STOPPER CYLINDER

RS(D)Q32/40/50LZ How to Order Lever type RS(D)Q32/40/50BZ RS(D)Q32/40/50CZ RS(D)Q32/40/50DZ RS(D)Q32/40/50EZ Mounting base Table 1. Recommended hole diameter Recommended hole Rod cover boss diameter of the mounting base O.D. Model T D RS(D)Q32 36 38 RS(D)Q40 44 48 RS(D)Q50 56 57 Fig. 3 6 - 7-3.

JXCx-OMT0002

JXC-OMT0002-C Model LEHF10 LEHF20 LEHF32 LEHF40 Lead symbol K Lead [mm] 40/15 50/15 70/16 70/16 (2.667) (3.333) (4.375) (4.375) Max. speed [mm/s] 80 100 100 100 Min. speed [mm/s] (Independent and interpolation) 5 5 5 5 Min. speed [mm/s] (Speed tuning control) 7 8 8 8 Model LEHS10 LEHS20 LEHS32 LEHS40 Lead symbol K Lead [mm] 255/76 (3.355) 235/56 (4.196) 235/40 (5.875) 235/40 (5.875) Max.

PF-OMN0009_C

-45No.PF-OMN0009CN-F PF3W511-U25/PF3W521-U30(PVC ) 2X A B D E F J K L N P Q 25 A 154 46 77 57.6 23 77 63 28 18 3.5 14 32 30 A 146 56 91 71.6 28.5 73 60.5 25 27.5 3.5 14 38 S T U V W Y Z 25 A 59 36 48 58 70 7 2 -46No.PF-OMN0009CN-F M8 (ZS-40-A) ()4 ()3 1() -47No.PF-OMN0009CN-F EPDM EPDM 11 11 PVC 420 mA 2 420 mA 11 PVC -48No.PF-OMN0009CN-F Revision history A B C D E F Note

Cylinder with Lock Double Acting, Single Rod Series CNG ø20, ø25, ø32, ø40

Cylinder with Lock Double Acting, Single Rod Series CNG 20, 25, 32, 40 How to Order Without auto switch CNG L N 32 100 D With auto switch CDNG L N 32 100 D H7BW Number of auto switches Built-in magnet Nil 2 pcs. Thread type S 1 pc. Nil Rc Mounting style n n pcs.

NVEPA|VEFseies

Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

OML0002-C

External switch signal Current consumption: 5 mA or less Max. load current: 40 mA Max. load current: 40 mA Discharge signal Residual voltage: 1 V or less Residual voltage: 1 V or less Error signal Output signal (with load current of 40 mA) (with load current of 40 mA) Max. applied voltage: DC 28 V Maintenance signal Effective charge eliminating distance 20~500 mm 0~55oC Ambient temp.

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) H0 5 to 150C H4 With 100C heater H5 With 120C heater Hightemperature type * Size 16 is not applicable to H4, H5.

Digital Flow Monitor

In conditions other than horizontal installation and 0.35 MPa supply pressure, the output may not be 0 L/min. -79No.PF-OMU0007-D Dimensions -80No.PF-OMU0007-D Bracket A (Part No: ZS-46-A1) Bracket B (Part No: ZS-46-A2) -81No.PF-OMU0007-D Panel mount adapter (Part No: ZS-46-B) Panel mount adapter + Front protective cover (Part No: ZS-46-D) -82No.PF-OMU0007-D Lead wire with connector (Part

Digital Flow Switch (Remote type sensor unit)

12 PF3W540 1/2, 3/4 98 71 38 53.6 48.6 19.2 32 28 49 35 28 16.8 2.7 depth 12 PF3W511 3/4, 1 124 92 46 62.6 57.6 23 41 42 63 48 28 18 3.5 depth 14 Symbol Bracket dimensions Model S T U V W WX Y Z PF3W504 24 22 32 40 50 4.5 5 1.5 PF3W520 28 22 32 40 50 4.5 5 1.5 PF3W540 34 30 42 48 58 4.5 5 1.5 PF3W511 44 36 48 58 70 5.5 7 2 -41No.PF-OMN0010-J PF3W521 Basic type Symbol Piping port size A AA

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

specifications Model P1 P2 A B Note 1) C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K)

Hydraulic Cylinder

You do not need to specify "N" (i.e., without lead wire) for D-A3, D-A44, D-G39, and D-K39. This is the only standard specification automatically available for these models. D-A9V, M9V, M9WV, and M9A(V) models cannot be mounted on 25 to 40. Since there are applicable auto switches other than listed, refer to page 310 for details.

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

(g) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D When mounting Series CU, refer to the below table. Tightening Torque/ 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) Bore size (mm) Hexagon socket head cap screw dia.

ISO Standard Hydraulic Cylinder ø 40, ø 50, ø 63, ø 80, ø 100 CHSD Series

ISO Standard Hydraulic Cylinder 40, 50, 63, 80, 100 CHSD Series 10 MPa CHQ How to Order CHK 100 M9BW CH D SD B 40 CHN Magnet for auto switch Number of auto switches Series type CHM Nil D Without Nil S n 2 pcs. Built-in Symbol D Nominal pressure CHS CHS 1 pc. 10 MPa "n" pcs.

212

140.5 LVR50-V19 22 80 120 169 C F E Breathing port M5 x 0.8 J Tube extensions 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Breathing port M5 x 0.8 Model A B C D E LVR20-T07(06) 40 40 49.3 68 20.1 LVR40-T11(10) 82.5 82.5 89 115 33 IN C F Model F G H J K LVR20-T07(06) 8 27 56 33.5 126.2 LVR40-T11(10) 14 64.5 100 40 183.3 E K J J Breathing port M5 x 0.8 5 Applicable Fluids Regulator

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 2

Lead wire length symbols: 0.5 m Nil (Example) A73C 3 m L (Example) A73CL 5 m Z (Example) A73CZ None N (Example) A73CN D-P5DWL type is available from 40 up to 100 only. There are other applicable auto switches other than the listed above. For details, refer to page 7-6-23.

ZL3-OM00601

(mg/m3) 0.1 d 0.5 0.5 d 1.0 1.0 d 5.0 point() 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 Not specified 90,000 1,000 3 -20 3 1 4 Not specified Not specified 10,000 4 +3 4 5 5 Not specified Not specified 100,000 5 +7 6 +10 3.3.2 Air pressure 1) Operation with a pressure exceeding the maximum operating pressure leads to breakage of the product.

VS7-6

ISO Interface Solenoid Valve/SIZEq Metal Seal SeriesVS7-6 Single solenoid (FG-S) Double solenoid (FG-D) Reverse pressure (YZ-S) Reverse pressure (YZ-D) 2 position 3 position SV SY VS7-6-FPG-D Closed centre (FHG-D) Exhaust centre (FJG-D) Double pilot check (FPG-D) Pressure centre (FLG-D) SYJ SX VS7-6-FHG-D Option VK Standard Specifications 5 to 60 oC 0.1 to 1.0MPa Air/lnert gas Fluid Operating

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

specifications Model P1 P2 A B Note 1) C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K)

MWB

Cylinder with Lock Double Acting, Single Rod 32, 40, 50, 63, 80, 100 MWB Series RoHS How to Order 50 B 40 MWB With auto switch MDWB M9BW B 40 50 Bore size With auto switch (Built-in magnet) Number of auto switches Pivot bracket Auto switch 32 32 mm 40 40 mm 50 50 mm 63 63 mm 80 80 mm 100 100 mm Nil 2 S 1 3 3 n n Only for D and T mounting types.

Air Cylinder Short Type Standard: Double Acting, Single Rod Series CM3 ø20, ø25, ø32, ø40 How to Order CM3 L 40 150 With auto switch CDM3 M9BW L 150 40 With auto switch (Built-in magnet) Number of auto switches Rod end thread Nil Mounting 2 pcs. Bo

Bore size Male thread Female thread Long male rod end Nil F G T E BZ FZ UZ 20 25 32 40 B L F G C D U Head trunnion Integral clevis Boss-cut/Basic Boss-cut/Rod flange Boss-cut/Rod trunnion Basic Foot Rod flange Head flange Single clevis Double clevis Rod trunnion 20 mm 25 mm 32 mm 40 mm G: Same rod end dimensions (A, AL, H) as CM2 series.