Refer to pages 16-14-3 to 16-14-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 16-1-11 to 16-1-13 for Precautions on every series. 9. Wire the microswitch according to the symbols on the upper insulators. (They will be opposite the terminal symbols on the microswitch. The terminals are screw terminals.) 10.
Valve specifications Model XLAV-16-2 XLAV-25-2 XLAV-40-2 XLAV-50-2 XLAV-63-2 XLAV-80-2 Flange (valve) size 16 25 40 50 63 80 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 50 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures
S Nil Bore size 10 mm 10 Action Auto switch Single acting S 16 mm 16 20 mm 20 25 mm 25 Double acting D Nil Without auto switch (Built-in magnet) For the applicable auto switch model, refer to the table below. Caution Be sure to read before handling.
S Nil Bore size 10 mm 10 Action Auto switch Single acting S 16 mm 16 20 mm 20 25 mm 25 Double acting D Nil Without auto switch (Built-in magnet) For the applicable auto switch model, refer to the table below. Caution Be sure to read before handling.
A A1 E1 L1 MM RR1 U1 ND NX Part No. cylinder bore cylinder bore A A1 E1 L1 MM RR1 U1 ND size (mm) size (mm) CNA +0.058 0 +0.070 0 0.3 0.5 0.3 0.5 32, 40 +0.058 0 +0.070 0 Y-G04 42 14 22 30 M14 x 1.5 12 10 18 32, 40 I-G04 10 16 14 42 16 22 30 M14 x 1.5 12 14 50, 63 Y-G05 56 18 28 40 M18 x 1.5 14 22 50, 63 I-G05 14 20 56 20 28 40 M18 x 1.5 16 20 CNS Applicable pin part no.
/O.D. 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Applicable hose I.D.
.: 6 VP4 U D U side D side 2 to 8 2 to 8 9 to 16 D-sub connector cable assembly Symbol VZS B Both sides Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Stations Symbol VFS 02 2 stations 1 D side VS4 16 stations 16 Max. 16 stations. VQ7 Refer to page 3-7-4 for wiring specifications.
Rc 1/16 gauge port 2-4.5 Mounting hole Connection mark All types are the same in terms of connection.
Flow Rate and Effective Area AS3001F AS2051F AS4001F AS2001F AS1001F Model Metric size 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Tubing O.D. 1/8", 5/32" 3/16", 1/4" 5/32" 3/16", 1/4" 3/16" 1/4", 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" Inch size Controlled flow (Free flow) 100 130 230 290 460 420 660 920 1050 1390 Air flow /min (ANR) 1.5 2 3.5 4.5 7 6.5 10 14 16 21 Effective area (mm 2) Note) Flow rate values
.: 6 C6 VP4 U D U side D side 2 to 8 2 to 8 9 to 16 C8 Embedded type One-touch fitting Applicable tubing O.D.: 8 D-sub connector cable assembly VZS B Both sides Stations Symbol Passage Porting specifications 5(R1), 3(R2) 1(P) Common Common VFS 02 2 stations Symbol Side 4(A), 2(B) D side 1 16 VS4 16 stations Max. 16 stations. VQ7 Refer to page 3-7-4 for wiring specifications.
Motor side 16 pulse End side 1 A Parameter no.
ZS-27-C) Rotate 90 to mount. 16-3-30 9 Series PSE Specific Product Precautions 3 Be sure to read before handling. Regulating Pressure Range and Rated Pressure Range Caution Set the pressure within the rated pressure range. The regulating pressure range is the range of pressure that can be set on the controller.
VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 2 2 2 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA VY130-8 0 5 10 15 20 VY140-8 0 5 10 15 20 VY150-8 0 5 10 15 20 3 3 3 mA mA mA Command signal Command signal Command signal VY1700 1 VY1900 1 Input signal voltage (current) for starting the operation of a pilot valve VY1D0 (direct operated) (
Solenoid Output Assembly Instance ID Type Description Byte 35 Output 16 Solenoid Output Points 2 37 Output 32 Solenoid Output Points 4 The data format is shown below.
Motor side 16 pulse End side 1 A Parameter no.
PV SV 16. Select data length (simple communication protocol) from the table below with [] key or [] key, and confirm by pressing SEL.
0.1 0.1 0.1 VY130-5 VY140-5 VY150-5 0 1 2 3 4 5 0 1 2 3 4 5 0 1 2 3 4 5 V V V VY130-6 VY140-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 mA mA mA 4 0 8 12 16 20 4 0 8 12 16 20 4 0 8 12 16 20 2 2 2 VY130-8 0 5 10 15 20 VY140-8 0 5 10 15 20 VY150-8 0 5 10 15 20 3 3 3 mA mA mA Command signal Command signal Command signal VY1700/1701 VY1900/1901
/32 EX260-SEN3/-SEN4: 16/16 1: The product for "Device Revision 2.2" manufactured in June 2016 or later supports this specification version.
Piston Speed Standard Stroke Bore size (mm) 16 25 40 63 20 32 50 Bore size (mm) Max. manufacturable stroke (mm) Standard stroke (mm) 80 to 500 mm/s Without stroke adjustment unit (MY3A) 80 to 1000 mm/s Without stroke adjustment unit (MY3B) 16, 20, 25 32, 40, 50 63 100, 200, 300, 400, 500, 600 700, 800, 900, 1000, 1200 1400, 1600, 1800, 2000 3000 80 to 1000 mm/s (16, 20 L unit: 80 to 800 mm