High Vacuum L Type Valve

Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

Mist Separator

: 8 Semi-standard: 8J Piping port Piping port (4) Part No. (4) Part No. thread ty pe thread ty pe Rc Rc C3LF-8J-A C3LF-8-A G G C3LFF-8J-A NPT C3LF-8(Z)-A NPT C3LFN-8J(Z)-A Appearance and part No.

Micro Mist Separator

: 8 Semi-standard: 8J Piping port Piping port (4) Part No. (4) Part No. thread ty pe thread ty pe Rc Rc C4LF-8J-A C4LF-8-A G G C4LFF-8J-A NPT C4LF-8(Z)-A NPT C4LFN-8J(Z)-A Appearance and part No.

Compact Vacuum Unit

4 Vacuum pressure switch assembly A ZB1 ZS A M G Inch size Lead wire with connector Nil Rated pressure range Without lead wire with connector !0 One-touch fitting (Purchasing order is available in units of 10 pieces.)

Regulator Valve

Locate the source of any air leaks and repair them. (3) Pressurize port 2 (A) and exhaust air from port 3 (R). (It is possible to blow the poppet valve.) (4) Replace the valve. (5) Open the 3 (R) port. (6) Supply air to port 2 (A).

VVXA21/22

Base, Body Seal material Aluminum NBR, FKM, EPDM LQ Port A Port A LVN Port P TI/ TIL Port R Energized open Energized closed PA PAX PB Model Manifold base model Port A Rc Port P Rc Port R Rc VVXA311-stations VVXA312-stations VVXA321-stations VVXA322-stations Manifold Manifold stations Manifold B mount 2 to 10 stations 1 8 1 4 1 8 1 4 1 4 1 4 17-3-105 6 The VX series will be revised shortly

Title not found

-32 Thru 10-32 * Lock nut and washer included C Thread 9/32 7/16 Hex 5/16 Hex 1/2 D B Hex 1/4 1/4-28 3/8-24 A Thread 71 RB 4-28-10 * RBB 3/8-10 R e d u c e r B u s h i n g D i m e n s i o n s A Tthread 1/4 NPT 1/4 NPT 1/4 NPT 1/4 NPT 1/4 NPT 1/4 NPT 1/8 NPT 1/8 NPT 1/16 NPT 1/4-28 3/8-24 B Hex 9/16 9/16 9/16 9/16 9/16 9/16 7/16 7/16 5/16 5/16 7/16 C Thread 10-32 10-32 1/16 NPT 1/8 NPT 1/16

High Vacuum L Type Valve

Chemraz R is a registered trademark of Greene, Tweed Technologies, Inc.

MLU

BBA2: D-A7/A8/F7/J7 The above stainless steel screw kit is used for auto switch D-F7BAL and D-F7BAVL when it is shipped mounted on a cylinder. Also, BBA2 is included when a auto switch alone is shipped. 9-13-10 10 Series MLU Plate Cylinder with Lock Construction !4 !7 !0 !4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

Model Port size 4 6 8 10 12 ASD One-touch fittings for AS121-M5 AS221-01 AS221-02 AS321-02 AS321-03 AS421-04 M5 x 0.8 AS 1 8 R metal body specifications 1 4 R AS-FE 1 4 Uses flame resistant resin as standard. (UL standard V-0) R 3 8 R KE 1 2 R Note 1) : Brass parts are electroless nickel plated, provided as standard.

Rotary Cylinder Series MRQ Size: 32, 40 1

Next, IB is entered to find IA the moment of inertia for the rotation of shaft (A) as a + b 2 2 A = ( ) b a 2 B = m 12 No. of teeth = b 11-10-3 4 Technical Data 3: Theoretical Output 5.

DOC1001322

, SiC 10, Carbon 10, PP 10 3-phase 380 to 415VAC(50/60Hz) Allowable voltage range 10%(No continuous voltage fluctuation) Power supply 3-phase 460 to 480VAC(60Hz) Allowable voltage range +4%,-10%(Max. voltage less than 500V and no continuous voltage fluctuation) Rated current A 40 Electrical system Applicable earth leakage breaker Sensitivity current mA 30 Rated operating current 5 A 22 Rated

mb1

3 r !5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Component Parts MB No. q w e r t y u i o !0 !1 No.

70astamb1

3 r !5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts MB No. q w e r t y u i o !0 !1 No.

VNB

C.O. 1 2 1 4.1 4.2 Normally closed Normally open Double acting VNB0 VNB02 VNB03 VN 1 4 7.7 7.8 40 12 (P1) 12 (P1) 10 (P2) LVC 6.3 6.4 2 Air operated LVA 2 (B) 1 (A) 2 (B) 1 (A) 2 (B) 1 (A) 11.4 11.5 50 10 (P2) Note) The flange should be JIS B 2210 10K (ordinary style) or its equivalent.

ITV-E

Lock keys ( ref er t o P11) M i ni m um pressure ( F_1) adj ust i ng range M axi m um pressure ( F_2) adj ust i ng range 100% 100% 50% 0% 10% 0% 20m A 20m A 5V 10V 20m A 20m A 5V 10V 4 0 0 0 12 10 2. 5 5 4 0 0 0 12 10 2. 5 5 ( N ot e 1) : F_1 i s adj ust abl e i n a range f rom 0 t o 50% of t he rat ed val ue. ( N ot e 2) : F_2 i s adj ust abl e i n a range f rom 10 t o 100% of t he rat ed

O

Lock keys ( ref er t o P11) M i ni m um pressure ( F_1) adj ust i ng range M axi m um pressure ( F_2) adj ust i ng range 100% 100% 50% 0% 10% 0% 20m A 20m A 5V 10V 20m A 20m A 5V 10V 4 0 0 0 12 10 2. 5 5 4 0 0 0 12 10 2. 5 5 ( N ot e 1) : F_1 i s adj ust abl e i n a range f rom 0 t o 50% of t he rat ed val ue. ( N ot e 2) : F_2 i s adj ust abl e i n a range f rom 10 t o 100% of t he rat ed

O

Lock keys ( ref er t o P11) M i ni m um pressure ( F_1) adj ust i ng range M axi m um pressure ( F_2) adj ust i ng range 100% 100% 50% 0% 10% 0% 20m A 20m A 5V 10V 20m A 20m A 5V 10V 4 0 0 0 12 10 2. 5 5 4 0 0 0 12 10 2. 5 5 ( N ot e 1) : F_1 i s adj ust abl e i n a range f rom 0 t o 50% of t he rat ed val ue. ( N ot e 2) : F_2 i s adj ust abl e i n a range f rom 10 t o 100% of t he rat ed

With Factory Installed

When using seal tape, leave one thread exposed when wrapping fitting or pipe. 0.1 i'--... 01 5 O~ o 0.2 0.3 0.4 0.5 0.6 0.7 08 0.9 1 00 1000 2000 Flow ra te / mi n IANR) Inlet pressure MPa AR3001-03 AR3001-03 0.6 ~ 0.5 ---'" " Jp J 0.25 '" I r~r " ::;; l' 0.2 ~ --P l' a. r< & "" & l' ::> 0.4 ~ ~ ~ 0.3 ~ -... a. ID '$'2 1-?/"(9 . "OS .

ZSE2/ISE2

ZS-10-A With lead wire ZS-10-5ANote) When ordering switch with 5 m long lead wire, indicate both part numbers. Lead wire length Caution 0.6 m Nil Ex.) ZSE2-01-15CN1 pc. ZS-10-5 A-501 pc.