3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Pg.7 53<56.5> 3.5 to 7 VFS 142.5 MAX.10 71.5 VS Indicator light Cover diameter 1.5 Cross section 0.23mm2 VS7 < >: AC 82.5 75 0 1 01 02 M plug connector (M): VQZ225 (R)lMl 57 Indicator light Cover diameter 1.5 Cross section 0.23mm2 (Lead wire) 300 122.5<124.5> 61.5<62.5> 73.5 147 58.5<63.5> < >: AC 1.12-41 VQZ1000/2000/3000 Base Mounted Dimensions: VQZ2000 3 position closed center/exhaust

Direct Solenoid

cdptlon #11 Manitold glock *41 Manitold glock *'23 Manifold Block ir28 Manitold Block 1 g 1C 1 D H$?

Air Slide Table Series MXQ

of MXQ20-50 12 6.5 NA x M6 x 1 thread depth 6 12 36 48 25 K 12 6.5 41.5 0.5 6.5 46 Z ZZ (NN-1) x H G H 26 10.5 26 10.5 A B 5.1 5.1 9.5 9.5 11 11 29 6 B A NN x M6 x 1 thread depth 12 5H9 depth 5 HA GA 5H9 depth 5 +0.030 0 Section AA Section BB +0.030 0 (mm) ZZ 108 108 108 118 136 169 226 254 282 M 94 94 94 104 122 155 212 240 268 Z 92.5 92.5 92.5 102.5 120.5 153.5 210.5 238.5 266.5 K 31 41

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

Auto switch model D-P3DWm B 41 Hs 35 Ht A Bore size 50 63 80 14.5 6.5 16.5 10 47 44 30.5 17 55 54 Note) Adjust the auto switch after confirming the operating conditions in the actual setting. Operating Range Auto Switch Mounting Bracket/Part No. (mm) Bracket part no.

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

20 40 18 16 34 314 MHKL2-20C Dust cover adhesion (Finger part only) 25 63 22 19 41 565 MHKL2-25C Dust cover caulking Note) At the pressure of 0.5 MPa, when gripping point L is 20 mm.

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

37.5 34.5 25.5 38.5 40 33 35.5 26.5 36 32 28.5 29.5 31 24 27 80 46 42.5 39.5 29.5 43.5 45 38 40.5 30.5 41 36 32.5 33.5 35 28 31 100 50 46.5 43.5 31.5 47.5 49 42 44.5 32.5 45 38 34.5 35.5 37 30 33 41 Compact Hydraulic Cylinder Double Acting/Double Rod: 3.5MPa Series CHQWB B 32 to 100 D-A9 D-F9 D-F9W A B Approx.

Wedge Cam Operation Gripper Series MHK2

19.8 MHKL2-12S 90 12 2.0 (9) 11 9 20 3.7 Normally open Normally closed MHKL2-16S 16 3.8 (17) 14 14.6 28.6 5.8 MHKL2-20S 20 7.2 (32) 18 16 34 11.1 MHKL2-25S Single acting 25 11.9 (53) 22 19 41 19.9 MHKL2-12C 12 2.5 (11) 11 9 20 3.7 MHKL2-16C 16 4.9 (22) 14 14.6 28.6 5.9 L1 MHKL2-20C 20 9.0 (40) 18 16 34 11.1 L2 MHKL2-25C 25 14.2 (63) 22 19 41 19.9 Note) At the pressure of 72.5 psi (0.5MPa

Heavy Duty Stopper Cylinder Series RSH/RS1H

Double acting spring type Single acting RSH20T-PS RSH32T-PS RSH50T-PS RSH63T-PS RSH80T-PS Double acting RSH20D-PS RSH32D-PS RSH50D-PS RSH63D-PS RSH80D-PS RSH-R20 RSH-R32 RS1H-R50 RS1H-R63 RS1H-R80 Set of items 37 to 41 in above table Set of items 37 to 41 in above table (not including 39) The seal kits for 20 to 32 consist of items 37 to 41 and those for 50 to 80 consist of items 37 to 41

LZ-OM003xx

B [Tightening torque] L[]ZB[]3 M30 x 1.5 [1820Nm] L[]ZB[]5 M45 x 1.5 [2426Nm] *Use locking m echanism when m ounting Caution L[]ZB[]3 4 Across flat 26 L[]ZB[]5 5 Across flat 41 42 Direct m ounting on the m otor the motor Model no.

Series KV2 Fittings

25.40 25.40 30.00 30.00 30.00 21.7 21.7 19.2 22.2 22.7 21.7 26.0 30.7 33.2 28.7 26.2 34.2 32.7 29.7 38.6 37.9 47.5 50.5 52.5 17.6 17.6 13.4 18.1 16.9 15.6 17.8 26.6 27.4 22.6 18.1 28.4 26.6 21.6 32.5 29.8 41.4 42.4 43.9 16 16 16 17 17 17 17 21 21 21 21 22 22 22 25 25 33 33 33 1.6 1.6 1.6 3.5 3.5 3.5 3.5 5.4 5.4 5.4 5.4 8.5 8.5 8.5 9.8 9.8 12.8 12.8 12.8 8 9 14 8 14 24 54 23 27 25 42 40 40 41

Thermo-chiller/Rack Mount Type

Model Weight [kg]*1 Dimensions [mm] HRR010-A 43 Height 485 x Width 610 x Depth 820 HRR010-W 41 Selection HRR012-A HRR018-A 54 Warning Height 575 x Width 610 x Depth 820 HRR012-W HRR018-W 55 1. Model selection When selecting a thermo-chiller model, the amount of heat generation from the users equipment must be known.

Solid State Auto Switches

Weight (g) Model D-A90 6 30 D-A90V 6 30 D-A93 6 11 30 47 D-A93V 6 30 47 D-A96 8 41 D-A96V 8 41 0.5 m (Nil) 1 m (M) 3 m (L) 5 m (Z) Lead wire length Dimensions (mm) D-A90/D-A93/D-A96 D-A90V/D-A93V/D-A96V 2 2.8 4.5 2.7 Slotted set screw M2.5 x 4 L 4 24.5 (22) 22 2 6 Slotted set screw M2.5 x 4 L D-A90 without indicator light Indicator light 2.7 D-A90V without indicator light Indicator

CE

34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8 x 1.25 Rc 1/4 61.5 76.5 35 19 49 60 9 M10 x 1.5 Rc 1/4 64 89.5 35 19 For rod nut and accessory bracket, refer to page 10-12-20.

CE

34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8 x 1.25 Rc 1/4 61.5 76.5 35 19 49 60 9 M10 x 1.5 Rc 1/4 64 89.5 35 19 For rod nut and accessory bracket, refer to page 10-12-20.

90

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2013 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing RQ printing RQ 8150SZ Printed in Japan. D-G

Pressure Sensor Controller

PSE3 Applicable pressure sensor For compound For vacuum For low pressure For positive For low differential Rated pressure range -100 to 100 kPa 0 to -101 kPa 0 to 100 kPa 0 to 1 MPa 0 to 500 kPa 0 to 2 kPa Set pressure range 1 -101 to 101 kPa 10 to -101 kPa -10 to 100 kPa -0.1 to 1 MPa -50 to 500 kPa -0.2 to 2 kPa Set pressure resolution 0.2 kPa 0.1 kPa 0.1 kPa 0.001 MPa 1 kPa 0.01 kPa

3

(Refer to page 403 for details of the MK2T series.) 12, 16 20, 25 103 101 MK 102 (MK2T) Allowable moment of inertia [kgm2] Allowable moment of inertia [kgm2] 104 MK 103 105 16 Standard arm single unit 104 20, 25 Standard arm single unit 12 Standard arm single unit 106 105 50 100 200 50 100 200 Maximum piston speed [mm/s] Maximum piston speed [mm/s] 32, 40 50, 63 101 101 (MK2T) MK (MK2T) Allowable

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Max. 3.5 6 x Rc 3/8 6 x Rc 3/8 6 x Rc 3/8 3 position (229) 3 position (229) 3 position (193) Double (219) Single (143) Double (219) Double (182) Single (143.5) Single (125) (With light/surge voltage suppressor: 91.5) (With light/surge voltage suppressor: 108.5 (110.5)) (With light/surge voltage suppressor: 96) (With light/surge voltage suppressor: 101) (With light/surge voltage suppressor

SMC's VP300/500/700 series solenoid valve, offers high flow capacity and reduced power consumption (1.55W standard, 0.55W with power saving circuit). The VP series may be used as either a selector valve, or a divider valve. It is available in a normally closed or a normally open style. The series is vacuum applicable up to 101.2kPa., MANIFOLD ASSY 6-STA (VP3000), VALVE, VP3/5/7 SOL VALVE

SMC's?VP300/500/700 series solenoid valve, offers high flow capacity and?reduced power consumption (1.55W standard, 0.55W with power saving circuit).? The VP series may be?used as either a?selector valve, or a divider valve.? It?is?available in a normally closed?or a normally open style. The series is vacuum applicable up to ?101.2kPa., MANIFOLD ASSY 5-STA (VP3000), VALVE, VP3/5/7 SOL