Style: Pressure Switch w/ T-Spacer, Body Size: 20 (AC20), Thread Type: Rc, Port Size: 01 (1/8), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch w/ T-Spacer, Body Size: 30 (AC30), Thread Type: Rc, Port Size: 01 (1/8), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch with Piping Adapter, Body Size: 20 (AC20), Thread Type: Rc, Port Size: 01 (1/8), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa, Mounting: Right

Body Size: AC20, Thread Type: Rc, Port Size: 1/8, Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 3m, Pressure Unit of the Scale Plate: MPa, Mounting: Right

Style: Pressure Switch w/ T-Spacer, Body Size: AC20, Thread Type: Rc, Port Size: 1/8, Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 3m, Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch w/ T-Spacer, Body Size: AC30, Thread Type: Rc, Port Size: 1/8, Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 3m, Pressure Unit of the Scale Plate: MPa

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) Flow Characteristics Flow Characteristics ZM10H ZM13H Exhaust Characteristics Exhaust Characteristics Max. suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Max. suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure (kPa

Clean Air Module

Digital Flow Switch Unit Specifications Detection type Heat type Measured flow range 50 to 500 L/min 5 to 100 L/min Minimum unit setting 5 L/min 1 L/min Accumulated pulse flow rate exchange value (Pulse width: 50 [ms]) 5 L/pulse 1 L/pulse Accumulated flow range 0 to 9 L 5% F.S. or less (15 to 35C: Based on 25C) Linearity 2% F.S. or less Repeatability 5% F.S. or less (15 to 35C: Based on 25C

ZMA

min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) ZMA10H ZMA13H Exhaust Characteristics Exhaust Characteristics Flow Characteristics Flow Characteristics Max. suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Max. suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure (kPa) Vacuum pressure

PFxx-OMK0003CN

PF-OMK0003CN-E PFMV505 PFMV510 PFMV530 PFMV505F PFMV510F PFMV530F N2 (JIS B8392-1 1.1.21.6.2ISO8573-1 1.1.21.6.2) 2 2 2 () 00.5 01 03 -0.50.5 -11 -33 1 L/min L/min L/min L/min L/min L/min 2F.S. 3 2F.S.(1535 ) (25) 5F.S.(050 ) 2F.S.(0300 kPa) 5F.S.(-700 kPa) (0kPa 4) -70300 kPa -100400 kPa 500 kPa 5 15 V 5 ms 1 k DC1224 V10(p-p) 10() 16 mA IP40 050 () 050 -1060 () 3585R.H

3 Port Air Operated Valve

VZA VTA VPA342 VPA542 VGA VPA VPA 21.5 28 VPA3 15 22 1563 3 Port/Air Operated Valve Base Mounted/Single Unit VPA300/500/700 Series How to Order VPA 3 4 4 1 01 A Series 3 5 7 VPA300 series Type of actuation A B N.C. (Normally closed) N.O.

Compact and

Type L One-touch connection Screw-in connection [L/min(ANR)] 1.

Clean Regulator

0.10 0.2 0.05 0.05 0.1 10 0 5 15 20 25 0 0 1000 500 500 1000 1500 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH4100-03 SRH4110-03 SRH4100-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 1000 500 10 5 0 15 20 25 500 1000 1500 0 0 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min 858 Clean

Series KV2 Fittings

Union 90 Elbow KV2L_ _-00 D2 D1 Applicable Tube M L Q D1 D2 M L App. Tube OD (inch) Q M Min. Flow Dia.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

U S C E Padlock mounting position D C Padlock mounting position D SUP. SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH.

SL5200

FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 3PW 4PW 0 L L MPA MPA 2PW 3PW 4PW 10 qIN wOUT eGauge port (Inlet) rGauge port (Outlet) 1) Other range available.

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 With neon light (110 VAC, Green) Flow range ZSP 3 With neon light (220 VAC, Red) Low flow setting possible (1 l/min) 10 1 to 10 l/min 4 With neon light (220 VAC, Green) 20 10 to 20 l/min Simple flow setting Without removing the cover, you can set

VQZ100V-OMT0001

VQZ100 ( ( ( ( ) ) ) ) 90 VQZ200/300/1000/2000/3000 VQZ200/300/1000/2000/3000 VQZ200/300/1000/2000/3000 VQZ200/300/1000/2000/3000 DC L,M L,M L,M L,M > > > > > > DIN DIN DIN DIN > > > YSYOS (YZ) ( ( ( ( ) ) ) ) 90 [ 0.1Nm ] 8 No.VQZ100V-OMT0001 VQZ Series/ / / / > > > (YZ) ) 1V (+-) () (1mm) 3.23.7mm 3 3 3 3

Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: 01 (Rc1/8), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)

ARX Series

/4 Piping port size NPT 1/8, 1/4 Pressure gauge port size 435 (3.0) Proof pressure psig (MPa) 290 (2.0) Maximum operating pressure psig (MPa) ARX20-N02 7~120 (0.05 to 0.85) Standard Regulating pressure range psig (MPa) 7~45 (0.05 to 0.3) Low pressure Fluid Air ARX20-N01BG Ambient and fluid temperature 23~140F ( 5 to 60C) (with no freezing) Weight lbs (Kgf) .24 (0.11) How to Order ARX2 0 01