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Dimensions Padlock mounting position (Port size) (Port size) Standard specifications Model P1 P2 A B C D E F G H VHS20 1/8, 1/4 1/8 71.5 23 40 37 28 42 17.5 40 VHS30 1/4, 3/8 1/4 87 32 53 49 38 53 20 53 VHS40 1/4, 3/8, 1/2 3/8 111 42.3 70 63 52 71 29 70 1 0 - Revision history Rev. A Safety Instructions (Piping) corrected.

(Panel mounting hole: See Dimensions.) 2 r o t c e n n o C h c n I c i r t e M 8 / 1 1 0 P M D K 2 . 3 3 2 P M D K e u l B 2 3 / 5 3 0 P M D K 4 4 0 P M D K r o t c e n n o C g u l P d e R 4 / 1 7 0 P M D K 6 6 0 P M D K 6 1 / 5 9 0 P M D K 8 8 0 P M D K 8 / 1 1 0 P M D K 2 . 3 3 2 P M D K r o t c e n n o c t e k c o S ) g n i k c a p h t i W ( e u l B 2 3 / 5 3 0 P M D K 4 4

In this case, before tightening, adjust the lock plate so that the position of the lock screw hole and female thread is centered (3) (see below). Lock screw hole (2) Lock plate (1) Misaligned Align the holes (3) 7 - A (3) When connecting multiple pads to one ejector through the vacuum communication, other pads also cannot adsorb if incorrect adsorption occurs in one pad.

370 440 100 120 130 160 180 210 246 290 ITVX 1 4, 3 8, 1 2 1 4, 3 8, 1 2 1 2, 3 4 1 2, 3 4 PVQ 3 4, 1 3 4, 1 VY1 Adapter Assembly Installation Procedure Accessory/Compact Pressure Switch: IS10-01 For details, refer to Best Pneumatics No. 8.

(KF flange) Fd Fn Heater (option) Auto switch (option) H G B A A Unit: mm Model A B C D E Fn Fd G H XLA-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 10 XL*-OMI0009-E

B: Fluid N2 add Specifications: Note 3) add 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

Wipe any dust off the O-ring surface with a clean cloth (Bemcot TM) dipped into ethanol. 14 XL*-OMI0010-E 6-3. Replacement Procedure of the External Seal (O-ring) Step 1 Step 2 Step 3 Step 4 Step 5 3 2 1 4 Size 16,25,40 Size 50,63,80,100,160 Wipe any dust off the O-ring surface and mounting surface of the body with a clean cloth (Bemcot TM) dipped into ethanol.

The speed will be approximately 1.4 times the date given on page 10-17-3.

VQ VQ4 VQZ VQD VZS VFS VS VS7 1.13-9 Series VQD1000 Dimensions Plug lead unit manifold(VV4QD12-l) Lead wire length: 300mm 4-Rc(PT)1/8 (P, R port) Light 2-4.5 (Mounting hole) 57 50.5 5.3 5.3 52 0.6 1 3 P R 1 3 R P 30 17 6.5 15 7 10 P=11 0.5 0.5 2n-M5 (A, B port) L2 35 4 M5: M5 thread L1 38 42 M plug connector (M) Station 1 2 3 4 5 n D side U side Direct manual override (Non-locking) 24 15

8 1/4, 3/8, 1/2 3/4 3/4, 1 1 324 333 333 332 335 38 40 38 41 45 53 70 75 90 95 54

L/min 0.5 to 0.5 -0.05 to -1 to -1 L/min -3 to 3 L/min L/min L/min Display flow range Set flow range -0.025 to -0.05 to -0.15 to -0.525 to -1.05 to -3.15 to Flow 1 0.525 L/min 1.05 L/min 3.15 L/min 0.525 L/min 1.05 L/min -3.15 L/min Minimum setting unit 0.001 L/mim 0.01 L/mim 0.001 L/mim 0.01 L/mim Indication unit Voltage : V Instantaneous flow : L/min, CFH(ft 3/h) 2 Repeatability 3 Switch

) C D J 4 C E E Body (Material: A6063) (KF flange) (K flange) Fd fn Heater (Option) Auto switch (Option) G H B A A Unit: mm Model n Fd XLA-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200

3 !1 %5 @6 @5 $5 #6 MLGC %2 CNG @8 !9 MNB e CNA2 $2 q %3 %4 $1 CNS #1 #0 @9 #4 $0 !5 !4 $7 $6 y %0 %1 CLS CLQ #3 #2 !8 @0 @2 @1 @7 RLQ @3 r MLU o #5 !6 $3 $4 MLGP Component Parts Component Parts Material No.

Shield sheet Note 2) IZF IZN10 ES ZVB Mounting pitch Mounting stations IZD IZE Symbol Pitch Symbol Stations ES 2 17 mm 2 Hexagon nut 3 IZH 3 4 4 Hexagon socket head cap screw Spacer (5 mm) L1 L2 Part no.

pressure MPa Cooling fan port size mm 400 3502pcs Aluminum plate fin tube Rp 3/4 Socket 1 1/2B Union 1B Union Cooler Air inlet piping / Air outlet piping Port size of Drain outlet piping (With auto drain) Mass kg Rc 1/2 Rc 3/8 (Rc 3/8) (Rc 3/8) 18 24 Munsell N-8(White)Munsell 2.5PB5/8.5(Blue) 7.5 Thermometer (1pc:assembles) 36 55 Painting color 15 Note 2) Application air compressor (kW)

Output current Current output 3 Linearity: 1% F.S. Linearity: 1% F.S. Linearity: 1% F.S.

3 Component Parts Component Parts Note Material Material Note No. q w e t y u No. i o !0 !1 !2 !3 !4 !

(mm) 4 6 8 10 12 Note) Weight (g) D L Q M Model KCT04-00 KCT06-00 KCT08-00 KCT10-00 KCT12-00 Note) D: Max. diameter 10.4 12.8 15.2 18.5 20.9 28.6 32.7 39.2 45.5 49.2 5.3 6.1 7.1 7.9 8.6 18 19 21.5 24 25.5 8 15 23 39 52 3-applicable tubing Union Y: KCU Applicable tubing O.D.