Series: 25A-ZSE20, Rated Pressure Range: 0 to -101 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

Series: 25A-ZSE20, Rated Pressure Range: 0 to -101 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Panel Mount Adapter, Operation Manual: -

Series: 25A-ZSE20, Rated Pressure Range: 0 to -101 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Panel Mount Adapter, Operation Manual: -

VXD

F 24 VDC 1/2 G DIN terminal 24 VDC L M 5 20A C37 N.C. With surge voltage suppressor 3/4 20 H 100 VAC C N.O. Stainless steel J 110 VAC 6 25A N.C. N P C37 Stainless steel 25 1 K 200 VAC D N.O. L 230 VAC 7 32A N.C. Q CAC408 35 32A Flange M Conduit terminal 24 VDC E N.O. With surge voltage suppressor N 100 VAC 8 40A N.C. R CAC408 40 40A Flange P 110 VAC F N.O. Q 200 VAC 9 50A N.C.

Series: 25A-ISE20, Rated Pressure Range: A (-0.1 to 1 MPa), Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Series: 25A-ISE20, Rated Pressure Range: A (-0.1 to 1 MPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Series: 25A-ISE20, Rated Pressure Range: A (-0.1 to 1 MPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter), Operation Manual: K (Operation Manual, Calibration Certificate)

Series: 25A-ISE20, Rated Pressure Range: A (-0.1 to 1 MPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Series: 25A-ZSE20, Rated Pressure Range: A (0 to -101 kPa), Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Process Pump

[Calculation of reference service life (days) of diaphragm] Reference service life (days) = A (amount of discharge per cycle) x B (reference number of cycles in service life) Flow (L/min) x Operating time per day (hour) x 60 (min) Operating Amount Reference number Volume Diaphragm Model conditions: of discharge of cycles inside pump Material Method per cycle A in service life B (wetted part

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r StJpply + TlIfm..ar r -RIld P()" 'f ~ Te-m"O

KK

fitting Elbow with One-touch fitting Bulkhead with One-touch fitting Symbol M F N H L E Socket/Plug designation S P Socket Plug Piping port size variation Male/Female thread type One-touch fitting type Nut fitting type Thread size M5 x 0.8 R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Symbol M5 01 02 03 04 06 Symbol 23 04 06 08 10 12 16 Symbol 50 60 65 80 85 110 Applicable tubing O.D

SI Unit for Vacuum Manifold

Specifications Table. 8-1 Specifications Item Specification General Dimensions (W x L x H) in mm 25.5 x 102.4 x 76.5 Weight 150 g Housing materials PBT Maximum number of ejectors 16 Maximum number of sensors 16 Applicable standard CE Marked RoHS directive EN50581:2012 Withstand voltage 500 VAC 1 min.

Air Suction Filter Series ZFA 1

Description Cover Case Gasket/Seal Element Material Zinc die-casted Aluminum die-casted NBR Polyester, ABS AMJ Element size (mm) 43 x 42 x 12 43 x 40 x 22 Applicable filter model Part no. EJ001H-030N EJ101H-030N ZFA100 ZFA200 Misc.

VF1000-OMP0001

(X) (B) 2 (X) (A) 4 (B) 2 (A) 4 (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) (X) (B) 2 (X) (A) 4 (A) 4 (B) 2 (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) 9 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 3.2~3.7mm () 300mm ) ) ) ) (+ -) ( ) ) ) ) ) Assy 2000mm VF3230-5MO-02 3 DXT170-80-4A-20 6 (1mm) 0.6 Nm VF1000 1.4 Nm VF3000 1.4 Nm VF5000 1.4 Nm VF130 VF133 DXT144

-- NCM seies

Available X: Not available Relay Sequencer Relay Sequencer Solid State Specift,cations Lead Length 1.5 fl.

VZM500

0 w e Valve assembly Valve spring Return spring Spool spring Head cover Spool valve assembly End cover Piston Plunger NBR ZDC !1 Stainless steel r t ZDC Metallic plated !2 Stainless steel !

ø2 One-touch Fittings Series KJ

(mm) Applicable fitting size Model KJY02-M3 KJY02-M5 2 M3 x 0.5 M5 x 0.8 KJR02-04 4 2 KJU02-00 2 KJU02-23 KJU02-04 2 Bulkhead union KJE Plug KJP Applicable tubing O.D. (mm) Model Applicable fitting size Model KJE02-00 2 KJP-02 2 2 Polyurethane tubing Series TU 2 Miniature fittings Series M

lVFl 10

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

lPSMt

. x x Supply & Output Pressure Gauge f 00 no gauge 01 2k$/cnf 02 3 kgrf/cm'?