LA-OMP0023

5 20 40 5 20 40 2 1 1 0 0 0 20 40 60 80 100 0 20 40 60 80 100 Duty [%] Duty [%] Fig. 4-3 Allowable thrust force setting values.

HEC-OM-S008

sum CR (H) (L) Thermo-con STX COM Data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK CR (Possible to omit) Host SOH UT ENQ COM Check sum CR (H) (L) Thermo-con SOH UT STX COM Data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK CR (Possible to omit) COM indicates communication command.

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I W h s i r l Black o-Y69A.Y6gB.O-Y7PV D-Y598.Y698/2 wire system l " ' . . r 6 7 7.5 I 8.5 1--&9p9!9q E!

44

9 12 10 14 15.8 18.7 5.8 6.6 d L 15 17 22.2 7.6 M L M L 16 17 24.3 8.5 21 22 28 9.3 324 KFG2 Series Stainless Steel 316 Insert Fittings Applicable Tubing: Metric Size, Connection Thread: R, Rc Dimensions Bulkhead Union: KFG2E Applicable tubing size (mm) O.D.

Pressure Sensor Controller

-28-A Length 2 m Bracket ZS-28-B With set screws M3 x 5 L (2 pcs.)

Digital Gap Checker

For ISA3-G type, the range is up to 280, with a hysteresis of 20.

Digital Gap Checker

For ISA3-G type, the range is up to 280, with a hysteresis of 20.

IR1000/2000/3000

80 0.8MPa T Rc(PT) 1/8 L Rc(PT) 1/4 X1 Port size Rc(PT) 3/8 IRM Rc(PT) 1/2 Refer to page 8 for details.

Check Valve Series AK

min (ANR)) Flow rate (l/min (ANR)) Thread type Nil N F Rc NPT G AK4000-03/-04 AK6000-06/-10 Port size 0.5 MPa 0.5 MPa Port size Applicable series AK2000 AK2000/4000 AK4000 AK4000 AK6000 AK6000 Inlet pressure: 0.1 MPa Inlet pressure: 0.1 MPa 0.3 MPa 0.3 MPa 0.7 MPa 0.7 MPa 01 02 03 04 06 10 1 8 1 4 3 8 1 2 3 4 1 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 15-14-1 Series AK Construction

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

Compact Guide Cylinder End Lock Type SeriesMGP

MM 84.5 62.5 16 12 10 48 12.5 9 12.5 112 M6 24 24 34 M8 x 1.25 20 M8 x 1.25 6.6 32 25, 50, 75, 100 125, 150, 175 200, 250, 300 350, 400 91 69 16 12 10 54 14 10 14 120 M6 27 27 40 M8 x 1.25 20 M8 x 1.25 6.6 40 97 69 20 16 12 64 14 11 12 148 M8 32 32 46 M10 x 1.5 22 M10 x 1.5 8.6 50 102 74 20 16 12 78 16.5 13.5 16.5 162 M10 39 39 58 M10 x 1.5 22 M10 x 1.5 8.6 63 (mm) WB WA Bore size (mm) OB

Suction Filter with Case FH99 Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM, EPDM Model/Rated Flow Rate Model Port size Note 2) INLET OUTLET Rated flow rate (L/min) FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1B 1/2B 20 1B 3/4B 50 1 1/2B 1B 100 1 1/2B 1 1/4B 150 2B 1 1/2B 200 2B 2B 300 2 1/2B 2 1/2B 450 3B 3B 600 3 1/2B 3 1/2B 750 4B 4B 900 Note 2) Both flange

SI Unit

L/A indicator Table 6-2 L/A indicator L/A Meaning Green ON Connection via Ethernet to the SI Unit via BUS IN/OUT But no transmission or reception of Ethernet telegrams on BUS IN/OUT Orange ON or Connection via Ethernet to the SI Unit via BUS IN/OUT Transmission or reception of Ethernet telegrams on BUS IN/OUT Flashing Green/Orange OFF No physical connection to the port Green Flashing Received

MVGQ

light only) With energy saving circuit MVGQ 12/16 10, 20, 30, 40, 50, 75, 100 100 V 0.78 (With indicator light: 0.81) M L 20, 30, 40, 50, 75, 100 125, 150, 175, 200 110 V [115 V] 0.86 (With indicator light: 0.89) [0.94 (With indicator light: 0.97)] MVGQ 20 Apparent power (2) CV AC (VA) Intermediate stroke (mm) 200 V 1.18 (With indicator light: 1.22) MVGQ As for the intermediate strokes (by

11-cqs-e

Basic style Rod seal Piston seal NBR CQSB12-PS CQSB16-PS CQSB20-PS CQSB25-PS 12 16 20 25 CQSB12-PS CQSB16-PS CQSB20-PS CQSB25-PS Tube gasket Long stroke CQSB12-L-PS CQSB16-L-PS 12 16 20 25 CQSB12-L-PS CQSB16-L-PS CQSB20-L-PS CQSB25-L-PS Set of left nos. !5, !6, !7. CQSB25-L-PS CQSB20-L-PS Seal kit includes !5, !6, !7. Order the seal kit, based on each bore size.

AMF

2B B AMF800 to AMF1000 (Standing style) AMF801/901 (Piping support style) 20 80 AMF 0 20 80 AMF 1 Body size Body size 80 90 80 90 Port size Port size 100 With bracket 20 2BFlange 30 3BFlange 40 4BFlange 20 2BFlange 30 3BFlange 40 4BFlange Shape Piping support style Standing style 60 6BFlange How to Select Max.

VXF

32.5 38 49 20 20 23 30 30 35 23 23 25 113 127 162 103 118 152 33 37 28 1 1 1 2 17-3-76 7 The VX series will be revised shortly.

Compact Cylinder/Standard Type: Double Acting, Single Rod

Basic style Rod seal Piston seal NBR CQSB12-PS CQSB16-PS CQSB20-PS CQSB25-PS 12 16 20 25 CQSB12-PS CQSB16-PS CQSB20-PS CQSB25-PS Tube gasket Long stroke CQSB12-L-PS CQSB16-L-PS 12 16 20 25 CQSB12-L-PS CQSB16-L-PS CQSB20-L-PS CQSB25-L-PS Set of left nos. !5, !6, !7. CQSB25-L-PS CQSB20-L-PS Seal kit includes !5, !6, !7. Order the seal kit, based on each bore size.

Microspeed Cylinder: Double Acting/Single Rod Series CM2X ø 20, ø 25, ø 32, ø 40 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

UZ Without auto switch L 40 150 CM2X With auto switch CDM2X C73 Number of auto switches L 40 150 2 pcs. 1 pc.