MNB

Bore size (mm) A B A + B + 90 B DA DB DL DU DC DX DE DO DR DT DS DH Z DDH10(Hole) 32 40 50 63 80 100 6.6 54 42 32 22 44 14 62 9 15 7 33 224 10 +0.058 0 10 32, 40 160 25 45 MB-B03 6.6 63 42 32 22 44 14 62 9 15 7 33 235 10 +0.058 0 10 9 75 53 43 30 60 20 81 10.5 18 8 45 271 11.5 +0.070 0 14 50, 63 190 40 60 MB-B05 9 90 53 43 30 60 20 81 10.5 18 8 45 285 +0.070 0 11.5 14 +0.084 0 11 102 73 64

MNB

Bore size (mm) A B A + B + 90 B DA DB DL DU DC DX DE DO DR DT DS DH Z DDH10(Hole) 32 40 50 63 80 100 6.6 54 42 32 22 44 14 62 9 15 7 33 224 10 +0.058 0 10 32, 40 25 45 160 MB-B03 6.6 63 42 32 22 44 14 62 9 15 7 33 235 10 +0.058 0 10 9 75 53 43 30 60 20 81 10.5 18 8 45 271 11.5 +0.070 0 14 50, 63 40 60 190 MB-B05 9 90 53 43 30 60 20 81 10.5 18 8 45 285 +0.070 0 11.5 14 +0.084 0 11 102 73 64

SZ3000

(up to 24 solenoids possible) 20 20 20 stations 20 stations Connector mounting position Mounting position Symbol D PG: Flat cable connector (20 pins) PH: Flat cable connector (10 pins) D Side Note Symbol 02 Note Symbol 02 Stations Stations 2 stations 2 stations ... ... ... ...

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

CRBB-OM00004

unit Rotary actuator with angle adjustment Part number for CRBW---BPart number for vertical auto switch unit angle adjustment unit Part number for joint unit Size For D-M9 Excluding Size Size D-M9 10 P811010-3 10 P211070-10 10 P611070-1M P611070-1 15 P811020-3 15 P211090-10 15 P611090-1M P611090-1 20 P811030-3 20 P211060-10 20 P611060-1M P611060-1 30 P811040-3 30 P211080-10 30 P611080-1M

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Critical pressure 0.6 0.5 Sonic 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 JSXD30 Port size 1/4 JSXD30 Port sizes 3/8, 1/2 JSXD40 Port size 3/8 JSXD40 Port size 1/2 JSXD50 Port size 3/4 JSXD60 Port size 1 10 1000 2000 3000 10 1000 2000 3000 4000 15 2000 4000 6000 8000 15 2500 5000 7500 10 20 5000 10 15000 25 5000 10 15000 20 Flow rate Q [L/min (ANR)] For Air (Orifice diameter: 35 mm, 40 mm, 50 mm

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

15 15 B GA FX FT F A 18.3 15 C 20 17 5 4 8 8 5.5 5.5 2.3 2.3 33 33 20 20 5 5 FB FY D FC FZ 12-0.027 10-0.022 H NA NDh8 Z S NN 11 11 17.5 19 66 65 M12 x 1.0 M10 x 1.0 MM 42 42 GC 0 M4 x 0.7 28 28 122 121 20.5 20.5 0 M5 x 0.8 11 B CJ2RA-Z Series 10-/1121-/22Stroke Length Tolerance 10, 16 How to Order Clean series 10 11 Relief type Vacuum suction type M9BW R Z 60 16 A R 2 J D C 10 B M9BW

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35 50 54 107 155 195 N 4 4 4 4 6 6 6 8 8 FF 40 40 40 50 35 60 70 70 80 13-/22-MXS20-10 13-/22-MXS20-20 13-/22-MXS20-30 13-/22-MXS20-40 13-/22-MXS20-50 13-/22-MXS20-75 13-/22-MXS20-100 13-/22-MXS20-125 13-/22-MXS20

V

12 4 13 7.7 12 3 ZP10D D10 10 12 4 13 10.7 15 6 ZP13U U13 13 15 4 13 7.7 12 3 ZP16D D16 16 18 4 13 11.7 16 7 H Y Part No Type A B C D E F G ZP16U U16 16 18 4 13 8.2 12.5 3.5 ZP25D D25 25 28 4 15 15.5 20 10 ZP06B B06 6 7 2.5 7 13 3.3 9.1 4 ZP20U U20 20 23 4 15 9.5 14 4 ZP40D D40 40 43 7 18 24.2 29 17 ZP08B B08 8 9 2.5 7 13 4.7 10.1 4 ZP25U U25 25 28 4 15 9.5 14 4 ZP10B B10 10 12 4 13 11.7

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

NCA1

Please See Below for How to Order Piston Rod Assembly JM-10 JM-045 JM-045 JM-10 20 Jam Nut Carbon steel * Components included in a seal kit.

51

Symbol Foot (mm) A AL D I B B1 C H1 H W GA GB H2 J KA LC LD LH LS LT LX LZ M MM NA P S X Y Z ZZ Bore size (mm) 20 25 32 40 50 63 80 100 12 20 5 12 14 4 33 10 14.5 34 13 8 6 4 26 M4 x 0.7 6 20 (3) 32 44 3 M8 x 1.25 24 M5 x 0.8 57 15 7 32 83 Width across flats 6 length 3.5 12.5 23 6 15 16.5 4 36 10 17.5 38.5 17 10 7 4 31 M5 x 0.8 6 22 (3) 36 49 3.5 M10 x 1.25 29 M5 x 0.8 60 15 7 35 89.5 Width

AC

Coef. for compensation 20 10 0 10 30 40 50 60 Air temp.

HRX-OM-R016

0.2 20 0.1 10 Availavel area 0.0 0 0 5 10 15 20 25 Circulating fluid flow[L/min] Fig. 9-9 Pump capacity(HRS030--20-MT) 9.7 Required facility water flow (for water-cooled type) 30 Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet temperature[] *The amount of the facility water for the operation with rated circulating fluid, cooling capacity which is described

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

or less Metal seal 67 Single 2-position 3-position 2-position 3-position VQ1101 15 or less 1.0 0.85 0.30 0.20 0.25 34 or less 0.21 20 or less Rubber seal VQ1200 10 or less 0.72 0.70 0.25 0.15 0.18 13 or less 0.16 13 or less Metal seal Double VQ1201 15 or less 1.0 0.85 0.30 0.20 0.25 20 or less 0.21 20 or less Rubber seal VQ1300 20 or less 0.72 0.68 0.25 0.15 0.18 40 or less 0.16 26 or less

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

or less Metal seal 67 Single 2-position 3-position 2-position 3-position VQ1101 15 or less 1.0 0.85 0.30 0.20 0.25 34 or less 0.21 20 or less Rubber seal VQ1200 10 or less 0.72 0.70 0.25 0.15 0.18 13 or less 0.16 13 or less Metal seal Double VQ1201 15 or less 1.0 0.85 0.30 0.20 0.25 20 or less 0.21 20 or less Rubber seal VQ1300 20 or less 0.72 0.68 0.25 0.15 0.18 40 or less 0.16 26 or less

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

L1 (mm) 400 a = 1000 Pitching Yawing Vertical Vertical m a a = 2000 200 a = 3000 L1 Mep 0 5 10 20 15 Transfer load m (kg) 600 a = 2000 a = 1000 L3 (mm) 400 a = 3000 a 200 L3 Mey 0 5 10 20 15 Transfer load m (kg) Refer to page 145 for deflection data. 82 Non-standard Motor/Vertical Mount Specification Series LJ1H30 Dimensions/LJ1H303PA(X10) Scale: 10% 8H10 depth 10 4-M8 x 1.25 thread depth

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

10 28.4 (Mounting holes) 3.5 25 2.5 5 5 10 22 16.4 10 3.2 222 4 (Mounting holes) Manual override (Non-locking) M3 0.5 (Pilot port) M3 0.5 (Pilot port) A B 11 17.5 1(Bleed port) 1.5 A B 1.5 1.5 5-M3 0.5 (Piping port) 33 36 Manual override (Non-locking) B P R R 7 7 36 2 35 7 13.5 28.5 15 A 21 R2 P R1 13 1(Bleed port) 11 10 4 15 10 10 5-M5 0.8 (Piping port) 14 14 15 (Bracket) 2 Position double

ISO Standard Hydraulic Cylinder

10 52 79 91 Bore size (mm) X2 Y Y1 Y2 ZA Z V X1 ZZ 32 5.5 73 153.5 60 20 13 10 128 26 40 6.5 98 185 22 62 20 10 153 31 50 7 92 199 20 67 29 13 159 28 63 12 86 216 16 71 33 17 168 22 80 15 105 251 23 77 37 17 190 29 100 15 102 275 18 82 44 22 203 23 347 CHSG Series Dimensions Rod flange: CHSGFY Z + Stroke PJ + Stroke MM Head side cushion valve GB Y 4 x FD GA J 2 x RcP RD BB D FY E V Rod side

Refrigerated Air Dryers

Applicable air dryer Capacity Type Inlet voltage Outlet voltage Weight 380, 400, 415 VAC (50 Hz) 380 to 400, 400 to 415, 415 to 440 VAC (60 Hz) 295 250 220 IDF-TR2000-10 IDF22E-20 IDF37E-20 2 kVA 200 VAC (50 Hz) 200, 220 VAC (60 Hz) Singlephase Singleturn 20 kg 220 15 270 10 4 x 10 IDF-TR2000-11 440, 460 VAC (50 Hz) 440 to 460, 460 to 500 VAC (60 Hz) 250 290 [mm] IDF-TR4000-5,6,7 Specifications