XLA- ∗ -F7NJ ∗ - ∗ Series

Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Vale specifications Model XLC-25 XLC-40 Flange (valve) size 25 40 Actuating type Double acting/ activated by applying pressure Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 14 45 Leakage Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Pam3/

XMH/XYH Series

Specifications Table 4 Model Note 1 XMH-16 XMH-25 XYH-25 XMH-40 XYH-40 XMH-50 XYH-50 Flange (valve) size 16,CF034 25 40,CF070 50 Actuating type Manual Fluid Inactive gas under vacuum Operating temperature oC 5 to 150 Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 2 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures ,

CG1-OM0227

-2- / *3) 1 1.5 *3)1 1 () -3- 1. 1-1. 1.5MPa 1.0MPa 0.05MPa -10+70-10+60 +1.4mm 1000st 0 +1.8mm 1500st 0 / 2063 501000mm/sec 80100 50700mm/sec (P9, [2-6.]) () 2. 2-1.

CG1x-OM0006N

ON 23 4. 10. 24 5. 1 CG5SR CG5SV 2 15 3 16 NBR FKM 4 17 5 18 6 19 7 20 PET 8 21 9 22 10 11 12 13 14 1CG1 2 11. 25 Revision history 1: 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of

RS2H-OM0045P

OFF (OFF) 1. 2. 60 21 - 10. 22 - 23 - B 24 - A RS2H-OM0044PRS2H-OM0045P 12 B 17,24 9 C C +86-10-67885566 : 08:0017:00() SMC() URL http://www.smc.com.cn 2 100176 +86-20-28396516 : 08:4517:30() SMC() URL http://www.smcgz.com.cn 3 2 510660 +81-3-5207-8249 Fax: 81-3-5298-5362 : 09:0017:00() SMC URL http://www.smcworld.com /101-0021 4-14-1 2017 SMC Corporation All Rights Reserved

Toggle Type Air Gripper

-50DZ M10x1.5 21.7 12 MHT2-63DZ M12x1.75 26.6 10 7 - Caution 1.

Electric Actuator Slide table ／ High Precision Type High performance Battery-less absolute encoder

20800 10400 Speed[mm/s] Pushing speed[mm/s] 20~30 10~30 5~30 2030 1030 2030 1030 actuator specification Max.acceleration/ 10 Horizontal Vertical 2] 5000 deceleration[mm/s Position repeatability [mm] 0.01 note4) 0.1 or less Lost motion [mm] Screw Lead [mm] 10 5 2.5 12 6 16 8 Impact / Vibration note5) 50/20 2] resistance [m/s Actuation type Ball screw (In-Line) Ball screw + Belt (Parallel)

Ionizer Gun

If a product is required independently, please order using the product numbers above. 10 Doc. no.IZ*-OMX0012-B Cleaning kit IZS30-M2 IZS30-A0201 IZS30-A0202 1 10 1 Provided together with 1 felt pad grindstone, 1 rubber grindstone, and 2 replacement felt pads Provided together with 10 replacement felt pads Provided together with 1 replacement rubber grindstone 2 2. How to Use 2-1.

DOC1013639

Within -0.2 mm -10- 6.

POWER CLAMP CYLINDER

Refer to page 8 to 10. Please note that the graph should only be used as a guide as there is a tolerance of about 10% in the clamp cylinder body.

VEX-OMT0003

Screw tightening torque VO307K: 1.35 to 1.45 Nm V11 : 0.14 to 0.17 Nm Parts for manifold 02 03 04 02 03 04 04 06 10 01 02 10 12 01 02 14 20 Description VEX312VEX322VEX332VEX342VEX350VEX370VEX390Bracket (with bolt and washer) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A Foot bracket (with bolt and washer) VEX1-18-2A VEX3-32-2A Silencer for pilot exhaust port (PE) AN120-M5 AN103-01 AN210-02 Note 1

VFR2000 Series

Replace pilot valve assembly. (10) Protect the valve so that water does not splash the coil. (11) To remove foreign matter,air blow piping, then replace valve.

XLG Series

1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW) KF(NW),K(DN) Main material Body : Aluminum alloy, critical part : SUS304, FKM (standard seal material) Note 2 Surface treatment for body Outside: hard anodized Inside

Title not found

ft diagEm E : With indicator light and surco voltage suppssor i e l s I 3 14' 6 , ' , Lr 2.09 (s3) 2.72 (6e) 3.35 (85) 3.98 (101) 4.61 (117) 5.24 (i33) (i4e) 6.50 (165) (i&) (197) 8.39 (2|3) (?

/

6 TUZ0805 8 TUZ1065 10 TUZ1208 Tubing O.D.

CYRx-OM0001H

The grease can be ordered tool can be ordered by part no. shown on Table 6. by the following part no. <6, 10> 1) Inner side of cylinder tube A 2) Outer side of cylinder tube and sliding side of switch rail Table 6 Part no. of specific tool Part on. Applicable cylinder tube I.D.

LA-OMT0056

A5 A5 A6 A6 A7 A7 Internal Internal A8 A8 resistance resistance 10[k ] 10[k ] 24 VDC 24 VDC A9 A9 Main circuit Main circuit power supply power supply for the input for the input A10 A10 signals signals B1 B1 B2 B2 B3 B3 B4 B4 B5 B5 Maximum output Maximum output B6 B6 current: 10 mA current: 10 mA B7 B7 Pulse input internal circuit Note2) B8 Pulse input internal circuit Note2) B8 Pulse input

IDX-OM-U021

0.5 ON:SEC OFF:MIN 0.5 4-2-4 7 25 Y92S-36/CR2477/ 0 MEMO h (h) IDF100150F 4-2 4 4 IDX-OM-U021 4 , OFF [] IDF100150F 4-2 4 5 IDX-OM-U021 4 (+,-) 0 IDF100150F 4-2 4 6 IDX-OM-U021 5 5 5-1 3 ON OFF (R) OFFON 3 2 R T 5.2 60cm 1 5.2 5.2 10% 5.2 IDF100150F 5-1 5 1 IDX-OM-U021 5 ( ) ( ) 60cm 1 10% 3 ( ) 60cm 1 2 IN OUT INOUT () 424 IDF100150F 5-1 5 2 IDX-OM-U021

IDX-OM-X004

(50/60Hz) ID01 AC1 10 (50Hz) Power supply V ID05 AC200/200220 (50/60Hz) ID06 AC220 (50Hz) Permissible voltage change % voltage ratings -15+10 Apparent power V A 26/21 31/27 Rc Tube connection caliber 1/4 1/2 3/4 G NPT Mass kg 7 8.5 18.5 25 1 Condition entrance air pressure:0.7MPa temperature of entrance air At 35 oC saturation 2 Condition entrance air pressure:0.7MPa temperature of entrance