Information

-m LECSS2-m L11 L21 For single phase 200 VAC For three phase 200 VAC L1 CNP1 NFB MC CNP3 L1 CNP1 NFB MC CNP3 Single phase 200 to 230 VAC Three phase 200 to 230 VAC L2 L2 U U U Motor V U Motor V L3 L3 V V W M N W M N() W W P1 P1 PE PE P2 P2 CNP2 CNP2 P P(+) Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power

Fluoropolymer Tubing Variations

(mm) TLM0201 2 x 1 2 1 TLM0302 3 x 2 3 2 TLM0425 4 x 2.5 4 2.5 TLM0403 4 x 3 4 3 TLM0604 6 x 4 6 4 TLM0806 8 x 6 8 6 TLM1075 10 x 7.5 10 7.5 TLM1008 10 x 8 10 8 TLM1209 12 x 9 12 9 TLM1210 12 x 10 12 10 TLM1916 19 x 16 19 16 TLM2522 25 x 22 25 22 TLM1613 16 x 13 16 13 Length per roll Color Translucent Translucent Symbol N N R BU B N N N 10 m Red (Translucent) 20 m Blue (Translucent) Roll

High Power Cylinder:

5 20: M5 X 0.8 X 6 25, 32: M6 X 1 X 6 40: M8 X 1.25 X 8 Chrome-molybdenum steel Nickel plated Hexagon socket head screw 20, 25: M5 X 0.8 X 6 32, 40: M6 X 1 X 8 Hexagon socket head set screw Nickel plated Chrome-molybdenum steel !6 Name plate !7 Special resin Cushion seal !8 Replacement Parts Bore size (mm)/Part No. Description No.

IZx-OMT0049

Angle K 5 Z 10 M 10 P 0.5 DIN rail bracket Q 1 2 3 5 Symbol Type R Angle Nil None S T W Include Z 10 1-2-2.

0.01

Piping tubing length 0.4 0.8 Response time (sec) Response time (sec) Piping tubing length 10 m 0.3 0.6 8 m 8 m 5 m 0.2 0.4 5 m 3 m 3 m 0.1 0.2 1 m 0 0 0.35 0.05 0 0 0.16 0.02 0.3 0.25 0.2 0.15 0.1 0.14 0.12 0.1 0.08 0.06 0.04 Detection distance (mm) Detection distance (mm) Piping tubing lengthResponse time Piping tubing lengthResponse time Nozzle Shape Please keep the nozzle shape as illustrated

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

/W valve for vacuum applications.

Compact Cylinder Series NCQ8

*Lead wire length symbols: 20in (0.5 m) . Nil (Example) M9N 118in (3 m) . L M9NL 197in (5 m) .

Lubrication Equipment

Description Material Part No. # pieces 3 port switching valve (For operation control) VOA301-M VO307E, D-X56 1 e Relay valve Pressure gauge Diaphragm assembly Valve assembly NLP seal PNY seal Wear ring O ring VR4152-00-0 GA46-10-01 12702A 12705A NLP-100A PNY-25 SW-100 X 6 X 2 JIS B2401P3 1 1 1 1 2 2 2 1 r t y u i o !0 !

Rotary Cylinder Series MRQ

i gl m n u a m 0 nt a e M dj m us t 19 ax e im gl u an m t ad en ju m st Friction fittings Note) Can be adjusted 5 at the rotating ends.

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 DNil A B C Sealmaterial XSA 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Symbol Nil N1 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 1.3 x 10-10 (FKM) XVD Note 1) Values at ambient temperatures, excluding gas permeation.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

-M9NL Du Seal material and its changed part XSA Sealmaterial Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Changed part Note 2) Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil XGT w, e w e N1 Nil A B C P1 70W 1.3 x 10-11 (FKM)

CG5-S

(mm) Stroke range A Bore size (mm) NA MM AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M 20 29 to 350 M8 x 1.25 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 25 29 to 400 M10 x 1.25 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 32 35.5 to 450 M10 x 1.25 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5

Ionizer

M4 x 0.7 depth 5 (For mounting, opposite side: Same) Bar length (mm) 300, 380, 620, 780 1100, 1260, 1500, 1900, 2300 Fitting M-5P-X112 KJH04-M5-X34 Note) Note) Plug (M-5P-X112) 1 pc. is shipped together.

5 Port Air Operated Valve

) 40.5 2 45.5 2 x 2 (Breathing hole) 17.8 (Breathing hole) 7.5 1 P P 1 7.5 7.5 M5 x 0.8, 1/8 [1(P) port] M5 x 0.8, 1/8 [1 (P) port] 12.9 10 2 x M4 x 0.7 thread depth 5 (For mounting) 10 12.5 12.5 2 x M4 x 0.7 thread depth5 (For mounting bracket) VFA1120-01(-F)(-P) VFA1220-01(-F)(-P) (16.6) (16.6) (Distance between ports) (Distance between ports) 38 1/8 [4 (A), 2 (B) port] 12 11.5 1/8 [4 (

Toggle Type Air Gripper

port Rc (G , NPT ) 1 8 1 8 1 8 Finger opening port O 34 S 7.5 30 20 4 x M6 x 1 bottom hole dia. 5.1 through Thread for mounting attachment MHT2-40DZ 2 x M8 x 1.25 thread depth 12 Mounting thread 20 40 4 x M6 x 1 thread depth 10 Mounting thread 18 37 48 10 4 x M8 x 1.25 thread depth 10 Mounting thread (Both sides) 7 7 Open 27 Closed 3 40 0.2 96 82 52 5 24 60 74 40 0.2 29 54.5 (136.5) 42

Air Catch Sensor

Detection side nozzle: 1.0 Detection side piping: 6 X 4 tubing Detection side nozzle: 1.5 Detection side piping: 6 X 4 tubing Detection side nozzle: 2.0 Detection side piping: 6 X 4 tubing 300 300 300 Detection distance (m) Detection distance (m) Detection distance (m) 200 200 200 100 100 100 0 0.1 0.2 0.3 0.3 0.3 0 0.1 0.2 0 0.1 0.2 Supply pressure (MPa) Supply pressure (MPa) Supply pressure

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

1 2 1/8, 1/4 29.5 1/8 53 117 29 29.5 M38 x 1.5 2.5 1/4, 3/8 34 1/4 70 148 41 34 M42 x 1.5 1 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 28 27.8 37.5

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

1 28.5 1/8, 1/4 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 28 27.8

Low-Speed Compact Rotary Actuator Rack & Pinion Type CRQ2X Series Size: 10, 15, 20, 30, 40

Symbol Specifications/Content Applicable shaft type Shaft type variation X,Y,Z,T,J,K S,W XA1 to XA24 Shaft pattern sequencing I X,Y,Z,T,J,K XA31 to XA59 XC7 Shaft pattern sequencing II Weight S,W,X,T,J Reversed shaft XC8 to XC11 Change of rotating range (g) Change of angle adjustable range (0 to 100)" Size Standard weight XC12 to XC15 90 180 S,W,Y Change of angle adjustable range (90 to

Soft Start-up Valve AV2000/3000/4000/5000 1

8 x 1 12.5 x 9.5 x 1.5 11 x 9 x 1 NBR 1 For How to Order pilot valve assembly, refer to page 14-3-5. 9 Soft Start-up Valve Series AV2000/3000/4000/5000 Dimensions Grommet: AV00--G, GS DIN terminal: AV00--D, DZ DIN terminal for European use: AV00--Y, YZ L K Applicable cab tire cord O.D.: 6, 8 A A M Manual override (Locking lever type) 300 mm (Lead wire length) I G F.R.L.