CNA

(Tampa) 8507-H Benjamin Road Tampa, FL 33634 Tel: (813) 243-8350 FAX: (813) 243-8621 SMC Pneumatics Inc. (Chicago) 27725 Diehl Road Warrenville, lL 60555 Tel: (630) 393-0080 FAX: (630) 393-0084 SMC Pneumatics Inc. (Portland) 14107 N.E. Airport Way Portland, OR 97230 Tel: (503) 252-9299 FAX: (503) 252-9253 SMC Pneumatics Inc. (L.A.) 14191 Myford Road Tustin.

CQS

(Tampa) 8507-H Benjamin Road Tampa, FL 33634 Tel: (813) 243-8350 FAX: (813) 243-8621 SMC Pneumatics Inc. (Chicago) 27725 Diehl Road Warrenville, lL 60555 Tel: (630) 393-0080 FAX: (630) 393-0084 SMC Pneumatics Inc. (Portland) 14107 N.E. Airport Way Portland, OR 97230 Tel: (503) 252-9299 FAX: (503) 252-9253 SMC Pneumatics Inc. (L.A.) 14191 Myford Road Tustin.

Series IDG

(Tampa) 8507-H Benjamin Road Tampa, FL 33634 Tel: (813) 243-8350 FAX: (813) 243-8621 SMC Pneumatics Inc. (Houston) 9001 Jameel, Suite 180 Houston, TX 77040 Tel: (713) 460-0762 FAX: (713) 460-1510 SMC Pneumatics Inc. (Portland) 14107 N.E. Airport Way Portland, OR 97230 Tel: (503) 252-9299 FAX: (503) 252-9253 SMC Pneumatics Inc. (Cincinnati) 4598 Olympic Blvd.

%silltr

/sq.inch (psi) 14.5 0.06895 Table 3.3a Conversion of Units 1.308 0.06102 0.03531 cu. yard cu. inch cu. fl- P N E U A T t c T E c H N o L o c Y Engli$ to fil.lrlc (itulriply By-To Obtain -) llrlric lo Englilh (Mulridy By-To obrain -) Toqoc n. b r.659 It. lb 0.13811 L.n!tl mls 2.51 in 25.,4 in 2.!A Ir 0.046 lorNr N.n 0.73?

1.1

Piping adapter Copper alloy HRG001-W to 015-W How to Order [Dustproof filter set] FL HRG Applicable Thermo-cooler Applicable Thermo-cooler Quantity per set Symbol HRG001-A HRG002-A 001 005 010 1 HRG005-A 1 HRG010-A 1 (Large) 1 (Small) 2 015 HRG015-A Note) Refer to page 30 for dimensions and page 34 for mounting.

HRX-OM-W002

torque1.5Nm) HRR Series 8.4 Replacement of consumables 8-15 HRX-OM-W002 Chapter 8 Control, Inspection, Exchange and Cleaning 8.5 Electrical schematic diagram HRR012/018/024/030-A-20-*** Air-cooled type Thermister Thermister T2 T1 ExpansionValve ExpansionValve PressureSensor PressureSensor PressureSensor Not connected at option Z/Z1 Option T Flow Sensor t t EV1 EV2 PTSensor PS1 PS2 PS3 PT FL

Digital Gap Checker ( compatible)

Min. cycle time 4.2 ms Process data length Input Data: 8 byte, Output Data: 0 byte On request data communication Available Data storage function Available Event function Available Vendor ID 131 (0x0083) ISA3-FL-: 341 (0x0155) ISA3-GL-: 342 (0x0156) ISA3-HL-: 343 (0x0157) Device ID 1: Refer to the relationship between the display value and distance on page 20 for details. 2: For ISA3-F type

VQ5000

(Tampa) 8507-H Benjamin Road Tampa, FL 33634 Tel: (813) 243-8350 FAX: (813) 243-8621 SMC Pneumatics Inc. (Houston) 9001 Jameel, Suite 180 Houston, TX 77040 Tel: (713) 460-0762 FAX: (713) 460-1510 SMC Pneumatics Inc. (Portland) 14107 N.E. Airport Way Portland, OR 97230 Tel: (503) 252-9299 FAX: (503) 252-9253 SMC Pneumatics Inc. (Cincinnati) 4598 Olympic Blvd.

XL

(Tampa) 8507-H Benjamin Road Tampa, FL 33634 Tel: (813) 243-8350 FAX: (813) 243-8621 SMC Thailand Ltd. INDIA SMC Pneumatics (India) Pvt., Ltd. North America CANADA SMC Pneumatics (Canada) Ltd. MEXICO SMC Pneumatics (Mexico) S.A. de C.V. SMC Pneumatics Inc. (Charlotte) 5029-B West W.T. Harris Blvd. Charlotte, NC 28269 Tel: (704) 597-9292 FAX: (704) 596-9561 SMC Pneumatics Inc.

MGP

(Tampa) 8507-H Benjamin Road Tampa, FL 33634 Tel: (813) 243-8350 FAX: (813) 243-8621 SMC Pneumatics Inc. (Chicago) 27725 Diehl Road Warrenville, lL 60555 Tel: (630) 393-0080 FAX: (630) 393-0084 SMC Pneumatics Inc. (Portland) 14107 N.E. Airport Way Portland, OR 97230 Tel: (503) 252-9299 FAX: (503) 252-9253 SMC Pneumatics Inc. (L.A.) 14191 Myford Road Tustin.

Electric Rotary Table

Tf = mgL Ts = FL Ts : Static load (Nm) F : Clamping force (N) L : Distance from the rotation center to the clamping position (m) Ta : Inertial load (Nm) : Moment of inertia (kgm2) : Angular acceleration/deceleration (/sec2) : Angular speed (/sec) Tf : Resistance load (Nm) m : Load mass (kg) g : Gravitational acceleration 9.8 (m/s2) L : Distance from the rotation center to the point of

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Body type Plug-in type Non plug-in type J4NPTF NWFS2(XX).fl.()1T1 NWFS.:"P.()1T2 Part No. Body type Plug-in type Non plug-in type Part No. WFS2000-10A ~NFTF ~U~FS2(XX).fl.Q2T 1 NWFS2P.Q2T2 Body type Plug-in type Non plug-in type Pe; No.

LEC-OM069xx

-1*2 System Alarm FL-2*2 CPF00 Digital Operator Transmission Error 1 CPF01 Digital Operator Transmission Error 2 A.

CJ2

(Tampa) 8507-H Benjamin Road Tampa, FL 33634 Tel: (813) 243-8350 FAX: (813) 243-8621 SMC Pneumatics Inc. (Chicago) 27725 Diehl Road Warrenville, lL 60555 Tel: (630) 393-0080 FAX: (630) 393-0084 SMC Pneumatics Inc. (Portland) 14107 N.E. Airport Way Portland, OR 97230 Tel: (503) 252-9299 FAX: (503) 252-9253 SMC Pneumatics Inc. (L.A.) 14191 Myford Road Tustin.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CE1F Bore size Stroke RHC MK(2) FV 2-FD RS Q G RS H A 2-O (Special cap bolt) FL FX FZ RZQ Head side flange style: MI W S CE1G Bore size Stroke CEP1 CE1 FV CE2 2-FD ML2B 2-O (Special cap bolt) A + Stroke FL FX FZ C J G5-S CV Double clevis style: CE1D Bore

LEC-OM071xx

-1*2 System Alarm FL-2*2 CPF00 Digital Operator Transmission Error 1 CPF01 Digital Operator Transmission Error 2 A.

7ND9071en

Valve series MBV QMBV 1) Valve size T5, QT5 QXT5 T25, QT25 QXT25 R, QR E RSOFT 3) FL MBV QMBV 2) D, P, C 4) ZX mm in Dead angle, % 15 1/2 15 20 3/4 15 25 1 14 25.5 19.5 15 25.5 27 12.5 25/1 1/1 11 25/2 1/2 11 25/3 1/3 10 40 1 1/2 12 24.5 12.5 12 16 21 12.5 50 2 10 9 13.5 24.5 12.5 18 8 17 20.5 23 12.5 65 2 1/2 9 13 18 80 3 10 8 12 18 8 16.5 8.5 9 8.5 15.5 100 4 10 8 12 16.5 8.5 16 9 8 7 14.5

pneuaire

/sq.inch (psi) 14.5 0.06895 Table 3.3a Conversion of Units 1.308 0.06102 0.03531 cu. yard cu. inch cu. fl- pneuaire P N E U A T t c T E c H N o L o c Y Engli$ to fil.lrlc (itulriply By-To Obtain -) llrlric lo Englilh (Mulridy By-To obrain -) Toqoc n. b r.659 It. lb 0.13811 L.n!tl mls 2.51 in 25.,4 in 2.!A Ir 0.046 lorNr N.n 0.73?

0.4

When mounting elbow fitting assembly (VVQ1000-FL) on the edge of manifold station, select a silencer, AN15-C08.

CL

(Tampa) 8507-H Benjamin Road Tampa, FL 33634 Tel: (813) 243-8350 FAX: (813) 243-8621 SMC Pneumatics Inc. (Chicago) 27725 Diehl Road Warrenville, lL 60555 Tel: (630) 393-0080 FAX: (630) 393-0084 SMC Pneumatics Inc. (Portland) 14107 N.E. Airport Way Portland, OR 97230 Tel: (503) 252-9299 FAX: (503) 252-9253 SMC Pneumatics Inc. (L.A.) 14191 Myford Road Tustin.