AS

Rod O.D.Applicable tubing O.D. 10 20 25 30 M5 standard 01 standard 02 standard 03 standard 04-04 06-06 08-08 10-10 4 4 6 6 8 8 10 10 wBring up the body, while holding it down. w eTake the finger off the release ring and remove the speed controller from the One-touch fitting.

RLQ

YB-03 32, 40 80 9 6.5 10 18 50 d2 d1 YB-05 50, 63 120 11 6.5 12 22 60 L UT C UA (mm) Part No.

LEC-OM036xx

CN2: TB/PC connector.31 9. 1 How to use.31 10. LED display.32 10. 1 LED display.32 10. 2 Controller IF communication status and LED display.33 11. Mode.34 11. 1 Outline.34 11. 2. Step data input mode .34 11. 3. Numerical data input mode.34 11. 4. Data writing mode.36 12.

Series VS

VSS8-6 VSS8-8 VSS8-10 VSS8-6 VSS8-8 VSS8-10 Description Description VSS8-10 VSS8-8 VSS8-8 VSS8-10 VSS8-6 VSS8-6 VSS8-10 VSS8-8 VSS8-6 1.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Direct Operated Precision Regulator/Modular Style (For Special Applications) -ARP20 to -ARP40 10 20 21 10 20 21 JIS symbol Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) Regulator with backflow function Regulator -ARP20K to -ARP40K 10 20 21 10 20 21 Clean room compliant (10-ARP). Copper-free, fluorine-free (20-ARP).

ZQ

XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 13-9-10

Compact Cylinder with Air Cushion and Lock Series RLQ

Extension locking Retraction locking 100 100 63 63 50 50 40 Load mass kg Load mass kg 40 10 10 32 32 0.5 MPa 0.4 MPa 0.5 MPa 0.4 MPa 1 1 100 500 100 500 Maximum speed mm/s Maximum speed mm/s Allowable load mass (Graph (2)) Horizontal (With and without switch) 10 Load mass m (kg) 1 63 50 40 32 m 0.1 10 100 Eccentric distance + Stroke L (mm) l S l: Eccentric distance (mm) S: Stroke (mm) L Cushion

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

HRX-OM-W069

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Specifications Series PSE200A PSE533 PSE543 PSE563 PSE573 PSE530 PSE540 PSE560 PSE570 Applicable SMC pressure sensor PSE550 PSE531 PSE541 PSE561 PSE532 PSE564 PSE574 PSE575 PSE576 PSE577 Rated pressure range 0 to 2 kPa 0 to 101 kPa 100 to 100 kPa 0 to 100 kPa 0 to 500 kPa 0 to 1 MPa 0 to 2 MPa 0 to 5 MPa 0 to 10 MPa Display/Set pressure range 0.2 to 2.1 kPa 10 to 105 kPa 105 to 105 kPa 10

IO-Link/ELECTRO-PNEUMATIC REGULATOR

F_1 and F_2 have setting ranges of 0-90%F.S. and 10-120%F.S., respectively. However, the set pressure exceeds rated output; 100F.S. is out of warranty. (refer to Fig.2,3) The values are necessary to satisfy F_1 + 10%F.S. < F2. If not, the previous values are reflected in this function. Default of Zero adjusting: 0x0 Bit Bit 13 (It is Bit 12 up to 100%.)

Compact Vacuum Ejector Series ZQ

XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 10

AFF

Option J: With drain guide Bracket (Option) 1/4B female thread T: With element service indicator Maintenance space HA Drain AT ID AMG AFF Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5

Compact Cylinder with Air Cushion and Lock Series RLQ

Applicable pin Part No. 32, 40 50, 63 10 14 18 22 IY-G04 IY-G05 Part No.

PSE550/300

Applicable pressure sensor PSE531 PSE541 PSE561 PSE530 PSE560 PSE564 PSE550 PSE532 101 to 101 10 to 101 10 to 100 0.1 to 1 50 to 500 0.2 to 2.00 Set (differential) pressure range 5%R.D.

VXR21/22/23

Allowable voltage fluctuation is 10% of the rated voltage.

VCB

Orifice size (mm) 2 3 4 5 7 10 Symbol 2 3 4 5 7 10 Class 3 Class 2 Class 4 Electrical entry G Grommet C Conduit Refer to the table below for orifice and port size combinations.

Clean Regulator

Model XT13-394-06 XT13-394-10 INA-48-1-06 INA-48-1-10 INA-48-16-10 INA-48-16-06 INA-48-58-10-H INA-48-58-06-H Port size Rc3/4 Rc1 Rc3/4 Rc1 Rc3/4 Rc1 Rc3/4 Rc1 Relief mechanism Non-relief Relief Non-relief Fluid Deionized water (Pure water) Air, N2 Proof pressure 1.9 MPa 1.5 MPa Max. operating pressure 1.3 MPa 1.0 MPa Set pressure 0.1 to 1.0 MPa 0.05 to 0.5 MPa 5 to 60C Ambient and fluid

Clean Air Module

Note) One-touch fitting 10 PB AMG PA 76 37.5 AFF 25 13.2 (47.5) 60 49 (77.5) 25 45 45 AM 349 Note) This port is unavailable.

AMG

150 H 166 187 187 218 218 241 241 277 334 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 5.5 6 6 7 7 9 9 9 11 10 10 10 10 10 10 10 10 10 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 100 113 119 145 151 166 173 200 253 13 13 16 16 19 19 22 22 32 159 172 178 204 210 225 232 259 311 AMG150 AMG250 AMG350 AMG450 AMG550 AMG650 AMG150