IDX-OM-X011

Checks, Maintenance and Adjustment . 5-1 5.1 Daily inspection . 5-1 5.2 Regular maintenance . 5-2 5.2.1 Cleaning the ventilation grille . 5-2 5.2.2 Service parts . 5-2 5.2.3 Auto Drain Maintenance . 5-2 5.3 Adjustment . 5-4 5.3.1 Capacity Control Valve . 5-4 IDF190D/240D Series IDX-OM-X011 Contents 5.3.2 Sight glass (for IDF240D only) . 5-4 Chapter 6 Troubleshooting . 6-1 6.1 Troubleshooting

ML2B

5 #8 #9 @7 w !6 e q #5 #4 $9 $1 $0 ^1 ^0 $7 $8 ^0 !2 #2 @4 !3 %0 %1 %2 !0 @2 ^3 @1 #3 ^6 $6 %3 @6 $5 ^2 %5 %6 @5 $4 ^0 $3 #1 ^5 %7 @8 $2 o %8 ^7 #0 %9 ML2BS %4 ^4 !

5 Port Air Operated Valve Series VFA3000 1

{2.6} VFA5120-02 2 1 4 3 VFA5420-02-X1 5 Body ported VFA5120-03 2 3 8 3 VFA5420-03-X1 5 VFA5144-02 2 1 8 1 4 3 VFA5444-02-X1 5 Base mounted (1) VFA5144-03 2 3 8 3 VFA5444-03-X1 5 VFA5144-04 2 1 2 3 VFA5444-04-X1 5 Note 1) With sub-plate Note 2) { }: Normal position 5-3-15 8 Series VFA5000 Dimensions: Body Ported 2 position single: VFA5120-02 03 2 position double: VFA5220-02 03 (Pilot port

Modular Type Air Filters Series AF

-X425 Environment Proof pressure (MPa) Low temperature High temperature 3.0 Ambient temperature (C) Maximum operating pressure (MPa) 30 to 60 5 to 80 2.0 Fluid temperature (C) Ambient and fluid temperature (C) 5 to 60 (with no freezing) 5 to 60 (with no freezing) Rubber parts Special NBR FKM Applicable Model Material Main parts Metal (Aluminum die-cast, etc.)

SI unit for DeviceNet TM

Specific service None. -25No.EX-OME0015-F 5. DeviceNetTM Connection Object (Class ID: 05h) 5-1. Class attribute ID Access rule Description Value 5-2. Class common service Service code Description 5-3.

Rotary Gripper Series MRHQ

0.8 22.5 2.5 Finger opening port 4.5 11.5 23 11 2 18 25 15.5 41.5 5 33 Angle adjustment bolt 63 11 2 x 4.5 through 2 depth 4 +0.025 0 3 x 3H9 (one each on three sides) 2 x 8 depth of counter bore 2.5 10 long groove depth 3 +0.025 0 3 x 3H9 (one each on three sides) 0 -0.062 37h9 M5 x 0.8 M5 x 0.8 Port A Port B 4 x M4 x 0.7 depth 6 N J I E A D P A A M N 2 C M S R R E O P T 6 P A R I R Y G

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

5 !6 !7 !8 !

Series CQ2

(different sides, same side) 10 (0.4) 5 (0.2) 15 (0.6) 1 pc. 5 (0.2) 5 (0.2) 10 (0.4) Theoretical Output/Double Acting Type OUT IN Unit: N Operating Pressure MPa (psi) Bore size (mm) Operating direction 0.7 (101.5) 0.6 (87) 0.5 (72.5) 0.4 (58) 0.3 (43.5) 0.2 (29) IN 16933 14514 12095 9676 7257 4838 180 OUT 17812 15268 12724 10179 7634 5089 IN 21112 18096 15080 12064 9048 6032 200 OUT 21991

Angular Style Air Gripper Series MHC2/MHCA2/MHCM2

5 !4 u Component Parts No. Description No.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

5 !6 !7 !8 !

Series MXP Precision Air Slide Table

A A F F A F L L L 1 N = 0.2248 lbf 6 6 6 L=80mm L=80mm L=80mm 0.05 0.06 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.04 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.05 0.04 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 0 10 20 30 40 Load (N) 40 10 10 10 L=100mm

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 505 Applicable Fluids Material and fluid compatibility check list for High

CE

No.CE*-OMI0063-C / / CE1* Series 1. 16 2. 7 2-1. 7 2-2. 78 2-2-1. 7 2-2-2. 8 2-2-3. 8 2-3. 9 3. 3-1. 10 3-2. 10 3-3. 11 3-3-1. 11 3-3-2. 11 3-3-3. 11 4. 4-1. 12 4-2. 12 4-3. 12 5. 5-1. 13 5-2. 14 5-3. 14 6. 6-1. 1516 6-2. 16 CE1B12 17 CE1B20 18 CE1B32 19 CE1B40 20 CE1B50 21 CE1B63 22 CE1 Series/ 1. 1) (ISO/IEC)(JIS) 2) *1) ISO

Flame Resistant (Equivalent to UL-94 Standard V-0) FR Double Layer Tubing Series TRB

(mm) 8 6.5 5 4 Inner tubing I.D.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

Fittings & Tubing Air Cylinders Rotary Actuators Double acting 0.15 to 0.6 0.1 to 0.6 10 to 60C Operating pressure (MPa) Ambient and fluid temperature Repeatability Lubrication Effective gripping force (N) at 0.5 MPa Note) One side 10 0.1 Not required 14 45 74 131 228 396 11-: Fluorine grease 22-: Lithium soap based grease 11-/22-: Class 4 Grease Cleanliness class (ISO class) Note) Gripping

Standard Combinations

Approx. 500 15 23 Pressure switch C B JIS Symbol Center of F.R.L. body A D Specifications A B C D Fluid Proof pressure Maximum operating pressure Model IS1000M-20 IS1000M-30 IS1000M-40 Applicable model ACG20/ACG20B/ACG20C ACG30/ACG30B/ACG30C ACG40/ACG40B/ACG40C Air 1.0 MPa 0.7 MPa 0.1 to 0.4 MPa 0.08 MPa 5 to 60C (With no freezing) 11 76 66 28 13 86 72 30 Regulating pressure range (when off

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Applicable cable O.D. 3.5 to 7 Station n L1 L2 3 80 68 Station 20 403 391 6 137 125 8 175 163 10 213 201 Station 2 61 49 4 99 87 5 118 106 7 156 144 9 194 182 11 232 220 12 251 239 13 270 258 14 289 277 15 308 296 16 327 315 17 346 334 18 365 353 19 384 372 43 Series SYJ700 Type 40 Manifold: Bottom Ported/SS3YJ7-40Stations -01 [ ] for AC Grommet (G) 53.5 5 L2 L1 10.5 1.5 19.5 3.4 48.4 (

CUJ

Refer to Standard Stroke on page 7-2-5. RQ MU DSpecifications Dimensions -X 11 3.5 The specifications are the same as those for the standard double acting type.

VK3000

11 2B 4A 2A 2B VV061 38 4A 2A 19 VV100 3 (Pitch) 2 x Rc1/8 2 x Rc1/8 V100 (P port) (P port) 2n1 x Rc 1/8 (A,Bport) (Lead wire length) S070 n1 = Number of VK3000 n2 = Number of VK300 ~ = 300 VQD VQD-V VK VK 2n x M5 x 0.8 (R1, R2 port) (Pitch) VT L Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13

Air Cylinder: Standard Double Acting, Single/Double Rod Series NCM

Note 11) Exclude 2".