Body Size/Type: 42 (Elbow Size 04 Standard), Control Type: 0 (Meter-out), 1: 1, Thread Type: N (NPT), Port Size: 04 (1/2), Applicable Tubing O.D: 11 (ø3/8")

Stations: 04 (4 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: F (G), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: Flow Adj.

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 04 Stations, Passage: 2 (P: Common, EA,EB: Common, Port A,B: Bottom), Port Size: 04 (1/2), Thread: T (NPTF)

), Calibration Certificate: A (w/Calibration Certificate), Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 04 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 04 (1/2), Thread: N (NPT)

: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

Base Mounted Wiring: 01CD (Base Mounted Plug-in w/Multi-connector on D Side), Stations: 04 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 04 (1/2), Thread: T (NPTF)

Stations: 04 (4 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 5 (Remote Sensor Unit), Rated Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: P (w/o Flow Adj.

: °C), Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate), Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

°C), Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate), Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

°C), Bracket: None, Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

VQ valves are ideal for applications requiring high speed, frequent operation, stable response time and long service life. Innovative mounting methods allow valves to be changed without entirely disassembling the manifold. Built-in one-touch fittings save piping time and labor. Fluid: air/inert gas, Operating pressure range: 0.10 - 1.0MPa, Effective area mm 2 (Cv): 2 position metal seal 72.0

Type: Speed Controller, Body Material: [Resin] Resin, Control Method: Meter-Out, Format: [Elbows] Plug-In Type, Environment, Applications: Standard, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Others, Applicable Tube O.D. mm(mm): 4, Body Size: M5 Standard

Type: Speed Controller, Body Material: [Resin] Resin, Control Method: Meter-In, Format: [Elbows] Plug-In Type, Environment, Applications: Standard, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Others, Applicable Tube O.D. mm(mm): 4, Body Size: M5 Standard

Type: Speed Controller, Body Material: [Resin] Resin, Control Method: Meter-Out, Format: [Elbows] Plug-In Type, Environment, Applications: Standard, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Others, Applicable Tube O.D. mm(mm): 4, Body Size: 01 Standard

Type: Speed Controller, Body Material: [Resin] Resin, Control Method: Meter-In, Format: [Elbows] Plug-In Type, Environment, Applications: Standard, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Others, Applicable Tube O.D. mm(mm): 4, Body Size: 01 Standard

Type: Quick Exhaust Valves, Body Material: [Resin] PBT, Input Side, Port Type P (P1): One-Touch Couplings, Output Side Port Type A: One-Touch Couplings, Exhaust Side Port Type R: One-Touch Couplings, Sonic Conductance IN -> OUT [dm3/(s/bar)]: 0.34, Applicable Tube O.D. d (inch): -, Applicable Tube O.D. d (mm): 4, EXH port: With Exhaust Port Fitting

Body Size: 10 (M5 Standard), Control: 1 (Meter-in), Rod and Applicable Tubing O.D.: ø4 - ø4

Body Size: 20 (01 Standard), Control: 0 (Meter-out), Rod and Applicable Tubing O.D.: ø4 - ø4