Rotary Table

Do not mount the product in locations where it is exposed to radiant heat. 15 - Maintenance Warning Removal of equipment, and supply/exhaust of compressed air.

MRQB-OM0002

2 13 3. 3. 3. 3. 3-1. ,,,2 2 3-2. 2 2 2 32 40 VF3000 VZ3000 AS2000 6/4 14 4. 4. 4. 4. 4-1. , ,, ,4.1 , ,4.1 ,,, 4.1 4.1 [N] 5 10 15 20 25 30 40 50 75 100 32 14 13 13 13 13 13 12 11 10 9 40 23 22 22 21 21 21 19 18 16 15 , , , 4.24.34.2, 15 4.2 4.2 [N] [MPa] [mm 2] 0.15 0.2 0.3 0.4 0.5 0.6 0.7 [mm] OUT 804 121 161 241 322 402 482 536 32 12.2 IN 675 101 135 202 270 337

LECA6_C

E C A L 1 1.5m U 1 1 3 3m V 2 2 W 3 3 5 5m Shield 8 8m Vcc B-1 12 A 10m GND A-1 13 A B-2 7 B 15m A A-2 6 C 20m B B-3 9 B A-3 8 Z B-4 11 Z A-4 10 3 10.5 14.2 2 1 5.6 23.7 A1 2 (7.0) 1 3 3 4 B1 12.7 2 1 18 A4 B4 (6.7) 15 16 11 30.7 44 - 11.2 () L 1 1.5m U 1 1 3 3m V 2 2 W 3 3 5 5m Shield 8 8m Vcc B-1 12 A 10m GND A-1 13 A B-2 7 B 15m A A-2 6 C 20m B B-3 9 B

Compact Cylinder: Standard Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

Without switch 16 CQ-F016 CQ-D016 L dimension from rod cover is the same as Series CQ1, 20, 32 only.

76

Workload Not compressed Time (sec) 0 5 10 15 20 Time (sec) 0 5 10 15 20 Digital control Digital scroll compressor, which has the unloading function, controls the compressor output depending on the load by repeating compression and nocompression as shown in the figure above.

SMC Pneumatic Clean Series

11 32 7 81 18 70 3/8 27 52 20 40 70 9 110 108 178 M18 x 1.5 15 59 35 14 63 17 31 Up to 1000 58 35 11 32 101 7 18 85 3/8 27 64 20 40 86 130 105 116 189 M10 x 1.25 M18 x 1.5 11.5 49 Actuator / Common Precautions 1 Be sure to read before handling.

AFF

Option J: With drain guide Bracket (Option) 1/4B female thread T: With element service indicator Maintenance space HA Drain AT ID AMG AFF Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5

SI unit ( device)

Value 7 6 5 4 3 2 1 0 Value 7 6 5 4 3 2 1 0 Output No. 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 1 0-7 All clear output Setting value 00 0 0 0 0 0 0 0 0 00 0 0 0 0 0 0 0 0 Output No. 15 14 13 12 11 10 9 8 15 14 13 12 11 10 9 8 2 8-15 All hold last state Setting value FF 1 1 1 1 1 1 1 1 00 0 0 0 0 0 0 0 0 Output No. 23 22 21 20 19 18 17 16 23 22 21 20 19 18 17 16 3 16-23 All force output Setting value

PA300/500/700

/15 3.4 3.7 0.34 0.27 0.86 0.88 2.9 3.2 2.9/3.0 2.7/3.6 6.9 8.8 7.9/7.4 9.2/8.8 12 15 14/13 15/15 0.38 0.28 0.37/0.37 0.25/0.23 0.42 0.43 0.35/0.32 0.22/0.21 0.36 0.29 0.25/0.24 0.22/0.24 0.47 0.40 0.38/0.40 0.57/0.21 0.34 0.36 0.30/0.26 0.17/0.14 0.31 0.22 0.25/0.24 0.24/0.23 1/8 1/4 1/8 1/4 1/4 3/8 1/4 3/8 3/8 1/2 3/8 1/2 0.12 Series VPA300 2.9/2.9 0.27/0.33 0.29/0.41 0.31/0.30 0.31/0.25

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

80 85 90 95 100 105 60 65 70 75 80 85 73 78 83 88 93 98 16 to 25 Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R QA Q GC GB E MM GA D J C 2.8 A Width across flats L 2 x P through A1 H E 4 x T counterbore 0.5 B S Z (mm) S Z A A1 GB P Q QA R T B C D E GA GC H J L MM Bore size 5 30 40 50 5 10 15 20 25 30 40 50 10 15 20 25 20 16 12 11 5.5 4.5 9 4 4.5 2 16 12 26 20 40 32 8 6 30 27 M6 x 1.0

Compact

o"o+ oeep 3 o Cross section C-C 3 l "!l Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!

Title not found

tank wilh levelswitch (lowesllrmrt OFF) AL30 lo 60 Thread type l,4elal bowl AL]01l) 60 A L l 0 1 0 6 0 Nylon bow (inc udinq siqhl dome) AL10 to 60 Nleta bowl with leve qauqe AL3o io 60 AL2O Fow d rection:Righl to eJt Alj0to60 Drain cock with barb frtling:06 x 04 nylon tube AL30 to 60 Port size Drspay -a 15 Jor p odJcl dmp pl"_e ano p,es"urF qdJqe DSI "l AL10 to 60 Wfen mo,e lhan one specJcation

VXR21/22/23

Z S L, Z 1 1 1 1 4 1 2 PB AC 2 Ordering example (Example) Series VXR22, Rc 1 1/4, 200 VAC, Conduit terminal (Part no.)

CVJ3

Valve Mounted Cylinder Single Acting, Single Rod, Spring Return/Extend Series CVJ3 10, 16 How to Order Stroke (mm) Electrical entry G L M Grommet L plug connector M plug connector 10 16 15, 30, 45, 60 15, 30, 45, 60 Bore size 10 16 10 mm 16 mm Light/Surge voltage suppressor Nil Without light/surge voltage suppressor With surge voltage suppressor With light/surge voltage suppressor With surge

Smooth Cylinder Series CQSY

Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) IN 236 165 118 71 20 10 OUT 314 220 157 94 IN 378 264 189 113 25 12 OUT 491 344 245 147 Intermediate Strokes Method Model no. Installation of spacer on standard stroke body. Refer to page 1 for standard model no. Intermediate strokes at 1 mm intervals are available by using spacers with standard stroke cylinders.

S

P I S T O N R O D A I R H Y D R O TYPE P I S T O N R O D D E F L E C T I O N (REFERENCE FACTOR) P I S T O N R O D D E F L E C T I O N (REFERENCE FACTOR) For a concentrated load at the center of the housing. For a concentrated load at the center of the end plate.

LX Series Compact Electric Actuators

o"o+ oeep 3 o 3 l "!l Cross section C-C Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!

Digital Flow Switch (Integrated display type)

CO2 0.2 to 5 L/min 0.5 to 12.5 L/min 1 to 25 L/min 2 to 50 L/min Dry air, N2, Ar 0.2 to 10.5 L/min 1 0.5 to 26.3 L/min 1 to 52.5 L/min 2 to 105 L/min 2 Display flow range Instantaneous CO2 0.2 to 5.2 L/min 0.5 to 13.1 L/min 1 to 26.2 L/min 2 to 52 L/min flow Dry air, N2, Ar 0 to 10.5 L/min 1 0 to 26.3 L/min 0 to 52.5 L/min 0 to 105 L/min 2 Set flow range CO2 0 to 5.2 L/min 0 to 13.1 L/min

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

2 x 6 (for M5 mounting) G1/4, Rc1/4 OUT(2) port 48 6 22 22 6 25 25 43 15 15 M5 leakage detection port 23 30 22 Part number for sub-base VCC12-S02 02F [Rc1/4] [G1/4] 60 0.5 to 2 Sub-base material is aluminum + hard anodized containing PTFE.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

For detailed specifications, refer to page 9-15-1. Data Electrical entry Type Model Features D-E80A Grommet Reed switch Without indicator light 9-14-11