Width across flats 17 M5 x 0.8 thread depth 5 41 2 25.2 49.5 58.8 64.8 Piping port Rc1/8 Piping port URJ1/4 Piping port TSJ1/4 -A2L: URJ1/4 -B2L: TSJ1/4 -C01L: Rc1/8 737 Series ZSE80/ISE80 Dimensions With bracket
(500) Vertical: 1.8 (50) Horizontal: 17.6 (500), Vertical: 3.5 (100) Optical linear encoder (incremental) Sensor 30 None 1.25 Provided 30 None 1.25 Provided 30 None 1.25 Provided Pushing operation 6 1 to 4.8 1 to 5 1 to 3.9 Positioning operation Positioning repeatability (m) Note 4)5) Accuracy (m) Note 4)5) 90 5 90 5 90 5 Measurement Maximum speed (mm/s)Note 6) 100 10 100 10 100 10 400 41
Antistatic specifications (FGDE, FGDF) Note) For a comparison with the nominal filtration accuracy according to the element category, refer to pages 41 and 42. 24 C
(Refer to the instruction manual for details on the cleaning.) 42 47 49.5 40 39.5 43 44.5 34.5 35.5 36 38 40 41.5 10 12000 14000 HAW75 45 48.5 52 45 41 43 45.5 34.5 35.5 36 39 40 42.5 15000 18000 20 HAW110 Conditions: Air pressure 0.7 MPa, Cooling water temperature 30C. Inlet air temperature 50C is saturated air. At 70C or more, it is humid air with dew point 67C. 16
1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--
------1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--
------1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--
1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--
------1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--
------1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--
1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--