80

Maximum operating Note 2) pressure differential (MPa) Used with vacuum (Paabs) Pressurized port 1 Flow rate characteristics Note 1) Port size Size Orifice diameter (mm) Model Weight (g) C [dm3/(sbar)] b Cv 0.04 1.0 0.40 0.14 0.9 Brass: 65 Stainless steel: 60 VDW14 1 M5 0.07 1.6 0.25 0.30 0.4 0.1 to atmospheric pressure 0.07 1.6 0.45 0.30 0.7 Brass: 115 Stainless steel: 100 2 VDW24 0.18 2.3

125

AC Nil Without light/surge voltage suppressor S With surge voltage suppressor (Non-polar type) Z With light/surge voltage suppressor (Non-polar type) Nil Standard (for AC) A Large flow type (for DC) Rated voltage * DOZ is not available. * There is no S option for AC, since a rectifier prevents surge voltage generation. 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz)[115

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 50, Stroke(mm): 115, Max.

PA3000/5000/PAX1000

Circuit example (1) 5 port solenoid valve (exhaust center) 4 port solenoid valve Air filter Ball valve Process pump Process pump Regulator Air filter Regulator FLUID OUT FLUID OUT P1 P1 Air supply FLUID IN FLUID IN P2 P2 Air supply 3 port solenoid valve Strainer Strainer Transfer fluid Transfer fluid 9 Process Pump Air Operated Type Series PA3000/5000 Dimensions/Air Operated Type PA3000 115

V

AT I O N B R A C K E T 1 Normally Closed 2 Normally Open Without Bracket F With Bracket M O D E L T Y P E P I P I N G 3 Body Ported 4 Base Mounted Body Ported For Manifold P For Body Ported Type t0 P, R, A Port T Y P E Standard A Large Flow Capacity Base Mounted Without Subplate M3 With Subplate V O LTA G E 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC 1 100 VAC 50/60 Hz 3 110 VAC 50/60 Hz 115

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Station L1 L2 3 96 68 6 153 125 8 191 163 10 229 201 20 419 391 2 77 49 4 115 87 5 134 106 7 172 144 9 210 182 11 248 220 12 267 239 13 286 258 14 305 277 15 324 296 16 343 315 17 362 334 18 381 353 19 400 372 1.2-70 Series SYJ7000 Flat Cable Manifold SS5YJ7-21PStation 41.5 SY Manual override Depress and turn to operate and lock override.

ZP

(mm) 2 to 8 0.8 N 1.2 N 1.0 N 3.0 N 2.0 N Refer to 2 to 8 for Thin flat, Thin flat with ribs and Elipse type. 0 stroke Stroke end 5.0 N 10 to 32 40, 50 Weight (g) Stroke (mm) Model Pad form Flat/ Flat with ribs Deep Bellows ZPY2004 ZPY3507 ZPY4010 ZPY02 to 08 ZPY10 to 16 (Thin section series) 33 6 33 ZPY 10 to 16 10 45 45 46 10 ZPY 20 25 50 51 53 ZPY 32 40 50 ZPY ZPY 52 115 58 127 134

2/3 Port Solenoid Valve for Chemicals

Material Part list/LVM13R, 14R, 16R, 115 !2 !0 Plate 1 PEEK/PFA !1 Diaphragm assembly 2 EPDM/FKM/Kalrez Body 3 PBT Slide bush assembly 4 POM/Stainless steel y Armature assembly 5 Stainless steel/PBT Coil assembly 6 t Sleeve 7 Iron u Spacer 8 i !3 PBT Return spring 9 Stainless steel o Board assembly 10 Casing 11 PBT r e Plug 12 NBR w O-ring 13 NBR O-ring 14 EPDM/FKM/Kalrez !

MGP

156 188 100 124 180 210 198 236 140 166 M14 X 2.0 24 28 28 11 M12 X 1.75 80 100 28 48 52 72 75 90 128 148 300 320 92 85 178 171 MGPM(Slide Bearing)/Dimensions A, DB, E MGPL(Ball Bushing Bearing)/Demensions A, DB, E Bore (mm) Bore (mm) A E DB A E DB 200st< 50st< 200st 50st< 200st 200st< 25st< 50st 25st< 50st 200st< 50st< 200st 50st< 200st 50st 50st 200st< 25st 25st 160 180 63.5 64 80 100 115

o

(H) < In Caee ot B:lT) 0 18 (4.5) Oia 6 6 i=o.ar (ro.5i0a5(115) TUpe 532,r Side Ported L Type Plug Connector (L) M Type Plug Connector(M) NVVsJ3-532staiions -M5, B3T \ | s l ATTI T \i.1 J_ 19 1 e : 9 6 t ' ' i 5 _ 3 ^i :n l ' g r018 (4 5) oLa 11.81 {300) Stationsn) 2 3 5 6 7 a 9 1 0 l1 12 13 a4 '15 16 17 1a 't9 20 L1 1.63 2.05 (41.5) (b2) 2.45 (62.5) 2.47 (731 3.29 3.70 (835) (s4) (104 5)

o

(H) < In Caee ot B:lT) 0 18 (4.5) Oia 6 6 i=o.ar (ro.5i0a5(115) TUpe 532,r Side Ported L Type Plug Connector (L) M Type Plug Connector(M) NVVsJ3-532staiions -M5, B3T \ | s l ATTI T \i.1 J_ 19 1 e : 9 6 t ' ' i 5 _ 3 ^i :n l ' g r018 (4 5) oLa 11.81 {300) Stationsn) 2 3 5 6 7 a 9 1 0 l1 12 13 a4 '15 16 17 1a 't9 20 L1 1.63 2.05 (41.5) (b2) 2.45 (62.5) 2.47 (731 3.29 3.70 (835) (s4) (104 5)

Flow Rate: 4.2 CFM / 7.2 m3/hr / 119 LPM , 4.2 CFM / 7.2 m3/hr / 119 LPM, Max Pressure: 14.5 PSIG / 1 bar , 14.5 PSIG / 1 bar, Horsepower (60 Hz): .4, Voltage (60 Hz): 115, Voltage (50 Hz): 115, Frequency (Hz): 50 / 60, Phase: 1-phase, Item Dimensions: Length: 8.66 in / 220 mm Width: 5.98 in / 152 mm Height: 6.14 in / 156 mm , Length: 8.66 in / 220 mm,

Thomas Oil-less Diaphragm Compressor / Vacuum Pump Flow Rate: .69 CFM / 20 LPM , .69 CFM / 20 LPM, Max Pressure: 30 PSIG / 2 bar , 30 PSIG / 2 bar, Max Vacuum: 22.1 in HgV / -748 mbar , 22.1 in HgV / -748 mbar, Voltage: (60 Hz) 115 / (50 Hz) 110 , (60 Hz) 115 / (50 Hz) 110, Frequency (Hz): 50 / 60, Phase: 1-phase, Net Weight: 5.1 lbs. / 2.3 Kg

Thomas Oil-less Linear Diaphragm Compressor, 115/60/1 Flow Rate: 3 CFM / 85 LPM , 3 CFM / 85 LPM, Max Pressure: 4.3 PSIG / 120 in H20 / 296 mbar , 4.3 PSIG / 120 in H20 / 296 mbar, Voltage (60 Hz): 115, Frequency (Hz): 60, Phase: 1-phase, Item Dimensions: Length: 8.58 in / 218 mm Width: 7.01 in / 178 mm Height: 7.84 in / 199 mm , Length: 8.58 in / 218

Flow Rate: 5.6 CFM / 9.6 m3/hr / 159 LPM , 5.6 CFM / 9.6 m3/hr / 159 LPM, Max Pressure: 8.7 PSIG / .6 bar , 8.7 PSIG / .6 bar, Horsepower (60 Hz): .59, Voltage (60 Hz): 115, Voltage (50 Hz): 115, Frequency (Hz): 50 / 60, Phase: 1-phase, Item Dimensions: Length: 9.8 in / 249 mm Width: 6.14 in / 156 mm Height: 6.14 in / 156 mm , Length: 9.8 in / 249 mm, Width

Flow Rate: 7 CFM / 12 m3/hr / 198 LPM , 7 CFM / 12 m3/hr / 198 LPM, Max Pressure: 11.6 PSIG / .8 bar , 11.6 PSIG / .8 bar, Horsepower (60 Hz): .59, Voltage (60 Hz): 115, Voltage (50 Hz): 115, Frequency (Hz): 50 / 60, Phase: 1-phase, Net Weight: 22.7 lbs. / 10.3 Kg Series Configured Datasheet.

Thomas Oil-less Linear Diaphragm Compressor, 115/60/1 Flow Rate: 1.65 CFM / 45 LPM , 1.65 CFM / 45 LPM, Max Pressure: 4.3 PSIG / 120 in H20 / 296 mbar , 4.3 PSIG / 120 in H20 / 296 mbar, Voltage (60 Hz): 115, Frequency (Hz): 60, Phase: 1-phase, Item Dimensions: Length: 8.46 in / 215 mm Width: 6.77 in / 172 mm Height: 7.83 in / 199 mm , Length: 8.46 in

Flow Rate: 2.4 CFM / 4.2 m3/hr / 68 LPM , 2.4 CFM / 4.2 m3/hr / 68 LPM, Max Pressure: 14.5 PSIG / 1 bar , 14.5 PSIG / 1 bar, Horsepower (60 Hz): .19, Voltage (60 Hz): 115, Voltage (50 Hz): 115, Frequency (Hz): 50 / 60, Phase: 1-phase, Net Weight: 14.3 lbs. / 6.5 Kg Series Configured Datasheet.

Thomas Oil-less Linear Diaphragm Compressor, 115/60/1 Flow Rate: 2.3 CFM / 65 LPM , 2.3 CFM / 65 LPM, Max Pressure: 4.3 PSIG / 120 in H20 / 296 mbar , 4.3 PSIG / 120 in H20 / 296 mbar, Voltage (60 Hz): 115, Frequency (Hz): 60, Phase: 1-phase, Item Dimensions: Length: 8.58 in / 218 mm Width: 7.01 in / 178 mm Height: 7.84 in / 199 mm , Length: 8.58 in /

Flow Rate: 4.2 CFM / 7.2 m3/hr / 119 LPM , 4.2 CFM / 7.2 m3/hr / 119 LPM, Max Pressure: 14.5 PSIG / 1 bar , 14.5 PSIG / 1 bar, Horsepower (60 Hz): .4, Voltage (60 Hz): 115, Voltage (50 Hz): 115, Frequency (Hz): 50 / 60, Phase: 1-phase, Item Dimensions: Length: 8.66 in / 220 mm Width: 5.98 in / 152 mm Height: 6.14 in / 156 mm , Length: 8.66 in / 220 mm,