KG

Bulkhead Connector: KGE Effective area (1) (mm 2) H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

Flow Control Equipment

Tube size AQ 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 ASV Body size AS1001F AS2001F AS2051F AS3001F AS4001F TMH-01J TMH-03J AK TMH-05 TMH-07 TMH-09 ASS TMH-11 TMH-13 Dimensions Model D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Symbol Metric Inch TMH-23J TMH-04J 1/8J 1/32J 3/16 6 1/4 8 5/16 10 3/8 12 1/2 8.4 9.3 11.7 11.6 13.1 13.5 15.5 18.5 18.8 21.2 22 TMH-01J TMH-03J TMH-05 3.3 4.5

CRB2/CRBU2/CRB1

P411020-5 P411030-5 P411040-5 P411050-5 Model CRB1LW 50 CRB1LW 63 CRB1LW 80 CRB1LW100 Connector, Without lead wire CN Notes) Connectors are available only for auto switch types D-R73, D-R80, D-T79.

Rotary Actuator/Vane Style Series CRB2

D-LC05: Lead wire 0.5 m D-LC30: Lead wire 3 m D-LC50: Lead wire 5 m Nil L C CL CN Shaft type W Double shaft with single flat (Size 10 to 30) Long shaft key, Short shaft with single flat (Size 40) Vane type S D Single vane Double vane Pattern Auto switch Nil Without auto switch (built-in magnet) Nil Standard Simple Specials/Made to Order P For the applicable auto switch model, refer to the

C95

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size (mm) E B1 B2 B3 TG1 T I1 (min) I2 FL H d1 d2 d3 CN SR (max) R 32 14 34 3.3 3 5 22 10 30 10 45 32.5 5.5 10.5 6.6 11 17 40 16 40 4.3 4 5 25 10 35 12 55 38 5.5 11 6.6 13 20 50 21 45 4.3 4 5 27 10 40 16 65 46.5 6.5 15 9 18 22 63 21 51 4.3 4 5 32

Title not found

speclcal or S.9 e, dcub e and 3 p.srt o. soleno d va ves.a. be Jsea cn almalilod use.'a s.!r e soen.id vr lresllt I an unused coltro r lfa lilhs s.oldesred,ofderwtha spcc l cd n o!1 !/hen the .u t I s efcer tjipe s rse. k.eo:fe erl alsl porl fon c.mr.!

Rotary Actuator

Electrical entry/Lead wire length Patterned sequencing order Nil Grommet/Lead wire: 0.5 m Grommet/Lead wire: 3 m Connector/Lead wire: 0.5 m Connector/Lead wire: 3 m Connector/Without lead wire Standard Nil L C P Simple Specials/Made to Order CL CN For details, refer to pages 19 to 30.

Clamp Cylinder with Lock Series CLK1

LOCK Clamp cylinder with lock Cylinder with lock (Series CN) Clamped locking B A SOL.C SOL.B SOL.A W LOCK Able to maintain an unlocked state Assembly and maintenance simplified Port positions can be selected to accommodate mounting conditions Positions of ports, by-pass piping and auto switch rails can be changed. (Refer to ordering instructions on pages 1 and 7 for details.)

ZP

H2 H2 L1 M1 M1 M1 D Pad side Pad side Pad side ZP2V-A01ZP2V-AN1ZP2V-A5ZP2V-A8ZP2V-AG1Vacuum generator side D Vacuum generator side M2 M2 L3 L2 H1 Vacuum generator side L2 L33 H1 M2 H1 (L4) (L4) No.0.8 No.0.8 (L4) No.0.8 H2 H2 L1 L1 L1 H2 M1 M1 M1 Pad side Pad side Pad side ZP2V-B01ZP2V-BN1ZP2V-BG1ZP2V-B5ZP2V-B61 The place at the vacuum generator side where the tool is applied. 2 The place

CL

to 450 to 450 to 500 0 26 20 57.5 69 69 76 73.5 0.033 64.5 83.5 0.033 0 0.033 0 0.033 26 64.5 70 83.5 100.5 90.5 32 Boss cut (mm) MM Bore 20 25 32 40 N 15 15 15 NA 24 30 S 127 137 139 167 Bore ZZ 168 182 184 217 H1 5 6 6 8 K 5 5.5 5.5 7 PL 20 24 24 24 PW 38 41 41 41 I 28 H 41 45 45 50 PH 19.5 24 24 24 ZZ 181 195 197 233 P Z 37 41 41 45 GR 4 7 7 7 PG 22 27 27 29 GQ 4 7 7 8 GL 6 9 9 11 NN H2

Air Cylinder

Width across flats MG MN MI Width across flats B2 MK H2 ML + Adjustment 4 Stroke MH + Stroke + Adjustment ZZ + 2 x Stroke + Adjustment Dimensions (mm) Symbol Stroke range H2 MN ZZ MG MH MI MK B ML Bore size Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 40 50 63 80 60 70 85 102 116 6 8 8 10 12 M10 x 1.25 M14 x 1.5 M14 x 1.5 M16 x 1.5 M20 x 1.5 180 197 205 253 267 19 24 24 27 32 45 49 49

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

E B1 B2 B3 L1 TG1 T l1 (Min.) l2 FL H (Max.) d1 d2 d3 CN SR (Max.)

C95

SR (max) R 32 14 34 3.3 3 5 22 10 30 10 45 32.5 5.5 10.5 6.6 11 17 40 16 40 4.3 4 5 25 10 35 12 55 38 5.5 11 6.6 13 20 50 21 45 4.3 4 5 27 10 40 16 65 46.5 6.5 15 9 18 22 63 21 51 4.3 4 5 32 12 45 16 75 56.5 6.5 15 9 18 25 80 25 65 4.3 4 5 36 16 45 20 95 72 10 18 11 22 30 100 115 25 75 6.3 89 4 5 10 41 16 55 18 11 20 22 32 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN

Direct Solenoid

The inlarlac unn is dosigned 1o speratsly contol the t'.ssura ol one valv and sul minlajn a cn nmon manildd pro5surc. This unir coilrols prclurc to cyiindr sPaoror FEATUNES: B c 1 . Eliminals ti6 n6d lo. oxlonal regulalors on nnsPRO101 5 (127) 1.375 (34.9) 1.50 (3. r) 2. Sinplifs plphg arang6it'nls. 3, FullraEeol Fssur rgula oN ttom 7 io 120 PSl, 4.

Digital Flow Switch (Integrated display type)

Hysteresis mode: [H_2] Window comparator mode: [ H2] The snap shot function can be used. (Refer to page 64) Press the SET button to set. Move on to delay time setting. Delay time setting Press the UP or DOWN button to select the delay time. Delay time set range: 0.00 to 60.00 [s] Press the SET button to set.

Series AK1000

Applicable Fluid Process Gas Molecular Formula Process Gas Molecular Formula Ar CClF3 Argon Halocarbon 13 C2Cl2F4 CF4 Halocarbon 114 Halocarbon 14 C2ClF5 CH2F2 Halocarbon 115 Halocarbon 32 C2F6 CH4 Halocarbon 116 Methane C2H2 CHF3 Acetylene Halocarbon 23 C2H2F4 CO2 Halocarbon 134A Carbon Dioxide C2HF5 H2 Halocarbon 125 Hydrogen C3F8 He Halocarbon R218 Helium C3H6 Kr Propene Krypton C3H8 N2

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

With rear end lock: CBM2B Bore size -HN Stroke Manual release non-locking style (Additional symbol: N) With front end lock: CBM2B Bore size -RN Stroke Manual release locking style (Additional symbol: L) With double end lock: CBM2B Bore size -WN Stroke With rod boot (mm) HN (MAX) Stroke range Symbol B2 D DL H2 HR B1 A AL Eh8 F G H H1 I K MM MO N NA NN P S ZZ Bore (mm) 20 25 32 40 0 0.033 0

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

With rear end lock: CBM2B Bore size -HN Stroke Manual release non-locking style (Additional symbol: N) With front end lock: CBM2B Bore size -RN Stroke Manual release locking style (Additional symbol: L) With double end lock: CBM2B Bore size -WN Stroke With rod boot (mm) HN (MAX) Stroke range Symbol DL B2 D H2 HR B1 A Eh8 F I K MO NA P S H1 H NN AL G MM N ZZ Bore (mm) 20 25 32 40 0 0.033 0

High Vacuum Angle Valve

K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

= m x (a2 + b2) / 12 + m x H2 = 0.4 x (0.102 + 0.062) / 12 + 0.4 x 0.042 = 0.00109 kgm2 Inertial moment Kinetic energy 6 Confirm that the load's kinetic energy is within the allowable value. 1 / 2 x x 2 allowable energy = 2 / t (: Terminal angular velocity) : Rotation angle (rad) 1/ 2 x 0.00109 x (2 x ( / 2) / 0.3)2 = 60 mJ Allowable energy OK t : Rotation time (s) Allowable kinetic